CM2x-OM0230Q

CM2-*Z 3-1. a) b GR-S-010(10g )GR-S-020(20g ) P18, 4. (XC85,X446)P19 c) 4. 17 - 3-2. 3-2-1. 1 2 3 3-2-2. 1 2 3 4 5 6 7) 8 1) 2) 33. 331. 4. 20 25 32 40 CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS 1 3-3-2. 1 2 3 4 18 - 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> <> 4-2. PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(

This is a legacy product, and replaced byVT307-BDO1-01F-Q, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .30864 lb

This is a legacy product, and replaced byVT307-5DO1-01F-Q, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .36076 lb

This is a legacy product, and replaced byVT307-5DZ1-01F-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.42793 lb

This is a legacy product, and replaced byVT307-5D1-01F-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.31691 lb

2

For model selection of an auto-drain, refer to the Selection Precautions on page 123. 5 10 20 Port size 3 Port size Symbol H Nil Nil Nil Nil H H H 01 02 03 1/8 1/4 3/8 Thread type Symbol Type Nil N F Rc NPT G Components 3 10 20 5 Components Nil H Nil H Nil H Nil H Mist separator Micro mist separator AFM30-A AFD30-A AFM20-A AFD20-A AWD30 AWD20 Micro mist separator regulator Replacement Parts

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Table of Contents

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

A

(E X C E S S I V E F O R C E I N T H E D I R E C T I O N O F R O TAT I O N A P P L I E D T O T H E P I S T O N R O D M AY D A M A G E T H E I N T E R N A L M E C H A N I S M.) R E F E R T O T H E F O L L O W I N G TA B L E F O R D I M E N S I O N S W I T H A R M 32/40/50/63S E R I E S MK2 T I G H T E N I N G T O R Q U E F O R M O U N T I N G.

ZP

M-5AU-6 H H F Model A B C D2 E F G H Vacuum inlet direction q Pad dia.

Table of Contents

Allowable driving force Fn (N) H H MTS 500 H H 300 10 L 200 MY 3.

Modular Design with Uniform Body Style

(with color zone) Model Standard specifications Round type pressure gauge P1 P2 A B*1 C D F J K H J H J H J AR20-D 1/8, 1/4 1/8 40 66.8 26.5 21 M28 x 1 21 2 37.5 57.5 37.5 58.5 37.5 58.5 AR30-D 1/4, 3/8 1/8 53 86.5 30.5 26.5 M38 x 1.5 26.5 3.5 37.5 63 37.5 64 37.5 64 AR40-D 1/4, 3/8, 1/2 1/8 70 91.5 35.5 35.5 M42 x 1.5 35.5 42.5 73 42.5 73 42.5 73 AR40-06-D 3/4 1/8 75 93 35.5 35.5 M42 x

Table of Contents

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

Table of Contents

3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Table of Contents

Unit Series AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (Option) F.R.L.

ZP

across flats 12 Hexagon width across flats 3 F E D C 3 2 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) C D F H J A B E I Model ZPR20F10-0-A14 20 22 12.5 15.5 29.3 58.5 46.5 50 126.5 ZPR25F10-0-A14 25 28 ZPR32F10-0-A14 13 16 29.8 59 47 127 32 35 Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Model R S R S J I H Stroke ZPR20F10-0-A14 20 3 +10 0 ZPR25F10-0-A14 30 +7 12.8 24.3 15.2