Vacuum Pad

Note 2) The symbol "" indicates buffer type "J" or "K". Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note 2) The symbol "" indicates buffer type "J" or "K".

Vacuum Pad

Note 2) The symbol "" indicates buffer type "J" or "K". Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note 2) The symbol "" indicates buffer type "J" or "K".

Vacuum Pad

Note 2) The symbol "" indicates buffer type "J" or "K". Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note 2) The symbol "" indicates buffer type "J" or "K".

High Vacuum Angle Valve

K L S L M K L M Pilot port direction Solid state auto switch Left flange surface 1 Reed auto switch Right flange surface Without auto switch (with built-in magnet) 2 When the seal material is not being changed, there is no need to select a symbol.

Table of Contents

Piston speed (mm/s) Piston speed (mm/s) 1.

Hydraulic

TDe8 TR W W D D E E d d TY M a MA MA M a C K F NA F NA A K A B H S + Stroke H + Stroke 0 -0.5 TX ZZ + 2 strokes TZ (mm) Bore size (mm) E H TR A a B C d F G GA J K M MA MM NA P R S T D TDe8 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 -0.032 -0.059 -0.032 -0.059 -0.032 -0.059 -0.040 -0.073 -0.050 -0.089 -0.050 -0.089 -0.050 -0.089 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074

NCQ2/CQ2

U S 20, 25 M E 15 7 lV 12 H thread effective depth C 2 x M5 x 0.8 (Port size) EB EA 2 x N through D (D) Th9 (K) K Piston rod cross section U M With Boss in Head Side (CQ2 only) L G Q F E S Bore size (mm) 12 16 20 25 G Th9 lV 0 0.043 0 0.052 0 0.043 0 0.043 15 20 13 15 1.5 1.5 2 2 16 to 25 With boss on head end CQ2 Rod End MaleThread Th9 Bore size (mm) 12 16 20 25 C1 L1 X H1 9 10 12 15 M5

Compact Cylinder

H thread effective depth C EA Auto switch EB Minimum lead wire bending radius 10 Width across flat K U D D S 2 x N through 4 x O counterbore 2 x M5 x 0.8 (Port size) K Q Q lV M L L + Stroke B + Stroke E A + 2 (Stroke) 16 to 25 Rod end male thread 2 x MM H thread effective depth C 8 Width across flat B1 U Width across flat B1 H1 H1 C1 S C1 2 x N through 4 x O counterbore X X L1 + Stroke L1

Rotary Actuator/Vane Type

hole to through-hole W, S, J, K, T, Y XC3 Change the screw position W, S, J, K, T, Y XC4 Change the rotation range W, S, J, K, T, Y XC5 Change rotation range between 0 to 200 W, S, J, K, T, Y XC6 Change rotation range between 0 to 110 W, S, J, K, T, Y XC7 Reversed shaft W, J XC30 Fluorine grease W, S, J, K, T, Y X5 For M5 port (90/180) W, S, J, K, T, Y Rotation time adjustment range s/90

Made to Order

699 1740 B Made to Order Common Specifications: Long Stroke Type Symbol -XB11 Dimensions CXWL series: 20, 32 (mm) Model F L K P Q S SS Z ZZ CXWL20-225 116.5 239 42 90 564 227 323 550 578 CXWL20-250 264 42 90 614 252 348 600 628 129 CXWL20-275 141.5 289 42 90 664 277 373 650 678 Model F L K P Q S SS Z ZZ CXWL32-225 41 277 30 255 584 227 337 564 604 CXSJ series: 10 M L CXSJ series: 15, 20,

Air Cylinder

S 1 pc. n n pcs.

Table of Contents

the speed of 200 mm/s.

Table of Contents

10) D1 E B D2 A Model S C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

V

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T

CRBU

Shaft Pattern Sequencing II -XA31 to XA47 Applicable shaft type: J, K, S, T, Y Shaft type CRB2 J K Refer to CRBU2 S page 11-3-4.

Smooth Cylinder/Low Speed Cylinder

-X 1191 Series CM2Y Basic Style (B) CM2YB Bore size Stroke H1 H2 G G 2 x NN 2 x P (Rc, NPT, G) Width across flats B2 Width across flats B1 I 2 x Eh8 NA D Effective thread length 2 x FL Width across flats KA MM AL A F N N K NA 1.5 1.5 S + Stroke F H ZZ + Stroke Boss-cut ZZ + Stroke (mm) B1 FL K KA N NA NN P S B2 D H2 I MM ZZ E A F AL G H H1 Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20

Table of Contents

Y A J K B Y C D Misc.

CA2

A N F N S + Stroke H FT FZ FX ZZ + Stroke Without auto switch With auto switch Bore size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 H1 B B FV FD FX FY C A AL B1 D E FT FZ G H J K S S ZZ 157 170 181 215 226 KA MM N P ZZ 147 160 171 205 216 30 35 35 40 40 27 32 32 37 37 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 9 12 12 15 18 18 80 90

AC Servo Motor Driver (Pulse input type/Positioning type ）

PG 11 CN1 P S T 1.2 k Approx. 100 NP 35 4 5 6 7 8 9 LA Approx. 1.2 k NP2 38 LAR Differential line driver output (35 mA or less) NG 36 LB LBR LZ LZR Open-collector output OP LG 33 34 (Note 1) CN1 P S T (Note 1) CN3 P S T 2 VC VLA RS-422/RS-485 5 4 3 6 7 SDP SDN RDP RDN 27 TLA TLA TC 15 V DC 1 P15R LG 3 LG 28 LG (Note 1) 30 LG SD CN6 P S T Analog monitor Case 3 MO1 10 V DC MO2 2 10 V DC LG

Aluminum High Vacuum Angle Valve

K L S L M K L M Pilot port direction Solid state auto switch Left flange surface 1 Reed auto switch Right flange surface Without auto switch (with built-in magnet) 2 When the seal material is not being changed, there is no need to select a symbol.