Modular Type Air Filters Series AF

Example) AF30-03B-2R-X430 X430 X440 Low temperature High temperature Symbol 30 40 50 60 20 Body size Description 30 40 50 60 Body size Description Symbol Nil N Note 1) Rc NPT G F Note 2) Thread type Nil N Note 1) Rc NPT G + F Note 2) Thread type 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Port size Port size + + Without mounting option With bracket Nil B Note

VQZ1000/2000/3000

cable O.D. 3.5 to 7 55 <60> Indicator light < >: AC 86 78.5 M plug connector (M): VQZ3150 1(R)-M-02 03 60.5 Cover diameter 1.5 Cross section 0.23 mm2 (Lead wire length) 300 62 <67> 102.5 66 Indicator light 77 114 < >: AC 2-7-45 Base Mounted 46 46 Series VQZ1000/2000/3000 Dimensions: VQZ3000 2 position double Grommet (G): VQZ3250 1(R)-G-02 03 300 116.5 (Lead wire length) 58 28 24.5 mounting

Valve Single Unit

, (H): SX7140(R)G H 02 03 Polarity indication Manual override (Press and turn for the locking type.)

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

760.5 773 785.5 798 810.5 823 835.5 L dimension 130.1 132.4 134.6 136.9 139.1 141.4 143.6 145.9 148.1 Weight (g) 150.4 60 61 62 63 64 65 66 67 68 69 No. 848 860.5 873 885.5 898 910.5 923 935.5 948 960.5 L dimension 152.6 154.9 157.1 159.4 161.6 163.9 166.1 168.4 170.6 Weight (g) 172.9 70 71 No. 973 985.5 L dimension 175.1 177.4 Weight (g) 10-SV3000/4000 DIN rail dimensions and weights VZ1000

Standard Combinations

Replacement Parts Description Material Y200P-060S Y300 Y300P-060S Y400 HNBR Y200 Seal Y400P-060S Spacer with Bracket (Z) G Center of F.R.L. body C E BB (Y200T only) 1 EE (Y100T, Y200T only) X-X RELEASE X B 2 E X G Seal Y200T Y400T F J A H K Spacer width D Model Y200T Y300T Y400T B 82 96 BB 67 C 29 41 48 D 53 68 81.5 E 24 35 40 EE 33 F 12 14 18 G 5.5 7 9 G 5.5 7 9 H 19 21 26 J 3.2 4 4

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

30

(mm) Connection thread Rc T (M) Width across flat M Weight (g) Mounting hole L1 L2 Model H1 H2 KQB2E23-02 KQB2E04-01 KQB2E04-02 KQB2E06-01 KQB2E06-02 KQB2E06-03 KQB2E08-01 KQB2E08-02 KQB2E08-03 KQB2E10-02 KQB2E10-03 KQB2E12-03 KQB2E12-04 KQB2E16-03 KQB2E16-04 3.2 3.4 1/4 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 12 31 25.8 30.9 24.2 31.6 33 26.3 32.4 34 31.6 33.6

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

13

17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2

VS 8-2/VS 8-4

9 D-Side End Plate Assembly @0 U-Side End Plate Assembly MES80 D 03 2 MES80 U 03 2 Size 2 4 Size 18 mm Size 26 mm Option Size 2 4 Size 18 mm Size 26 mm Option Nil Nil None External pilot Built-in silencer External pilot + Built-in silencer -S None Built-in silencer -R -S Thread type -RS Nil Rc G NPTF F T Thread type Nil Rc G NPTF F T Port size Symbol 03 04 Port size 3/8" 1/2" Size 18 mm

SV

Interface Regulator Caution Specifications SV100-SV1000 SV2000-SV2000 SV3000-SV3000 SV4000-SV4000 P, A, B 0.1 to 0.7 MPa 0.7 MPa Air Maximum at 50C 38.4 g (43.4 g) 32 g (37 g) 86.5 g 80.3 g 103.8 g 97.6 g 178.2 g 171.8 g Interface regulator Applicable model Regulating port Set pressure range Maximum operating pressure Fluid Ambient and fluid temp.

Modular Type Regulators Series AR

for a to g.

Compact Cylinder

6 g 43 g 3 g 151 g 438 g Add each weight of auto switches when auto switches are mounted.

VQ5000

How to order single valves (example) T 5 04 VQ5100 Thread type (ports P, R and A, B ) Cylinder port size How to order valves (example) Nil N T F Rc NPT NPTF G VQ5100 R 5 04 External pilot specification How to order manifolds (example) VV5Q51 T 08 03 FU1 Thread type (ports P, R and A, B) Cylinder port size Nil N T F Rc NPT NPTF G External pilot port 2-Rc1/8 External pilot port Rc1/8

AW

Note 3) Drain guide is G 1/8 (applicable to the AW20(K)) and G 1/4 (applicable to the AW30(K) to AW60(K)). Note 4) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

Compact Hydraulic Cylinder

Width across flats G MM MM R (max.)

Table of Contents

76 g 81 g Weight Without lead wire with connector 40 g 38 g 43 g 16-2-5 6 Series ZSE30/ISE30 Setting Pressure setting Press the button.