Table of Contents

0 3-5-80 81 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR5000 Plug-in 2 position single/double, 3 position closed center/exhaust center/pressure center 0 1 2 position single: VFR510 -F(Z) 21 [25] 32 [39] 40 [40.5] 31 [36] 25 [24] 31 [36] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB VK A B 32 [39] 40 [40.5] VZ 5-Rc 3/8, 1/2, 3/4 EA, EB port = Rc 1/2 in case of

Series SV

to 101) 2 position double 0.25 to 0.7 (36 to 101) Ambient and fluid temperature C (F) 10 to 50 (with no freezing) Note) (14 to 122) Power consumption W 0.6 (With light: 0.65) Other specifications (effective area, response time, etc.) are the same as standard products.

Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

Rubber seal 5 Port Solenoid Valve Series SYJ7000

SS5YJ7-21P-07 1 pc. (Manifold base) SYJ7123-5LOU-C8 3 pcs. (Valve) SYJ7223-5LOU-C8 3 pcs. (Valve) SYJ7000-21-3A 1 pc. (Blanking plate assembly) SY3000-37-3A 3 pcs. (Connector assembly) SY3000-37-4A 3 pcs. (Connector assembly) Example: The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. Use manifold specification sheet.

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

EXxx-OMW0014CN

LED EX245-DY1 LED(8 )(07) 07 OFF OFF ON ON ON . 8-2 EX245-DY1 LED 54 No.EX-OMW0014CN-A 8.6. EX245-DY1 4M12(5 ,) (n+1) (n) FE/ 24 V(/) 0 V(/) 24 V(/) 0 V(/) FE . 8-3 EX245-DY1 55 No.EX-OMW0014CN-A 9.

EXxx-OMU0020CN

LED EX245-DY1 LED8 07 07 OFF OFF ON ON ON . 8-2 LED 59 No.EX-OMU0020CN 8.6. EX245-DY1 4 x M12, 5-way sockets (0 to 3) N.C. DO (n+1) Output interface Short circuit protection 0 V DO (n) FE / Shield Output circuit / Bus interface 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE BUS . 8-3 EX245-DY1 60 No.EX-OMU0020CN 9.

air-filter-e

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

Secondary Batteries

Please make additional use of an air suction filter of the ZFA, ZFB or ZFC series. 90 Manifold X125 ZZQ1 07 B B 2 Series compatible with secondary batteries Port exhaust specifications 90 Material restriction Vacuum release pressure supply port (PD port) Maximum Number of Stations in Simultaneous Operation B None (Release pressure is supplied from the P port.)

Vacuum Ejector with Solid State Timer, Series ZMA

2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05 07 10 13 15 Lead wire length 0.6m Lead wire length 3m Without lead wires C CL CN Switch type Body type

Air Preparation Equipment

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

VVXA21/22

Blanking plate Common port Plug Individual port (Base) VVXA211-07 (Valve) VXA2121-00 (Blanking plate) VX011-001 1 pc. 6 pcs. 1 pc. The standard arrangement of manifolds should be placed on an individual port on this side, each solenoid valve from the left side and a blank plate in the right side.

Vacuum Ejector with Solid State Timer

2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 SMC Pneumatics, Inc.

ZMA

diameter C C CN Lead wire length 0.6 m Lead wire length 3 m No lead wire 05 0.5 mm 07 0.7 mm 10 1.0 mm 13 1.3 mm 15 1.5 mm ZL Refer to Table (2) for lead wire with 4-wire connecor.

RB/RBL/RBQ

How to Order With bumper Series RBQC Basic type Series RBQ C 20 07 RBQ RBQC C Replacement part no.

Ionizer

L 1000 mm 2000 mm 3000 mm 4000 mm 5000 mm 7000 mm 10 mm IZS31-CF01-X210 IZS31-CF02-X210 IZS31-CF03-X210 IZS31-CF04-X210 IZS31-CF05-X210 IZS31-CF07-X210 IZS31-CF10-X210 Connection cable from the right-hand side of the control unit Frequency selection switch 12P modular jack (Plug for power cable) 190 36 16 30 Order connection cables separately.

44

Applicable tubing 19 17 31.2 15.2 8.5 36 24 22 37.7 20.5 9.3 71 Union Nut: KFG2N Applicable tubing O.D.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233

Flow Control Equipment

Tube size AQ 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F TMH-01J TMH-03J AK TMH-05 TMH-07 TMH-09 ASS TMH-11 TMH-13 Dimensions Model D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric Inch TMH-23J TMH-04J 1/8J 1/32J 3/16 6 1/4 8 5/16 10 3/8 12 1/2 8.4 9.3 11.7 11.6 13.1 13.5 15.5 18.5 18.8 21.2 22 TMH-01J TMH-03J TMH-05 3.3 4.5

JXCx-OMT0061CN

(P.32) (1) [IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 101A CC-Link 101F CC-Link 1B READY 1C1F CC-Link (1) [] PLC RWr PLC RWw RWr bit RWw bit 0 (L) 0 1 (H) 1 (