Basic type / Direct mount type Series CY3B/CY3R

B Counter bore depth C Thread depth M T 4 x LD PA K 4 x MM F XLm XLmQ QW XMm XYm PB D-m N XVD A E depth EK XGT G Q + Stroke Z + Stroke Stroke adjustment screw (inner cover) CYV LW A A HP H HL HA HA HI TA TA R 4 x J 2 x P 2 x Counterbore dia.

Mechanically Jointed Rodless Cylinder Series MY1

MY2H G D Za MY3A MY3B 4 x MM E1 E1 MY3M E4 E4 E3 E3 C E2 E2 F B G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2 x LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) B C D F G 90 H A Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 110 110 55 70 126 37 J C2 C 131 130 65 80 149 100 37 K L P Q E3 E4

Modular Type Air Filters Series AF

AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

MXS Series Air Slide Table

0 HA GA 5H9 4 deep +0.030 0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40

Air Cylinder

2) (n = 4, 6)4 MB D-A9V 5 10 10 + 15 (n 2) (n = 4, 6)4 MB1 D-M9 D-A9 10 (5)5 10 15 + 15 (n 2) (n = 4, 6)4 CA2 D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6)4 D-M9W 15 (10)5 15 20 + 15 (n 2) (n = 4, 6)4 CS1 D-M9A 15 (10)5 20 (15)5 20 + 15 (n 2) (n = 4, 6)4 CS2 D-F7 D-J79 5 5 15 + 15 (n 2) (n = 4, 6)4 Rail mounting D-F7V D-J79C 5 5 10 + 10 (n 2) (n = 4, 6)4 D-F7W/J79W D-F7BA

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

smcmaintenancepartslist

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Electric Slide Tables

9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

+ l 2-RcP 4-FD R J MM FY BB D E e Air release K F MA l C Width across flats G f Air release 10 NB NA FT A SS B SS + Q + l + Stroke S + Stroke FX H M ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS e f Q 32 M10 x 1.25 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 52 21.5 15 25 to 1400 1/3.5

AW

AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

Modular/F.R.L. Units Series AC

AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Rotary Actuator

Size 40 L L 2 K G1 0 0.030 F D B 4 K N V1 Body (B) T V2 M S Body (A) h Key dimensions L1 b C G2 J F h (h9) L1 b (h9) Model L 2 x R A CRB2B;40 4 0 0.030 4 0 20 E 0.030 CRB2B=10-=S CRB2B==-=SE/DE A port B port N W 2 x R 2 x M3 x 0.5 (Depth 4) Size 10 only (for mounting unit) Y X (mm) Q Model A B C D G1 G2 J K L M N P &Q1 E(g7) F(h9)

New

Cable 6 to 12 G1/2 Q F S D F Q 280 G1/2 D 45 (42) (44) 31.5 With full-wave rectifier R C E C R E J J OUT IN IN OUT 2 x M Depth 5 2 x M Depth 5 G A H A G H 2 x P Port size B1 B B B1 2 x P Port size Bracket mounting hole dimensions (mm) A B B1 C D E F G Port size P a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) H J M Model 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40 10.5 14 17 20 22 22 24.5

LVQ

LVQ20S-Zm-4 LVQ30S-Zm-4 LVQ40S-Zm-4 LVQ50S-Zm-4 LVQ60S-Zm-4 S 88.5 94 134.5 1/46 1/46 A B 144 559 Series LVQS-Z Dimensions Basic type N.O. valve 1/46 1/46 Q LQ3 integral fitting 1/8" (3, 4) Pilot port E R Rc 1/8 (NPT 1/8) Pilot port Rc 1/8 (NPT 1/8) Sensor (breathing) port Rc 1/8 (NPT 1/8) Breathing port Rc 1/8 (NPT 1/8) Breathing port (F) W K 1/46 1/46 1/46 1/46 A B A B J G L (H) N M C

Electric Grippers

4 q u w e r t !7 Component Parts No.

Vacuum Unit

4 !4 y !3 q t i u w !5 With Pressure Switch for Vacuum with Energy Saving Function !7 !1 e o !0 r !2 With Pressure Sensor With Pressure Switch for Vacuum !6 Component Parts No.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Combination Cylinder

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

0.4

VQ1000/2000 Series VQ1000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P