VQZ1000/2000/3000

3/8) (For Rc 3/8) 33 3 4 5 3 4 5 L plug connector (L): VQZ3 50 1(R)-L-02 03 DIN terminal (Y): VQZ3 50 1(R)-Y-02 03 Indicator light 300 157 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 300 62 <67> 55 <60> 163.5 MAX.10 75 Applicable cable O.D. 3.5 to 7 Indicator light < >: AC 86 78.5 3 4 5 M plug connector (M): VQZ3 50 1(R)-M-02 03 60.5 (Lead wire length) Cover diameter

SX

port) 3 4 5 02 03 3 4 5 L plug connector (L): SX7 40(R)-LM plug connector (M): SX7 40(R)-M02 03 Manual override (Press and turn for the locking type.)

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Orifice symbol (diameter) Solenoid valve model (Port size) VXE21 0 1 2 3 VX021N-12A 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) Model VXE21 VXE22 VXE23 VXE22 0 2 3 4 VXE23 0 2 3 4 01 (1/8) 02 (1/4) 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) VX022N-12A Port symbol (Port size) VXE22 0 5 6 VXE23 0 5 6 VX023N-12A-L Table (3) Rated Voltage Electrical Option Rated voltage Voltage L (With light) Voltage symbol

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area Flow direction symbols on body Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Models Symbol JIS symbol Metric sizes 3.2, 4, 6 3.2, 4 6 6 8 10 12 6, 8, 10 8, 10 4 10, 12 Tubing O.D. 1/8 5/32 3/16, 1/4 5/16 1/4, 5/16 3/8 1/8, 5/32 3/16, 1/4 Inch sizes 5/32 3/16 5/16 3/8 1/2 3/8 1/4 Flow rate l/min (

VZS

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

/N.C. 4 position dual 3 port valve: N.C./N.C. 4(A) 2(B) 4(A) 2(B) A 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.O./N.O. 4 position dual 3 port valve: N.O./N.O. 2(B) 4(A) 2(B) 4(A) B 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.C./N.O. 4 position dual 3 port valve: N.C.

5 Port Solenoid Valve Series VQZ1000/2000/3000

0 1 VQZ3 2 (R)-G1-02 3 4 5 3 48 2 x 3.4 (For mounting) 1/4 [4(A), 2(B) port] 30 1/8 [5(R1), 3(R2) port] 18 3 P 18 5 1 38.5 1.8 (PE port) 3 3 (Reverse-mountingprevention hole) (CE-compliant models only) 2 x 3 die-cast hole (For manifold gasket positioning) 1/4 [1(P) port] L-type plug connector (L): VQZ3 2 (R)-L1-C6, C8, C10 0 1 3 4 5 DIN terminal (Y): VQZ3 2 (R)-Y1-C6, C8, C10 0 1 3 4 5 150.3

KG

(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14

SV

(Note that double, 3 and 4 position valves cannot be used where single solenoid wiring has been specified.) DIN rail length specified Note Symbol 02 Stations Standard length Nil 3 2 stations (1) For 3 stations (Specify a longer rail than the standard length.)

smcmaintenancepartslist

GB2-10AS GB2-3AS AD27 Y200 Y200T AKM2000-01 , (02) VHS20-01, 02 GB3-10AS GB3-3AS AD37 AD38 Y300 Y300T AKM3000-(01), 02 VHS30-02, 03 GB4-10AS GB4-3AS AD47 AD48 Y400 Y400T AKM4000-(02), 03 VHS40-02, 03, 04 Float type auto drain Note 2) Attachments Options Options Options Options Spacer Spacer with bracket Check valve Note 3, 4) Residual pressure relief 3 port valve Note 4) Note 1) Contact

KP/KPQ/KPG

KPH06-01 KPH06-02 KPH08-01 KPH08-02 KPH10-02 KPH10-03 KPH12-03 KPH12-04 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33 34 34.5 3 4 4 5 6 7 10 11 12 13 21.5 19.5 22 20.5 28.5 24.5 32 27 28 27 4 4 4 18 14 6 10 10 19.5 L A M H 17 8 18 26 21.5 Connection threads 19 10 29 41 24 22 12 46 58 25 Reference dimension for R threads after installation Male Elbow: KPL

Direct Operated

Passage symbol (example) Passage symbol (example) 1 2 2 1 3 3 Operating pressure (MPa) Flow characteristics Max. system pressure (MPa) Orifice diameter (mm) Note) Passage: 1 2 Passage: 2 3 Weight (g) Port size Model C[dm3/ (sbar)] Port 3 side Port 1 side Port 1 side C[dm3/ (sbar)] 0.08 0.20 0.08 0.20 b Cv Port 3 side Cv b VXV3130-01 VXV3132-01 VXV3130-02 VXV3132-02 VXV3240-02 VXV3340-02 VXV3242

KR

(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM A10 02 10.8 2 1.4 KQ2H02-M5N 04 3 4 1.8 F ZP3 T 10 13 16 A12 02 10.8 2 1.4 KQ2H02-M5N 04 3 4 1.8 06 3.2 6 Dimensions Per Vacuum Inlet: Barb Fitting C2 Model A Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Speed Controller with One-touch Fitting

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 Gasket seal Note 3) AS121F-U10/32AS131F-U10/32 10-32UNF Note 3) AS221F-01 AS231F-01 1/8 Note 3) AS221F-02 AS231F-02 1/4 Note 3) Note 3) R NPT Note 1) Sealant AS321F-02 AS331F-02 1/4 AS321F-03 AS331F-03 3/8 AS421F-04 AS431F

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

82-3-05 12 VDC 12VN SY100-82-3-06 100 VAC 100VN SY100-82-3-01 200 VAC 200VN SY100-82-3-02 110 [115] VAC 110VN SY100-82-3-03 220 [230] VAC 220VN SY100-82-3-04 Rated voltage DC 5 24 VDC 6 12 VDC Light/surge voltage suppressor Nil Without light/surge voltage suppressor S Z With surge voltage suppressor With light/surge voltage suppressor 50 60 AC ( Hz) 1 100 VAC 2 200 VAC Caution "YOZ" is not

Table of Contents

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

Series KP/KPQ/KPG

threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8 15.3 22 26 15.8 23.2

Series KP/KPQ/KPG

threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8 15.3 22 26 15.8 23.2

KP/KPQ/KPG

threads R Note 1) Weight g M L2 D2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2