Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Made to Order (Refer to page 728 for details.) 727 ASD-FM Series How to Order ASD 3 3 0 F M 01 06 S Lock nut option Nil J Hexagon lock nut Round lock nut Body size Made to Order Refer to the below for details. 2 3 4 M5 standard 1/8 standard 1/4 standard With seal M5 and U10/32 are not available with seal. Universal Applicable tubing O.D.

Regulator

-10-01-L NPT G36-10-N01-L G46-10-N01-L (Round type, with color zone) G G36-10-01-L G46-10-01-L Square embedded type pressure gauge Note 3) (Including part (5)) GC3-10AS-D NPT Z : Both in MPa and psi (5) Pressure gauge cover assembly (4) GC3-P10AS-D-X30 136150A Right angle square type pressure gauge Note 3) GC3-10AS-J-D (6) GC3-P10AS-J-D-X30 NPT Z : Both in MPa and psi (7) GC3-10AS-JA-D

AC Servo Motor Driver (Pulse input type/Positioning type ）

OPTIONS AND PERIPHERAL EQUIPMENT (3) Dimensions (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN/HF-3040A-UN [Unit: mm] 6-K 3-L 3-L G 1 E 1 D 2 F 2 M J 2 C 1 C 1 B 2 H 2 A 5 Model Dimensions [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 length: 8 M5 M4 HF3040A-UN

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

0.4

R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2)

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

Standard Combinations

30 24 5.5 3.2 1/4, 3/8 167 115 41 80 2.5 30 55 57 41 35 35 14 7 7 4 1/4, 3/8, 1/2 220 147 48 110 0 38 72.5 75 50 40 40 18 9 9 4 Accessory/Optional specifications Upward facing handle (2) With auto-drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge (3) (3) (3) (3) (3) Model C H2 J K L B B B B B ACG20C ACG30C ACG40C 87 24 33 12 5.5 105 91 87 108.5 35 14 7 156

NCG/CG1

10 17.5 17.5 20 20 15 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53 63.5 75.5 75.5 95 95 118 123.5 125.5 144 169.5 169.5 202.5 206 22 7 38.5 3.5 15 36 49 25 8 45 3.5 16 44 58 2-TD8 (Pin O.D.)

LEC-OM02704CN

1][2]) [1][2] [0][0] 8 [0][1] [4][0] [6][0] [6][1] [8][0] [8][1] [C][O] 14 11 14 (4) ([3][3]) [3][3] [1][0] 4 [1][1] 1 [1][2] 2 [1][3] 3 [1][4] 4 [1][5] 5 [2][0] 8 [2][1] 1 [2][2] 2 [2][3] 3 [2][4] 4 [2][5] 5 (5) ([0][2][3][5]) [0][2] [0][0] 4 14 12 14 [3][5] 00 16 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 1 0F ABS 10 11 80 12 81 82 83 84 85 86 87 88 89 8A 8B

Vacuum Pad: Ball Joint Type

width across flats 3 ZP3E 3 ZP2 ZP2V 2 A B ZP Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR XT661 Dimensions: 10 mm Stroke (mm) A B C D F H I J Model ZPT20F10-01-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F

VEX1

Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 1(P) 2(A) 3(R) 02 02 01 02 03 04 04 06 10 10 12 14 20 Port size 11 2 1 11 4 11 4 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 2 Air operated Solenoid 0.1 0.2 0.2 0.3 0.4 0.5 1.3 1.4 1.9 2.0 3.9 4.0 Mass (kg) Note) Non-lubricated specifications are not available for this product.

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

CNG

M8 x 1.25 24 1/8 21.5 2 65 141 (149) 4 6 25 117 (125) 3 50 62 15 7 10 3 12 5.5 8 3.5 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 4 6 28 127 (135) 3 57 70 15 7 10 3 12 5.5 10 3.5 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 (162) 4 6.6 28 128 (136) 3 60 74 16 8 10 3 12 6 14 4 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 4 6.6 33 142 (151) 3 68 84 16.5 8.5 10 4 12 Without rod boot With rod boot Bore size (mm) 20

HRX-OM-W038

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 3.4 Piping . 3-17 HRS Series HRX-OM-W038 Contents 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

HRX-OM-R005

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 HRS Series HRX-OM-R005 Contents 3.4 Piping . 3-17 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

HRX-OM-O021

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 HRS Series HRX-OM-O021 Contents 3.4 Piping . 3-17 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

HRX-OM-X027

signal input . 3-14 3.3.5 Wiring of operation signal output and alarm signal output . 3-17 3.3.6 RS-485 Communication wiring . 3-18 3.3.7 RS-232C Communication wiring . 3-19 3.4 Piping . 3-20 3.5 Fill of circulating fluid . 3-22 3.6 Option J Piping ofAutomatic fluid filling. 3-23 HRS-R Series HRX-OM-X027 Contents 3.7 Wiring of external switch . 3-24 3.7.1 Reading of the External switch .

HRX-OM-M090

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 3.4 Piping . 3-17 HRS Series HRX-OM-M090 Contents 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

Digital Flow Switch (Integrated display type)

-J Dimensions PFM7-(N)01/(N)02/F01 -59No.PF-OMJ0006-J PFM7-(N)01L/(N)02L/F01L -60No.PF-OMJ0006-J PFM7S-(N)01/(N)02/F01 -61No.PF-OMJ0006-J PFM7S-(N)01L/(N)02L/F01L -62No.PF-OMJ0006-J PFM7-F02 -63No.PF-OMJ0006-J PFM7-F02L -64No.PF-OMJ0006-J PFM7S-F02 -65No.PF-OMJ0006-J PFM7S-F02L -66No.PF-OMJ0006-J PFM7-C4/C6/C8/N7 -67No.PF-OMJ0006-J PFM7-C4L/C6L/C8L/N7L -68No.PF-OMJ0006-J PFM7S-C4/C6/C8/N7