CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

HRX-OM-S004

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Smooth Cylinder/Low Speed Cylinder

L1 1273-1 A Series CQ2X Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Surface material: Nickel plated Material: Cast iron Surface material: Nickel plated Material: Carbon steel

Secondary Batteries

L-bracket 53 Quick Exhaust Valve with One-touch Fittings 90-AQ240F/340F Series How to Order IN, OUT port applicable tubing O.D. 04 4 Exhaust port Body size 04 Applicable tubing O.D. 4 2 M5 04 90 04 AQ 2 4 F 0 3 4 F 0 06 AQ 06 90 Exhaust port Series compatible with secondary batteries 06 Applicable tubing O.D. 6 90 Material restriction IN, OUT port applicable tubing O.D.

HRX-OM-W032

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Fluoropolymer Piping Equipment

Connection threads Rc/NPT B C E H L1 L2 M Min. port size Y Model Applicable tubing O.D.

PF2A/PF2W

Z directions for 2 hrs. each 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Resistance Note 1) In the case of PF2W711, 3% of F .S. or less (15C to 35C, based on 25C).

5

L1 D-X 243 CQ2Y Series Dimensions of Accessories Single Knuckle Joint Double Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Surface treatment: Nickel plating Material: Cast iron Surface treatment: Nickel plating (mm) Material: Carbon

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

Digital Flow Switches, Series PF2A, Series PF2W

Z directions for 2 hrs. each 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s, Rise time 1ns Resistance Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, based on 25C).

Digital Flow Switches

Z directions for 2 hrs. each 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s, Rise time 1ns Resistance Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, based on 25C).

VP300/500/700

) (D, Y) VS N.C.

VQ7-6/7-8

03 04 Enter only when using for 2 position single or double.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ131 (H) (Y) Voltage1 to 6 VQ131 (H) (Y) Voltage1 to 6 Pilot valve assembly Pilot valve assembly t t Note 1) (Y): 0.5W (H): 1.5W Note 1) (Y): 0.5W (H): 1.5W 1.10-205 Construction Construction: Plug Lead Unit/VQ0 Metal seal Rubber seal Component Parts Component Parts No.

Stainless Steel One-touch Fittings Series KG

27 19 53 42 34 22 1 4 3 8 KGH12-02 KGH12-03 28.5 34.5 19 12 23.5 22 46.1 58.3 30 1 2 3 8 1 2 KGH12-04 KGH16-03 KGH16-04 51 61 47 22 22 81 (81) 113 (96) 38.5 32 34.5 26.5 16 24 24 Reference dimensions after R(PT) thread installation.