ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM A10 02 10.8 2 1.4 KQ2H02-M5N 04 3 4 1.8 F ZP3 T 10 13 16 A12 02 10.8 2 1.4 KQ2H02-M5N 04 3 4 1.8 06 3.2 6 Dimensions Per Vacuum Inlet: Barb Fitting C2 Model A Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Speed Controller with One-touch Fitting

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 Gasket seal Note 3) AS121F-U10/32AS131F-U10/32 10-32UNF Note 3) AS221F-01 AS231F-01 1/8 Note 3) AS221F-02 AS231F-02 1/4 Note 3) Note 3) R NPT Note 1) Sealant AS321F-02 AS331F-02 1/4 AS321F-03 AS331F-03 3/8 AS421F-04 AS431F

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

82-3-05 12 VDC 12VN SY100-82-3-06 100 VAC 100VN SY100-82-3-01 200 VAC 200VN SY100-82-3-02 110 [115] VAC 110VN SY100-82-3-03 220 [230] VAC 220VN SY100-82-3-04 Rated voltage DC 5 24 VDC 6 12 VDC Light/surge voltage suppressor Nil Without light/surge voltage suppressor S Z With surge voltage suppressor With light/surge voltage suppressor 50 60 AC ( Hz) 1 100 VAC 2 200 VAC Caution "YOZ" is not

Table of Contents

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

Series KP/KPQ/KPG

threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8 15.3 22 26 15.8 23.2

Series KP/KPQ/KPG

threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8 15.3 22 26 15.8 23.2

KP/KPQ/KPG

threads R Note 1) Weight g M L2 D2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.

modular-press-e

Model name Model AMR3000 AMR4000 AMR5000 AMR6000 :E3-02 :E3-03 :E4-02 :E4-03 :E4-04 :E5-04 :E5-06 :E6-06 1:E6-10 1 4 3 8 1 4 3 8 1 2 3 4 3 4 Adapter assembly Note 7) 1 2 Float style auto drain (AMR100) Note 8) AD33-X203 AD33X202 AD33-X210 AD33-X201 AD33-X203 AD33-X202 IS1000-01 (0.4 MPa setting) AD33-X210 AD33-X201 Compact pressure switch Elbow (R x Rc) Note 9) 135510 135613 135510 135613

Modular F.R.L. Pressure Control Equipment

Model name Model AMR3000 AMR4000 AMR5000 AMR6000 :E3-02 :E3-03 :E4-02 :E4-03 :E4-04 :E5-04 :E5-06 :E6-06 1:E6-10 1 4 3 8 1 4 3 8 1 2 3 4 3 4 Adapter assembly Note 7) 1 2 Float style auto drain (AMR100) Note 8) AD33-X203 AD33X202 AD33-X210 AD33-X201 AD33-X203 AD33-X202 IS1000-01 (0.4 MPa setting) AD33-X210 AD33-X201 Compact pressure switch Elbow (R x Rc) Note 9) 135510 135613 135510 135613

ASR

6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Valve Single Unit

ground Type 3 ground Type 3 ground Type 3 ground b) 3-wire type Wiring with signal ground line (SG) Master unit Slave unit 01 Slave unit 03 Slave unit 75 Type 3 ground Type 3 ground Type 3 ground Type 3 ground Twisted pair with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground 1-6-113 Type SF1 NKE Corporation Uni-wire System Type SJ1, SJ2 SUNX Corporation S-LINK System Type SG

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Stainless Steel One-touch Fittings Series KG

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

Modular F.R.L. Units

Y500T-A Y200-A Y200T-A AKM2000-01-A (02)-A IS10M-20-A Y210-01-A (02)-A Check valve Note 2) Note 3) Pressure switch Note 3) IS10M-50-A Y510-(02)-A 03-A T-shaped spacer Note 2) Note 3) VHS20-01A 02A VHS30-02A 03A 3-port valve for residual pressure release Note 3) VHS40-06A 01-A E200-02-A 03-A 02 E300-03-A 04 E500-06-A Piping adapter Note 3) 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Pressure

5 Port Solenoid Valve

One-touch fitting (Metric) 1 2 3 4 5 A B C 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center 4-position dual 3-port valve (N.C./N.C.) 4-position dual 3-port valve (N.O./N.O.) 4-position dual 3-port valve (N.C.

Modular/F.R.L. Units Series AC

A 10 B 14 D 14 Port size M5 x 0.8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 Model Note 1) E100-M5 E200-01 E200-02 E200-03 E300-02 E300-03 E300-04 E400-02 E400-03 E400-04 E400-06 30 23.5 28 B Center of F.R.L. body D A 32 30 30 32 36 36 E500-06 3/4 32 40 44 Piping adapter AC50, AC55, AC60, AC50A AC60A, AC50B, AC55B AC60B, AF50, AF60, AR50 AR60, AL50, AL60, AW60 E600-06 3/4 48 53 35 E600-10 1

Flow Control Equipment

Controller / 1 4 / 3 8 / 1 2 With One-touch Fittings/Universal / 1 8 20 to 32 20 to 40 40 to 63 63 to 100 AS23l 1FE-01 AS23l 1FE-02 AS33l 1FE-03 AS43l 1FE-04 / 1 4 / 3 8 / 1 2 Port size on piping side Standard/In-line (Metal Body) M3 M5 / 1 8 / 3 4 1 2 1 1 / 1 4 / 1 4 / 1 2 / 3 8 / 1 2 AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 20 to 32 20 to 40 32 to 63

Clean Gas Filter

Model A TSJ 1/4 TSJ 3/8 AMF SFC102-02 SFC102-03 ZFC SF SF SFC105-02: URJ 1/4 (Union Ring Joint) SFC105-03: URJ 3/8 (Union Ring Joint) SFD 2 x A LLB AD IN 76 B GD C Width across flats 127 Model A URJ 1/4 URJ 3/8 B 22 26.5 C 19 22 SFC105-02 SFC105-03 311 SF Series Made to Order Please contact SMC for detailed dimensions, specifications and lead times.