Table of Contents

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

ZP

2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Electric Actuators

Tapped holes l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXF M4 x 0.7 2.1 10 LXF M5 x 0.8 4.4 8 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body. Caution 2. Top mount type 2.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

" : 6, 1/4" (27) (35) (For mounting) 2 x 3.2 N7: 37.4 C6: 33.6 (3.2) (Light/surge voltage suppressor) 13.1 (35.5) (32) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors + 25 28.5 [35.5] 10 2 0.8 16.9 P EA (15) (P, EA, EB port) M5 x 0.8 (For manifold gasket positioning) 2 x 1.5 die-cast hole 19 L plug connector (L): 10-SY3 20-L(

Air Cylinder

x M5 x 0.8 Mounting nut Cover surface C D B 0 0.3 FY FB B 0 0.3 FZ FX 2 x FC Mounting hole Z + 2 x Stroke S + Stroke H + Stroke A F NA T F NB FT Stroke CJ2G 10 16 TZ MM NN GA Rod end nut Mounting nut Piping port M5 x 0.8 Cover surface C D B 0 0.3 FY FB 2 x FC Mounting hole B 0 0.3 A NA F F NB FT FZ FX Z + 2 x Stroke H + Stroke S + Stroke For details of the mounting nut, refer to page

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 R 44 53 62 76 95 NB TB 8 8 10 10 12 Q 11 12 14 17 20 O 4.5 4.5 5 5.5 6 SC 8 11 14.5 17 23 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M 2 2 2 3 4 NA 16 18 20 26 30 NC 10 10 12 14 16 SA 4.5 5.5 5.5 6.6 6.6 SB 8 9.5 9.5 11 11 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 UB 6 10 10 12 12 VA VB 3 4 4 5 6 L Model MHSL3-32D MHSL3-40D MHSL3-50D MHSL3-63D MHSL3-

0.4

Kit type Thread type Note) VQC 4000 thread port only Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Port size Port size VQC1000 VQC2000 VQC4000 Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B U-side end plate assembly !

AC

0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4 36 2.0 60 3.3 70 3.9 36 2.0 60 3.3 70 3.9 130 160 180 670 37 330 18

0.4

Product Precautions DIN rail clamp screw Stations 1 2 3 D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 31 42

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

SYJ300/500/700

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/Surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (MO): SYJ52-WO-M5 (-F) Applicable cable O.D.

0.4

Note 2) L kit: Nil F P PC J Nil S F kit P kit (26P) P kit (20P) J kit (20P) L kit S kit q w Note) L kit: Nil F e r kit SE SSQ1000 No.

Smooth Cylinder/Low Speed Cylinder

-X 1235 Series CS2Y Dimensions Center trunnion: CS2YT With rod boot Z + 1/2 stroke Port V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve Width across flats KA Z1 + l + 1/2 stroke MM TDe8 R TY D E e AL l f K A F N N TT C h + l B ZZ1 + l + Stroke TX H M S + Stroke TZ ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) B C MM A AL D E F G J V W K KA M N 125 140 160 M30 x 1.5 50 47 143 115 32 71

SQ1000/2000

2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (A, B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 threads L n Formulas: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (maximum 24 stations) Dimensions 24 331.5 349 375 385.5 23 320 337.5 362.5 373 22 308.5 326 350 360.5 21 297 314.5 337.5 348 20 285.5 303 325 335.5 19 274 291.5 312.5 323

Air Cylinder

+ l + Stroke h + l 8 8 8 8 IJ e JH f f JW l ZZ + 2 ( l + Stroke) S + Stroke h + l l + Stroke h + l + Stroke (mm) Bore size Stroke range A AL B1 C D E F GA H1 I J K KA MM NA P S Standard Long stroke 20 Up to 200 201 to 1500 18 15.5 13 14 8 12 2 12 5 26 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 77 25 Up to 300 301 to 1500 22 19.5 17 16.5 10 14 2 12 6 31 M5 x 0.8 depth

ZP

to "ZP3-YB;-B5-B5". 29 With Adapter: Vacuum Inlet Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Bellows Pad type Pad Unit ZP3-Y10B;-B5-B5 [Weight: 7.9 g] ZP3-Y13B;-B5-B5 [Weight: 8.1 g] ZP3-Y16B;-B5-B5 [Weight: 8.2 g] 8 8 8 M5 x 0.8 M5 x 0.8 Vertical M5 x 0.8 With Adapter: Vacuum Inlet 15 2 M5 x 0.8 M5 x 0.8 10 2 2 M5 x 0.8 2 10 5 5 5 Square 8 Square

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06