A

4, 6 S Y M B O L S Primary pressure Bar Flow ln/min H O W T O O R D E R M I N I AT U R E R E G U L AT O R (N)ARJ1020F (N)ARJ1020F M5 D I M E N S I O N S S E R I E S NARJ 04 4mm 06 6mm Japanese N North American M5 M5X0.8 Panel Mount Dimension Model A B C D E F G H J NARJ1020F-M5-04 21 10.4 4 M5X0.8 6 10.6 3.5 15.5 50 NARJ1020F-M5-06 22 12.8 6 Courtesy of Steven Engineering, Inc. !

G15/G27

GA33--01 How to Order G 33 01 10 Option Connection thread Symbol Specifications Size Pressure gauge 01 R 1 8 Symbol Nil X2 Stud parts electroless nickel plated Model Frame type Max. display pressure Oil-free Wetted parts degrease washing X4 Outside diameter Symbol Type Symbol Symbol Unit Back side thread X30 Both MPa and psi 0.2 MPa 0.3 MPa 0.4 MPa 0.6 MPa 0.7 MPa 1.0 MPa 2 3 4 6 7 10 P10

AC Servo Motor Driver (SSCNET Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

Rotary Cylinder Series MRQ

6 !7 !8 !

PFxx-OMS0001CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

PSxx-OMM0006CN

/4 n_1=B+(A-B)/4 A= H_1= (A-B)/2 H_1= (A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 ( 1) -35No.PS-OMM0006CN-E [F 5] / / 0 <> [F 5] -36No.PS-OMM0006CN-E [F 5] / 5 ms ooo1 C_5 10 ms o.r1 () () ( ) OUT2 C_5C_5 C_5() EEPROM -105.0105.0 kPa -210210 kPa -0.1051.050 MPa -1.1551.155 MPa 10.0-105.0 kPa -115.0115.0 kPa -37No.PS-OMM0006CN-E [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -38No.PS-OMM0006CN-E

Miniature Regulator Series ARJ210

M5 x 0.8 6 3.5 15.5 50 17.2 ARJ1020F-M5-06 22 12.8 6 VY1 Manifold Base (Option)/Dimensions G PPA 2-3.5 (Mounting hole) 31 (ARJ1020F-M5-04) 32 (ARJ1020F-M5-06) AL Applicable tubing O.D. 4, 6 (Mounting hole) IN (Common) Stations Manifold base part no. 4 6 10 B dimension A dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 14-4-5 Miniature Regulator Series ARJ310 F.R.L.

XLA Series

Step 6 3 Bolt b Tightening torque of bolt a Nm Tightening torque of bolt b Nm 1 2 Valve size Tightening torque Valve Tightening All sizes 0.3 size torque 4 XLA-16 0.7 -25 1.5 -40 2.5 -50 6 Bonnet assembly -63 6 -80 15 -100 20 Heater -160 102 Pilot port Bolt a Cover Body Apply 0.4MPa of air pressure to the pilot port.

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

High Vacuum L Type Valve

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20

ZB-OM00301

() () () () () () () Q1 N.C. () () () () () () 5 DC24V Q2 () () 6 DC12V Assy 1) Ass'y 2 L L AXT661 LO L M L2) (mm) 300 MO L2) 14A ()()() 6 600 (NC) 1) 10 1000 13A () () 20 2000 300mm 30 3000 3 Ass'y ZB1-VQ110U(M1.7X15)2 2)M ZB1-VQ110U-B (M1.7X22)2 3) ZB1-VQ110L(M1.7X22)2 ZB1-VQ120U(M1.7X15)2 B () ZB1-VQ120U-B (M1.7X22)2 3) ZB1-VQ110(M1.7X15)2 4) 3 ZB1-VQ110-B (M1.7X22)2 V Assy

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

(A,C) Note.5) VXF-26AA VXF-26AC 24.529.5 29.434.3 VXF(A)26A(B,D) Note.5) VXF-26AB VXF-26AD VXF(A)25B(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26B(A,C) Note.5) VXF-26BA VXF-26BC VXF(A)26B(B,D) Note.5) VXF-26BB VXF-26BD VXF(A)26C(A,C) Note.5) VXF-26CA VXF-26CC VXF(A)26C(B,D) Note.5) VXF-26CB VXF-26CD 24.529.5 29.434.3 VXF(A)26D(A,C) Note.5,6) VXF-26CA VXF-26CC VXF(A)26D(B,D) Note.5,6)

Precision Regulator

If this occurs, stabilize the ambient temperature and fluid temperature properly. -11- 6.

Precision Regulator

M Pa MPa MPa (A) m/N (B) m/N Force N Diaph.(C) m2 Daiph.(A) m2 Block diagram Force N -6- 3. How to order (Note 1) In the standard mounting position, the product name plate is attached to the front and the bracket is mounted to the back when viewed with the SUP side on the left and OUT side on the right. (Note 2) Accuracy: 3%F.S.

CG1-OM0227

P1357 D-H7BA,G5BA BBA3,BBA4 5 (30%) 13 14 () (mm) 1) () 2) 6. 15 7 Best Pneumatics No. P.12631371 Best Pneumatics No. P.13281329 (NC=b )(D-F9G,F9H )Best Pneumatics No. P.1290 (D-G5NB )Best Pneumatics No. P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

PFxx-OMO0004CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Model Max. 100 B PFMB7201 PFMB7501 PFMB7102 200 2 100 kPa A 500 5 50 1000 10 0 Min.