VM

port Bottom ported 3 port 2 port Side ported 3 port 2 port One way roller lever Bottom ported 3 port 2 port Toggle lever Side ported 3 port 2 port Bottom ported 3 port 2 port Side ported 3 port 2 port Bottom ported 3 port 2 port Green Green Green Green Black Black Black Black Red Red Red Red Bottom ported 3 port 2 port Push button Side ported 3 port 2 port Bottom ported 3 port 2 port Side

Compact Vacuum Unit

Table 3 Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. !3 Pressure sensor assembly Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs.

Compact Vacuum Unit Ejector/ Vacuum Pump System

. (3) Common supply pressure (PV) connecting port size (4) Common vacuum burst pressure (PD) port Note 2) 01 Rc1/8 01N NPT1/8 01F G1/8 M5 M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

3 Port Solenoid Valve Series VQ100 1

Blanking plate with 2 screws and gasket L 12.5 (Pitch) 5.25 7.5 25 35 5.5 1.25 VVQ100-10A-2 L Dimension L = 12.5n + 10.5 Plug lead unit (VV3Q12) for manifold 10 135.5 9 123 8 110.5 7 98 6 85.5 5 73 4 60.5 3 48 2 35.5 1 23 No.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

20

1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 Type Symbol Nozzle part no.

20

1.5 2 Type Symbol Nozzle part no.

VFR4000-OMH0003

P 1= 0.7 MPa/P 2=0.5MPa PB 31 31 24 Although A, B+ and B marks are indicated on the terminal 55 Effective area at exhaust side(mm 2) AEA block, VFR4000 can be used as either +COM or COM. 45 S at P 2 = 0.5 MPa BEB solenoid valve.

VFR3000 Series

Connect no.1 and no.2 terminals with corresponding power side. Caution Ground (2) (1) Ground Terminal No. Internal w iring 1 Sol. A side 2 Sol.

VFR5000 Series

Note 2) It is used as +COM and -COM. Note 3) Station numbers are started from D side although connector is mounted on D or U Side. Note 1) Maximum number is 8 stations. Note 2) It is used as +COM and -COM.

VFR2000 Series

Lead wire connection 01F Type D-sub Connector Wire connection specification Lead wire at both of solenoid A and B sides in manifold is connected to connector terminal as COM specification. Note 1) Maximum number is 8 stations. Note 2) It is used as +COM and -COM.

VFR3000-OMJ0001

0.10.83MPa 2 -560 () 3) Rc 1/8 (kg) 0.46 mm2) A 21 18.5 11 P1=0.7MPa,P2=0.5MPaS PB 18.5 22 12 mm2) AEA 40 P2=0.5MPaS BEB 36 10 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 4 4 4 4 01F D 01C COM A B 1)8 2) +COM -COM 3) D U D 1 COM A B 1)8 2) +COM -COM 3)D U D 1 11 VFR3000-OMJ0001-A () X () [3(EB) 4(EA)] ( (PE) 12 VFR3000-OMJ0001-A No. 1(ISO VG 32

VFR5000-OMN0001

P A B 10 VFR5000-OMN0001 VFR5000 Series/ 01F D COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax:

VFR2000-OMM0001

B VFR2 1.25-31.25-3S1.25Y-3N1.25Y-3S VFR2000 A-B+B+COM -COM 1)8 2)+COM -COM 3)D U D 1 -12No.VFR2000-OMM0001 01F D COM A B 1)8 2)+COM -COM 3)D U D 1 -13No.VFR2000-OMM0001 () X () (R) () (PE) -14No.VFR2000-OMM0001 NO 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7

type (with D sub-connector): ⑦ Type 01F with D sub-connector
Note) For the electrical connection of the DIN terminal type, refer to ①, ②, and ③.

type (with D sub-connector) ④ Type 01F with D sub-connector
Note) For the electrical connection of the DIN terminal type, refer to ①.

Electro-Pneumatic Proportional Valve

PVQ13-L PVQ33 PVQ31 27 30 35 22 27 12 10 20.5 =60.6 5 49 24.7 12 2-1/8" 25 * Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.