KQ2

Nipple: KQ2N M Applicable fitting D 4 6 Mass (g) Model L M d H 2 x applicable fitting KQ2N04-99 KQ2N06-99 37 39 2.5 4 1 2 16 17 KK 8 KQ2N08-99 43 18.5 6 2 10 KQ2N10-99 49 21 7.5 4 D 12 KQ2N12-99 52 22 9 20.6 16 KQ2N16-99 57 25 13 31 MS Reducer Nipple: KQ2N LQ Mass (g) Applicable fitting Applicable fitting Model L M1 M2 d Applicable fitting MQR 6 8 10 12 16 4 6 KQ2N04-06 KQ2N06-08 17 18.5

Modular Type Regulators Series AR

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AR20(K) Rc 1/4 AR60(K) Rc 1 AR40(K) Rc 1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 5000 10 0 0 200 400 600 800 1000 2000 3000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AR25(K) Rc 3/8 AR40(K)-06 Rc

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

4/5 Port Solenoid Valve

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AK AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 VCHC Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

L: Plug lead type L plug connector, With lead wire With light/surge voltage suppressor Plug lead unit manifold VV4QD15-05M51 set Manifold base part no.

Series VQ Metal Seal/Rubber Seal Body Ported

Blank plug Dimensions 23 04 06 KQP-X19 A L D Model Fittings size d Color: White 3.2 4 6 16 16 18 3.2 6 8 31.5 32 35 KQP-23-X19 KQP-04-X19 KQP-06-X19 It is inserted into an unused cylinder port and SUP/ EXH ports. The minimum order quantity is 10 pcs.

Modular Type Air Filters Series AF

AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L dimension L dimension 1.5 m AXT100-DS25-015 AXT100-MC26-015 1.5 m 3 m AXT100-DS25-030 AXT100-MC26-030 3 m 5 m AXT100-DS25-050 AXT100-MC26-050 5 m When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 Approx. 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.

VQZ1000/2000/3000

448 34 485.5 37 473 36 39 498 38 40 L dimension 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 3.2 31.5 16 Color: White 6 32 16 8 35 18 10 39 20.5 12 43 22 Silencer (For EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS2002FS-06 When connecting 4 pcs. and mounting L-brackets on both sides AS-20A Speed controller AS2002FS-06 4 pcs. 3 111 2 L-bracket AS-20L 2 pcs.

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

0.4

L RUN SERIAL UNIT L ERR.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3302F-06 12 x 1 m AS4002F-12 AN20-02 AS2302F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing diameter x Length Speed controller Silencer Base mounted Tubing diameter x Length Speed controller Silencer AN20-02 AN3301F-06 AS1302F-06 6 x 1 m AS3002F-06 10-SYJ7123

Pilot Operated

For Air (Orifice size: 10 mm, 15 mm, 20 mm, 25 mm) How to read the graph The sonic range pressure to generate a flow rate of 6000 l/min (ANR) is P1 0.57 MPa for a 15 orifice (VXD214 -03) and P1 0.22 MPa for a 20 orifice (VXD215 -06).