CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

Metal Seal/Rubber Seal Series VQ Body Ported

Note) L M G Note) L M G VQ111 (H) (Y) VQ111 (H) (Y) X18 Nil {A side (Bottom side)} {B side (Top side)} X18 Nil {A side (Bottom side)} {B side (Top side)} 3 position (VQ1000) 3 position (VQ1000) Voltage 1 to 6 Voltage 1 to 6 Note 1) (H): 1.5 W, (Y): 0.5 W, G type: DC only Note 1) (H): 1.5 W, (Y): 0.5 W, G type: DC only 2-4-99 Series VQ Construction: VQ1000/Plug Lead Unit, Cassette Type Metal

AW

Note 3) Drain guide is G 1/8 (applicable to the AW20(K)) and G 1/4 (applicable to the AW30(K) to AW60(K)). Note 4) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

Compact Manifold Regulator Series ARM5

ARM5B R 06 A Individual Supply Type 3. Options 1.

KQ2

0.1 2.2 8 KQ2C-08 14.1 9.2 2.9 0.1 10 KQ2C-10 17.1 11.2 0.2 12 KQ2C-12 19.1 13.2 0.2 16 KQ2C-16 26.3 17.2 3.9 0.3 B (Black), R (Red), YR (Orange), BR (Brown), Y (Yellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) Plug: KQ2P, KQP Applicable fitting size d Mass (g) Model Note) D L A 3.2 KQP-23 31.5 16 1 5 KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 4 6 KQP-04 KQP-06 32

Table of Contents

m3 Vertical mounting m4 Note) M3 Static load (m) M1 m4 x g x Z m1 x g x X m2 x g x X M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

Modular Type Regulator Series AR

Standard specifications Model AR20K AR25K AR30K AR40K AR40K-06 AR50K AR60K Port sizes 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Air Fluid 1.5MPa Proof pressure 1.0MPa Maximum operating pressure 0.05 to 0.85MPa Set pressure range Note 1) Pressure gauge port size Note 2) Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Set

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

SX

AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB Series CS1 SGP10A x

Modular Type Air Filters Series AF

Example) AF30-03B-2R-X430 X430 X440 Low temperature High temperature Symbol 30 40 50 60 20 Body size Description 30 40 50 60 Body size Description Symbol Nil N Note 1) Rc NPT G F Note 2) Thread type Nil N Note 1) Rc NPT G + F Note 2) Thread type 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Port size Port size + + Without mounting option With bracket Nil B Note

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM131-01-35 (R, B, G, Y) A VM151-01-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

5 Port Solenoid Valve Series VQZ1000/2000/3000

AN120-M5 T0604 x 1m AS3001F-06 INA-25-46 T1075 x 1m AS4001F-10 AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage

KB

Different Diameter Module: KBR Component module T KBP2 KBV2-06 3 KBL2-R2S 1 KBP2 1 Model Body size VMG KBR2-1 KBR3-2 KBR4-3 KBV2-06 KBL2-R2S 4 Plug/Cap: KBP, KBC (P . 15-3-117) Component module KBV2-06 3 KBE2-06 1 KBP2 1 KBP2 KB P 1 KBE2-06 Body size KBE2-06 KBV2-06 Model Plug: KBP Cap: KBC Component module KBV2-06 2 KBE2-06 2 KBN2 1 Model Model Bracket mounting thread M6 x 1 x

ZP3

G Dimensions Per Vacuum Inlet: One-touch Fitting Width across flats F Model E F G Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Modular Type Regulators Series AR

for a to g.

4/5 Port Solenoid Valve

Note) Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 27 Series SYJ5000 2 Position Single [ ]: AC G H Grommet (G), (H): SYJ5120-M5 With bracket SYJ5120-M5-F G H 37 30 3.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 2-3.5 (For mounting) 63.1 [65.3] 41 19.5 18 25 + 19.7 11 B A 5 35.1 [42.1] M5 x 0.8 (A, B port) 2-2.6 (

VM

T.T. 60 Push button (Mushroom) VM220-02-30R/B/G/Y VM230-02-30R/B/G/Y JIS Symbol 2 port Panel mounting hole 3 port EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T. 5-6-23 Series VM200 Series VM200 Push button (Extended) VM220-02-32R/B/G/Y VM230-02-32R/B/G/Y JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5 MPa