Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

Table of Contents

0 IS1000 No. q w e r t y u i o !

Stainless Steel One-touch Fittings Series KG

3 8 KGU08-03 1 4 KGU10-02 61 62 65 40 28.4 30 40 65 R(PT) 19 3 8 KGU10-03 18.5 21 10 18.5 1 2 KGU10-04 22 1 4 KGU12-02 64.5 65.5 68.5 57.4 45.4 32 40 65 58.5 59 60.5 3 8 KGU12-03 20.9 22 20.9 12 22 1 2 KGU12-04 Reference dimensions after R(PT) thread installation.

Series KG Stainless Steel One-touch Fittings

3 8 KGU08-03 1 4 KGU10-02 61 62 65 40 28.4 30 40 65 R(PT) 19 3 8 KGU10-03 18.5 21 10 18.5 1 2 KGU10-04 22 1 4 KGU12-02 64.5 65.5 68.5 57.4 45.4 32 40 65 58.5 59 60.5 3 8 KGU12-03 20.9 22 20.9 12 22 1 2 KGU12-04 Reference dimensions after R(PT) thread installation.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02 AS331F-N02

SYJ300/500/700

P and R port Type 40R Applicable solenoid valve SYJ514RSYJ524RHow to Order SS3YJ5 40R 05 01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8 Note) For

Fieldbus System

S Z NS NZ r Pilot type Nil R Internal pilot External pilot Only Nil is available for M5. !

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

24 (58) VF (C10) (02) VFR VP7 38.5 31.5 24.5 3 VP4 23.4 Mounting holes 48 (58) 15 15 1.5 1.5 VQ P 3 5 1 2-PE port 2-Rc(PT)1/8 R port VQ4 22.2 Die cast hole For manifold gasket positioning Rc(PT)1/4 P port VQZ VQD 3 4 5 3 4 5 0 1 0 1 DIN connector (Y): VQZ3 2 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ3 2 (R)wLwC6, C8, C10, 02 VZS 155.5 <157.5> 300 (Lead wire length) 71 <72> VFS Indicator

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

0.4

-STA1) 120 80 4 46.2 ERR T/R RUN (35) 0 1 DIP SW.

5 Port Air Operated Valve

276 303.5 331 358.5 386 413.5 441 468.5 496 523.5 551 71.5 99 126.5 154 181.5 209 236.5 264 291.5 319 346.5 374 401.5 429 456.5 484 511.5 539 566.5 1521 VFA3000/5000 Series Dimensions: VFA5000 Series Type 40: VV5FA5-40-2-02: Common exhaust 6.5 L2 L1 28 4 x 7 20.5 (For mounting) 13 66 50.5 59.5 B A B A B A B A B A PE PE 47 47 R P R R R 138 27.5 119 55 71 79 P 1.3 3/8 [1 (P), 3/5 (R) port

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

VZ5000

sides of R port.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

KQ2

Note) Port size with sealant: Only R R R R Branch Y U Y Male run tee M5 M5 x 0.8 01 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 01 05 07 1 8 " 02 03 04 00 Bulkhead connector E Bulkhead union 3 16 " " 1 4 mark: With sealant is available. 09 " 5 16 Same dia. tubing 11 3 8 1 2 " " 13 77 Series KQ2 Male Connector: KQ2H Applicable tubing O.D.