3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

154 164 187.5 198 42 52 75 85.5 L1 L2 L3 L4 4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet (G) (35) (5.5) 2-4.5 mounting hole 43.5 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 34 (7.5) (3) DIN rail clamp screw 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 02: Rc1/4 U side n A 2 A 2 5 Manual override 4 (L4) 3 (L3

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

173 3 58 68 87.5 98 4 74 84 112.5 123 L1 L2 L3 L4 2.10-35 VQZ100/200/300 Base Mounted VQZ300 VV3QZ35C Station Port size (35) (5.5) 2-4.5 Mounting holes DIN rail clamp screw 42 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 Grommet (G) 34 (7.5) (3) 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 U side 02: Rc(PT)1/4 n A 2 A 2 Manual override 5 4 (L4) 3 (L3) L2 L1 2 P=20

5

85 2 (Same surface) n (Different surfaces) 70 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) D-A44 n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 75 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 1 70

MB

+ 30 (n2) n = 2, 4, 6, 8 70 + 50 (n2) n = 2, 4, 6, 8 75 + 30 (n2) n = 2, 4, 6, 8 80 + 30 (n2) n = 2, 4, 6, 8 85 + 30 (n2) n = 2, 4, 6, 8 75 + 50 (n2) n = 2, 4, 6, 8 80 + 50 (n2) n = 2, 4, 6, 8 85 + 50 (n2) n = 2, 4, 6, 8 90 + 30 (n2) n = 2, 4, 6, 8 90 + 50 (n2) n = 2, 4, 6, 8 90 n (Different sides) D-A44 n (Same side) 1 2 (Different sides or Same side) 1 70 75 80 85 105 80 110 115 115 60

VQ7-6/7-8

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA A B

5 Port Air Operated Valve Series SYA3000/5000/7000 1

hole) 2 1.5 die-cast hole (For manifold gasket positioning) 1/8 (P , EA, EB port) SYA5120-01 1/8 (A, B port) 5-2-11 10 Series SYA3000/5000/7000 Series SYA5000: Body Ported SYA5220-01 2 position double SYA5220(-F2) C4, N3 C6, N7 C8, N9 1/8 (A, B port) M5 x 8 (Pilot port) 2 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" Courtesy

SYA3000/5000/7000

/ pressure center SYA7 20-F2) C8, N9 C10, N11 3 4 5 SYA 109.7 48.1 SYJA 51.6 38.1 2 x M5 x 0.8 (Pilot port) VZA 13.6 B VFA A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 2 x 4.2 (For manifold mounting) VFRA 42 VA (66) 2 x 4.2 (For mounting) (52) (5.5) 47.6 SYA7 20-02-F2) 3 4 5 (49.5) (42.5) 30 24.5 1/4 (A, B port) 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing

Serial Transmission System Series EX250 Series EX500

Stations N R S 01 1 station Note 5) Note 6) The maximum number of stations differs depending on the electrical entry.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.

10

1) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 125

Air Cylinder

D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size: 30 Size: 50 to 100 Key Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Direction indicating label Key CRB2 Direction indicating label CRBU2 +4 0 +4 0 CRB1 90 0 0 ve 1 90 o ve A port B port o gr oo ve 0 MSU y e gr oo k 18 of y B port A port gr ke e g ve n ra of y n io e at e oo ot R g k CRJ Stopper screw B +4 0 n ra of gr 0 n io at 8 ot e R R 1 y g ot e

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Side 1/4 1/4 1,3,5 (P,EA,EB) Port 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 Port size 1/4 C6 (One-touch fitting for 6) 4,2 (A,B) Port C10 (One-touch fitting for 10) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Station W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520

5 Port Air Operated Valve SYA3000/5000/7000 Series

(EA, EB port) 36 3 position closed center / exhaust center / pressure center SYA7 20-(F2) C8, N9 C10, N11 3 4 5 109.7 48.1 51.6 38.1 2 x M5 x 0.8 (Pilot port) 13.6 B A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 2 x 4.2 (For manifold mounting) 19 42 (66) (52) 2 x 4.2 (For mounting) (5.5) 47.6 SYA7 20-02-(F2) 3 4 5 (49.5) (42.5) 30 1/4 (A, B port) 24.5 15 20 Manual

A

-10~20 ANB1-06~14 ANA1-01~06 ANB1-01~04 D I M E N S I O N S MODEL (ONE TOUCH FITTINGS CONNECTION) D I M E N S I O N S Model Applicable One Touch Effective Weight Dimensions (mm) Fittings Size Orifice (mm 2) (g) A B ANA1-C08~C12 ANB1-C06~C10 ANA1-C08 8 11 5 58 16 ANA1-C10 10 15 13 76 22 ANA1-C12 12 33 19 95 25 ANB1-C06 6 8 5 52 16 ANB1-C08 8 13 12 73 22 Notes: To install threaded versions

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

7 8 n 2-C10 R(EXH) port DIN rail clamping screw EXH EXH SMC SMC SMC SMC SMC SMC SMC 2-C10 P(SUP) port R R X B B B B B B B B X P 49 P 31.6 9.5 24.5 16 A A A A A A A A (12) (7.5) 23 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P = 16 Broken lines and dimensions inside ( ) indicate type [-D] (with DIN rail mounting