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26.4 4A 4A 10 12 2B 2B 6 11.5 1.7 1.7 G: Approx. 300 H: Approx. 600 (Lead wire length) 47.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 47.5 124.4 124.4 (13.4) (Distance between ports) (Indicator light) + 44.5 5EA 6 21.5 3EB 14.5 12 M5 x 0.8 [5(EA), 3(EB) port] (5.5) (40) (50) 2 x 4.5 (For mounting) M5 x 0.8, 1/8 [1(P) port] 2 x 2.2 (PE port) Grommet (G) (H) DC without light/surge voltage

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Fluoropolymer Piping Equipment

B E F G H L M Min. port size M LQ1T11 4 2 10 4 8 18.5 11.5 2.6 LQ1T12 3 1.8 LQ1T21 6 4 15 6 12 14 28 16.5 3.6 LQ1T22 4 2.6 LQ1T2C 3 1.8 LQ1T31 10 5 20 9 18 17 36.5 23 7.4 LQ1T32 8 5.5 LQ1T33 6 3.6 LQ1T41 12 6 24 9 18 21 43 28 9.4 LQ1T42 10 7.4 LQ1T51 19 7 29 14 28 26 54 39 15 LQ1T52 12 9.4 LQ1T61 25 8 39.5 18 36 36 69.5 49 21.2 LQ1T62 19 15 1/8 Class 1 F (E) 2 x B M L 1/4 H G (E) (E) L L

5 Port Solenoid Valve Series SV1000/2000/3000/4000

One-touch fitting for 12 Rc 1/4 Rc 3/8 G 1/4 G 3/8 A, B ports mixed SV4000 NPT 3/8 SV4000 Rc 3/8 NPTF 3/8 G 3/8 In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

Electric Actuator

Note 5) For step data input, up to 12 controllers connectable.

CV/MVGQ

, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77 78 Valve Mounted Cylinder: Non-rotating

CV/MVGQ

, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77 78 Valve Mounted Cylinder: Non-rotating

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

6 M6 x 1 13 G 1/8 4 12 15 30 Up to 1000 22 213 30 9 5 4 105 16 37.5 13 M12 x 1.25 6.5 M6 x 1 14 G 1/4 4 16 17 35 Up to 1000 24 244 37 10.5 6 4 106 16 37.5 17 M16 x 1.5 8 M8 x 1.25 15.5 G 1/4 5 20 24 40 Up to 1000 32 259 37 12 9 4 121 16 45 17 M16 x 1.5 8 M8 x 1.25 16.5 G 3/8 5 20 24 45 Up to 1000 32 300 46 14 11.5 4 128 17 45 22 M20 x 1.5 10 M10 x 1.5 19 G 3/8 25 30 45 Up to 1000 40 320

V

The Electrical Entry Port G (PF) 1/2 permits connection of Conduit Fittings. Max 12 Stations.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

P G P Table 2.

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/Dimensions Standard/VPA344-1l 01 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-1l 01 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 18.5 1/8, 1/4 3(R) port

5 Port Solenoid Valve Series VQZ1000/2000/3000

. [ ]: AC Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC 945 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 Position Double Grommet (G): VQZ125 (R)-G1-01 0 1 1/8 [4(A), 2(B) port] 14.4 10 B A 95.6 Approx. 300 (Lead wire length) 2 x 3.4 (For mounting) 3 36 3 4 2 22 B A 5 3 1 Manual override 51.2 + + 47.2 31.8 R2 R1 P 2 x PE port 20 14.6 14.6 14 X 12 Y 12 10 10

Valve Single Unit

16.5 14.5 13 17.5 15.5 14 12 Note) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

Valve Single Unit

00F Manifold base (6 stations) 7 SX7000 00N NPT SS5X3-20P-06 12 stations 12 NPTF 00T Note) For SS5X3: 4 to 12 stations.

Table of Contents

) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The

Air Cylinder

V 3 wire (PNP) M9P IC circuit 2 Wire M9B 3 wire (NPN) M9NW 12 V Solid state switch 3 wire (PNP) M9PW IC circuit Diagnostic indication (2-color indication) 2 Wire M9BW 3 wire (NPN) M9NA 5 V 12 V Relay, PLC Yes 24 V 12 V Water Resistant (2-color indication) 5 V 12 V 3 wire (PNP) M9PA IC circuit 12 V 2 Wire M9BA 3 Wire (NPN equivalent) A96 IC circuit Yes 5 V Reed switch No 12 V 100 V A93 Relay

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to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12 stations)/Double wiring For P, G, T, S kit (13 to 24 stations)/Double wiring For P, G, T, S kit (2 to 24 stations)/Single wiring L0 kit L1 kit L2 kit F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 U side D side EXH passage blocked Solid forming 1 to 8 stations The