Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

-lLll-01 M plug connector (M): SYJ5 40-lMll-01 VFS 2-4.3 (Mounting holes) 2-4.3 (Mounting holes) VS 24 (Mounting holes pitch) (Mounting holes pitch) A B A B VS7 B A 24 B A R P R P 37.5 4 37.5 4 (Mounting holes pitch) 43.3 (Mounting holes pitch) 43.3 18.1 48.9 18.1 (Lead wire length) 60.5 35.3 39.3 [40.6] 103.8 [106.4] 300 123 300 (Lead wire length) 45 62.6 [69.1] 51.5 [58] 45 39.1 32.5

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

suppressor) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): 10-SYJ54M-L-01 M plug connector (M): 10-SYJ54M-M-01 DIN terminal (D, Y): 10-SYJ54MD Y-01 M8 connector (WO): 10-SYJ54M-WO-01 Approx. 300 (Lead wire length) 65.5 [67.7] Applicable cable O.D. 3.5 to 7 82.4 74.9 49.6 [56.6] Max. 10 63.6 34.2 M8 x 1 48.5 54.1 36.6 Approx. 300 (Lead wire length

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

4.5 1 B 2 14.3 18 A 4 Station D Side 13 72 (Single) 0.5 (25) (Lead wire length) 107 (Double) 116 (3 Position) 300 Cover diameter 1.6 Cross section 0.34mm2 P=16 21.7 B 2 14.3 A 4 48.5 10.3 7.4 1 P 3 R 16 Rc(PT)1/8 8.5 2-Rc(PT)1/8 R(EXH)port 23.4 14.6 2-Rc(PT)1/8 P(SUP)port The broken line indicate DIN rail mounted style [-D] 45.5 4 L type plug connector (L) M type plug connector (M) 131

Rubber seal 5 Port Solenoid Valve Series SYJ5000

connector (L): SYJ5140-L-01 M plug connector (M): SYJ5140-M-01 DIN terminal (D): SYJ5140-D-01 M8 connector (W0): SYJ5140-W0-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 82.6 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 M8 x 1 49 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 73.5 [75.7] 63.7 [65.9] 83.5 65.2 72.6 58.7 0.5 45.5 45.5 45.5 45.5 17 17 17 17 17

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

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A 30 Hs Auto SWitch uto ASWltch P roper Mountm Position (mm) ' D-ASO D-A60 D-A30 D-A44 D-G39 D-K39 D-M90 D-M9OV D-M9OW D-M9OWV D-M90AL D-M90 AVL D-FSOW D-J59W D-FSBAL o.F50 D-J50 o.F59F 0.=80 o.Y5DN60 o.Y7PIY7PV o.Y70W o.Y70WV o.Y7BAL ~ switcl:l . rnod8l o.A90 o.A9OV o.A59W D-F5NTL A B A B A B A B A I B A B A B Bore size 125 9 8 13 12 6.5 5.5 3 2 7 I 6 9.5 8.5 14.5 13.5 140 9 8 13 12 6.5

VEX1

Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System Solenoid valve Speed controller Tubing diameter x Length Silencer A B C D E F G H I J K 10 x 1 m 12 x 1 m 12 x 1 m SGP15A x 1 m SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m VEX VEX3 2-02 1 2 AS4000-02 AN200-02 AS420-03 AS420-04 AS420-04 AS500-06

Speed Controller with One-touch Fitting

D1 D3 AS-F AS-F TMH L4 L3 M ASD AS D2 L5 A AS-FE KE AS-FG T AS-FP L2 L1 H (Width across flats) AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS231F-01-23(S)A 3.2 13.3 24 17.5 36 30.6 29.2 27.5 26.1 13.3 10 (10) AS231F-01-04(S)A 4 8.2 13.9 25.1 AS231F-01-06(S)A 6 10.4 26.2 20.4 38.8 11 (10) AS231F-01-08(S

KP/KPQ/KPG

P D M A L 8 4.2 D H Connection threads Straight Union: KPQH, KPGH Effective area mm D Model L Applicable tubing O.D. mm Note 1) 2-Applicable tubing Weight g M TPH TPS 4 KPQH04-00 KPGH04-00 10.4 4 4 37.4 18 4 D D 6 KPQH06-00 KPGH06-00 12.8 39.6 19.5 10 10 6 M M L 8 KPQH08-00 KPGH08-00 15.2 26 18 10 44.4 21.5 10 KPGH10-00 KPQH10-00 18.5 15 24 41 29 48.6 12 KPQH12-00 KPGH12-00 20.9 46 18 50.6

Series KP/KPQ/KPG

P D M 8 A L 4.2 D H Connection threads Straight Union: KPQH, KPGH Effective area mm D Model L Applicable tubing O.D. mm Note 1) 2-Applicable tubing Weight g M TPH TPS 4 KPQH04-00 KPGH04-00 10.4 37.4 18 4 4 4 D D 6 KPQH06-00 KPGH06-00 12.8 39.6 19.5 10 10 6 M M L 8 KPQH08-00 KPGH08-00 15.2 44.4 21.5 26 18 10 10 KPQH10-00 KPGH10-00 18.5 48.6 24 41 29 15 12 KPQH12-00 KPGH12-00 20.9 50.6 25 58

Series KP/KPQ/KPG

P D M 8 A L 4.2 D H Connection threads Straight Union: KPQH, KPGH Effective area mm D Model L Applicable tubing O.D. mm Note 1) 2-Applicable tubing Weight g M TPH TPS 4 KPQH04-00 KPGH04-00 10.4 37.4 18 4 4 4 D D 6 KPQH06-00 KPGH06-00 12.8 39.6 19.5 10 10 6 M M L 8 KPQH08-00 KPGH08-00 15.2 44.4 21.5 26 18 10 10 KPQH10-00 KPGH10-00 18.5 48.6 24 41 29 15 12 KPQH12-00 KPGH12-00 20.9 50.6 25 58

13

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

OMU0023

[m] Note1) 1 More than 0 Note 1) No D9115 4 AREA B position 2 [m] Note1) 1 More than 0 Note 1) No D09117 Writing is not available. to D0911F Note 1: The maximum value is the same as for the Card Motor maximum stroke [m].

IIIIIII

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

Mechanical Valves Series NVM, NVFM, NVZNI

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

Basic type / Direct mount type Series CY3B/CY3R

0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1236

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

flats H E E A B 2-P 2-P Port size A B Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats

LEC-OM02704CN

(2) (b) (3) (c) 7 8 7MR Configurator (4) (d) (5) (e) 1 (6) (f) (7) (g) Enter (8) (9) (10) (11)(h) 7 9 7MR Configurator 7.6 PD12PD14 (1) 7 10 7MR Configurator (2) (a) DIDO a b d c (a) (b) (c) (d) 7 11 7MR Configurator (b) DIDO a b DIDO ON(a) ON (2)(c) (b) 7 12 7MR Configurator (c) ON DIDOON a b c d e ONONON ON(a) ON ON(b) ON ON(c) ONON ON(d) ON ON(e) 7

Direct Operated

Class B) Model Orifice diameter Port size P Conduit terminal J K J K J K M J K M N N.C., N.O., COM.