Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4

100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

ZQ-OM01401

L 1. (b ) 2. R 3. L 4.

Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch

Manifold Specifications

Porting specifications 4(A), 2(B) port Port size Applicable valve model Base model Wiring 1(P), 5(R1) 3 (R2) 4(A) 2(B) Stations Plug-in type VV5ZS2-51F VV5ZS2-51G 2 to 16 stations With D-sub connector With attachment plug lead wire Rc VZS250-FZ 1 8 Rc 1 8 Side Grommet L plug connector M plug connector K plug connector C4 VZS250G L M KZ Non plug-in type VV5ZS2-51 2 to 24 stations C6

ZL3-OM00601

No.ZL3-OM00601-B 1.How to Order ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 Without valve ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 With valve Pressure switch ZL3 M 06 1 K1 5 LO Z 1 V A M W 1 with energy saving function 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 1) Max. suction flow 2) Standard supply pressure 4) Exhaust specifications 3 300L/min(ANR) M 0.35MPa Nil Exhaust through silencer H 0.50MPa

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: L (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

IDX-OM-W016

for the installation and handling of the product . 8 1 8 2 Specifications . 8 1 Chapter 9 Specification for Option K 9 1 Safety instructions . 9 1 9 2 Specifications . 9 1 Chapter 10 Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification. 10 1 10 3 Specification of heavy duty auto drain (ADH4000-04). . 10 2 10 4 Installation of heavy duty auto drain . 10 2 10 5 Maintenance

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Contents 40 CA2Y40Z-PS Piston seal: 1 pc. 50 CA2Y50Z-PS Rod seal: 1 pc. 63 CA2Y63Z-PS Tube gasket: 2 pcs. 80 CA2Y80Z-PS Grease(10g): 1 bag 100 CA2Y100Z-PS When only grease for maintenance is required, order it by the following numbers. Net weight Part No. 5g GR-L-005 10g GR-L-010 150g GR-L-150 C a u t i o n 1 When replacing mounting brackets, use socket wrench.

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: B (Brass Body, EPDM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: A (Brass Body, FKM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: J (Stainless Steel Body, EPDM Seal, Class B Coil)