VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

High-precision Digital Pressure Switch

(Pattern for 3 digits on the right) Characters Q, X, Z, /, or cannot be displayed. (Pattern for 1 digit on the left) Characters A to Z can be displayed (the same as the 3 digits on the right). Display OFF The Sub display is not displayed. -41No.PS-OMW0002-C [F11] Display resolution setting This function is to change the pressure display resolution.

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: N (NPT), Port Size: 02 (1/4), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Z (Unit of Product Label: psi)

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: NPT, Port Size: 1/4, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: psi

PFM7

(2 m) Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 T Panel mount adapter (For without flow adjustment valve) R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) Nil None ZS-33-J ZS-33-M

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Digital Pressure Switch

Voltage resistance Z Zero clear (function) Adjusts the displayed pressure value to "0". -13No.PS-OMH0003-F Mounting and Installation Piping Piping connection Connect the fitting to piping. When piping, tighten to an appropriate torque of 13.6 to 15 Nm for ISE70 series and 25 to 28 Nm for ISE75/75H series.

V

U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R (See Valve Section) VP34lR, VP54lR, VP74lR (See Valve Section) VNB Series (See Valve Section) S 40R H O W T O O R D E R VQ B A S E M O U N T E D S E R I E S (P L U GI N) S E R I E S Y SY X SX VQ 0 R O R D E R A S S TA N D A R D T Y P E S I Z E F O R E X T E R N A L P I L O T S I Z E 3 5 7 A S S TA N D A R D 1 2 O R D E R A S

I

E R S E R I E S V Y D I M E N S I O N S S E E N E X T P A G E VY1 O O P T I O N T H R E A D B Bracket F Foot (A and 1 body sizes only) G Gauge (not available on D body) N Silencer P I L O T 0 Internal 1 External (not on VYID00) Nil Rc(PT) T NPTF F G(PF) N NPT) B O D Y S I Z E P O R T S I Z E Mounting Type Symbol Symbol P,A port R port Cv Hysteris Sensitivity Repeatability Notes: 1.

F

E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: F (G), Port Size: 06 (3/4), Mounting: B (w/Bracket), Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: F (G), Port Size: 03 (3/8), Mounting: B (w/Bracket), Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: Rc, Port Size: 04 (1/2), Mounting: B (w/Bracket), Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: F (G), Port Size: 04 (1/2), Mounting: B (w/Bracket), Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: G, Port Size: 3/4, Mounting: w/Bracket, Silencer: w/Built-in Silencer, EXH Port, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: G, Port Size: 3/8, Mounting: w/Bracket, Silencer: w/Built-in Silencer, EXH Port, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: Rc, Port Size: 1/2, Mounting: w/Bracket, Silencer: w/Built-in Silencer, EXH Port, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa