ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

MHF2-E

Product Specifications 1-1.Specifications 2. Operating Method / Operation 2-1. Precautions for Design 2-2. Selection 2-3. Installation 2-4. Air supply 2-5 Piping 2-6. Operating Environment 2-7. Lubrication 3. Maintenance. 3-1. Precautions 3-2 Disassembly Drawing 1 Disassembly Drawing 2 3-3.

Air Slide Table Series MXQ

+ &&&*+ ,1 &2) +. 2) +. 2) +. .+ 11 ; # > ( > ( 2& 2& 2& 2& ,* ,* ,* .* .* ,* +2 &)' &,' &,' &)' &,' &&' &&' Symbol > ?

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 55 62 ZZ Z 16 34 16 34 G H (NN 1) x H B A 6.6 11 12 12 6H9 depth 6 +0.030 0 38 2 7 B A NN x M8 x 1.25 thread depth 16 6H9 depth 6 +0.030 0 GA HA Section AA Section BB (mm) F 50 50 50 60 35 60 70 75 80 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 GA 22 22 22 22 55 61 102 154 190 HA 45 45 45 55

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)]

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: -, Material: -, Option: -, CE Compliance: -

Pin Cylinders Series CJP2/CJP

19 7 31 27 12 16.5 22.5 29 M5 x 0.8 NN R 5st 10st S 15st W Q 5st 10st Z Bore size (mm) 4 6 10 15 Q G C 15st K H 2 39.5 31.5 23.5 3 32 24 16 7 M8 x 1.0 Hose nipple A W F E S Z H Refer to page 38.

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

VCA

ported) 5.5 F E Manual override 2-6.4 Mounting hole C B A G H 1 Q l = 300 S U V Y (X) 25 l = 280 U side D side Stations 1 2 3 4 5 n For manual override J2 Manual override W T R N Z M 16 1 1 L 2 2 2 2 P = K (pitch) n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J1 J3 2-1/2 (VCA30), 3/4 (VCA40) IN port (front ported) L dimensions (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Low Profile Air Gripper Series MHF2

Replacement part/Grease pack part no.: Guide unit: GR-S-005 (5g) Cylinder unit: GR-L-005 (5g) 454 Low Profile Air Gripper Series MHF2 Construction @1 MHF2-12D to 20D i q !3 !0 @2 w u !1 !2 !7 !5 @0 o y !9 !8 !4 r t e !6 Component Parts MHZ Note Material Material No. Description No.

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

VFS4000-OMY0001

20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc

Electro-Pneumatic Proportional Valve

) 0.6mm ( for PVQ13) 0.8mm ( for PVQ13) 1.6mm ( for PVQ31, 33) 2.3mm ( for PVQ31, 33) 4.0mm ( for PVQ31, 33) M G Flow rate characteristics PVQ13-5-04 (24VDC type) at 0.45MPa PVQ3-5G-23 (24VDC type) at 0.35MPa 140 8 7 120 6 100 Flow rate (Lit/min) Flow rate (Lit/min) 5 80 4 60 3 40 2 20 1 0 0 30 40 50 60 70 80 75 85 95 105 115 125 135 145 155 165 65 Current (mA) Current (mA) Dimensions