XL Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Minimum Strokes for Auto Switch Mounting (mm) D-A7H D-A80H D-F7 D-J79 D-F9B D-F9P D-F9W D-A7 D-A80 D-A73C D-A80C D-A9V D-F7W D-J79W D-F7BAL D-F79F D-F9BAL D-F7V D-J79C D-F9V Number of auto switches D-F7LF D-A9 D-F9N D-F7WV D-F9WV D-A79W 1pc. 2pcs. 5 5 10 15 15 20 25 10 5 10 15 15 20 20 25 10 Applicable Auto Switch Auto switch model Page Electrical entry (Function) Style Grommet (Perpendicular
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Auto switch model 2 (Same side) 2 (Different sides) 1 2 1 D-C7/C80 Band mounting style Rail mounting style 50 15 10 D-H7/H7W 60 15 10 D-H7NF D-C73C/C80C Note) Small round head screws 65 15 10 D-H7C Plate D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V D-J79C D-A79W/F7W D-J79W D-F7WV/F79F Solenoid valve 10 5 Pipe gasket 5 5 15 10 2.
Auto switch model 2 (Same side) 2 (Different sides) 1 2 1 D-C7/C80 Band mounting style Rail mounting style 50 15 10 D-H7/H7W 60 15 10 D-H7NF D-C73C/C80C Note) Small round head screws 65 15 10 D-H7C Plate D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V D-J79C D-A79W/F7W D-J79W D-F7WV/F79F Solenoid valve 10 5 Pipe gasket 5 5 15 10 2.
Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5
12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F D-F5W/J59W D-F5BA
Note 3) Through-hole mounting is not possible when using auto switch types D-Y59, D-Y69, or D-Y7. Note 4) D-M9, D-M9V switch types are not possible to mount on size 10.
Note 3) Through-hole mounting is not possible when using auto switch types D-Y59, D-Y69, or D-Y7. Note 4) D-M9, D-M9V switch types are not possible to mount on size 10.
DP V1 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 156 k/625 k/2.5 M /5 M/10 M Communication speed [bps] 10 M/100 M 125 k/250 k/500 k Configuration file Note 2) GSD file EDS file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 57 words Output 57 words Input 256 bytes Output 256 bytes Input 200 bytes Output 200
(mm) Bore size D-A9n, D-A9nV D-F9n, D-F9nV D-F9nW D-F9nWV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.)
) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U V 10, 3/8", 12 91 (97) 22.5 30 45 20 6 13.5 41.5 25 33
AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25
Same side Different sides Different sides Same side D-C7 D-A7/A80 D-A73C/A80C D-A7H D-A80H D-A79W 90 55 50 15 10 5 10 35 D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 5 10 45 105 65 65 15 10 10 15 40 D-F7 D-J79 5 5 45 105 60 60 15 10 D-F7V 5 5 30 D-J79C D-F7W D-J79W 10 15 55 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588
Same side Different sides Different sides Same side D-C7 D-A7/A80 D-A73C/A80C D-A7H D-A80H D-A79W 90 55 15 50 10 5 10 35 D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 5 10 45 105 65 15 65 10 10 15 40 D-F7 D-J79 5 5 45 105 60 15 60 10 D-F7V 5 5 30 D-J79C D-F7W D-J79W 10 15 55 D-F7BAL D-F79F D-F7WV 10 15 40 D-F7BAVL D-A79W can not be mounted on bore size 8, 10, 12 cylinder.
Y300-D Y300T-D Y400-D Y400T-D Seal HNBR Y220P-050S Y320P-050S Y420P-050S Dimensions Spacer Spacer with bracket A (Spacer width) A (Spacer width) K D F H J G E E E D C Center of F.R.L. body Center of F.R.L. body B C B EE (Except Y300T-D) Part no.
D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.
Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated
MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2
19.2 k/ 45.45 k/93.75 k/ 187.5 k/500 k/ 1.5 M/3 M/6 M/ 12 Mbps 10 k/20 k/50 k/ 125 k/250 k/ 500 k/800 k/ 1 Mbps 156 k/625 k/ 2.5 M/5 M/ 10 Mbps Communication speed 5 Mbps 10 M/100 Mbps 125 k/250 k/500 kbps 167 kbps Specified file Note 3) EDS file EDS file GSD file EDS file EDS file EDS file 48/32 SAS7: 8/8 (2 slave units) SAS9: 4/4 64/64 SAS3: 8/8 (2 slave units) SAS5: 4/4 Occupied area