Manifold Specifications

In the case of base mounting, 2(A) port of 3 port valve should be 2(B) port of manifold base.

3M/SMseries

-1.8WDC WF333O Exhaust Conter NVF343O GNced Center (B) (A) (B) (a) 01 c2 \ t \ T I'f E I J E Z (R2)(PxFl) (R2XPXR1) Prssure Center NVF3530 (B) (A) Spej;ifications -, Flurd-Art f Operatangprssurcrange2Positionsingle2O-12gPSlS(1.5-9kgF) U 2 pooition double-1 5 1 28 PSI (1 9kgf/cm'?

ZB-OM00301

JIS B 8370: JIS B 8361: JIS B 9960-1: -((1 :) JIS B 8433-1993: *2) : : : 1 2. 3. 1. 2. 3. 4. 2 2 - No.ZB-OM00301 3 1 1 *3) 1 1 () () () 3 - No.ZB-OM00301 () () 4 - No.ZB-OM00301 () * JIS B 8392-1 2.4.32.6.3 () 5 - No.ZB-OM00301 * F.G.

Compact Vacuum Unit Ejector/ Vacuum Pump System

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety, etc. *2) Labor Safety and Sanitation Law, etc.

VT317

(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

Electro-Pneumatic Proportional Valve

: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q 13 5 L 03 M5 Valve type Body materials Symbol A Nil Body Brass C37 Note for PVQ13 for PVQ31, 33 13 31 33 N.C.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

Digital Pressure Switch

Normal output Reversed output P_1 = A-(A-B)/4 n_1 = B+(A-B)/4 A = Max. pressure H_1 = (A-B)/2 H_1 = (A-B)/2 B = Min. pressure The set values of OUT2 become as follows "_", i.e. "P_2", "n_2" and "H_2".

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

SYJ72R is only for manifold use. 35 Series SYJ700 Construction c f a e b d N.C. N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No.

ZQ-OM01301

ZQ-OM01301-A Vacuum Pump System Manifold ZZQ108A-S O C-A (1) (2) (3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 2) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 2) Select S for the Option Symbol (10). (4) Shipping condition (2) Vacuum pressure

IR1000/2000/3000

44 51 Approx. 90 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) G 2 OUT 30 OUT(2) SUP(1) OUT 10 43 35 EXH Approx. 43 2-Rc(PT) 1/8 Port size 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port 50 50 35 2-Rc(PT) 1/8 Pressure gauge port Approx. 60 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet) Boss-cut front flange type

ZQ-OM01401

-Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: 2) 1) 2) 3) 1. 2. 3. 4) 1. 2. 3. 4. 2 - No.ZQ-OM01401-B /ZQA / *3) 1)1 1.5 2) 3) *3) 1 1 () 3 - No.ZQ-OM01401-B () -() 4 - No.ZQ-OM01401-B 1.

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Digital Pressure Switch Series ZSE10(F)/ISE10 How to Order Rated pressure range ISE10 0.100 to 1.000 MPa ISE10 For positive pressure M5 A M For vacuum/ compound pressure ZSE10 M5 B M Option 3 Rated pressure range Symbol Calibration certificate Nil K p ZSE10 ZSE10F 0.0 to 101.0 kPa 100.0 to 100 kPa Piping specifications Option 2 M5 female thread/Side ported Piping port None Nil M5 Panel mount

VDW30/40-XF

Caution One-touch fitting Dimensions VDW30-G--P7 / P7 Quick Fastener VDW40-G--P10 / P10 Quick Fastener 30 36 Approx. 300 21 23 32 18 20 27 Approx. 300 56 48 10 9 P7 1 (IN) port P7 2 (OUT) port 50 21 P10 1 (IN) port P10 2 (OUT) port 56 VDW40-5G--P10--N VDW30-5G--P7--N 16 12 2 x M3 x 0.5 thread depth 4 2 x M3 x 0.5 thread depth 5 Male Quick Fastener Dimensions Quick Fastener Clip Dimensions

ZL3-OM00601

No.ZL3-OM00601-B 2.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order B 40 30 D CQ2X Without auto switch With auto switch CDQ2X A73 B 40 30 D Number of auto switches With auto switch (with built-in magnet) Auto switch type 2 pcs. 1 pc. "n" pcs. Nil S n Nil Without auto switch (with built-in magnet) Microspeed cylinder Select auto switch model number from the table below.

2

Q Q L2 L2 2 x N 2 x O Q Q Applicable tubing b Applicable tubing a Different Diameter Cross: KQ2TY Applicable tubing b Applicable tubing O.D.

Table of Contents

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000