VZ1000

4 2 3 1 2 4 3 0.6 1.5 1.0 0.9 M5 x 0.8 90 2 position single solenoid VZ1120-M5 3-3-10 4 Port Solenoid Valve Body Ported Series VZ1000 Use as a guide for selection.

ZQ-OM01301

valve ZQ1-CV 7 V port fitting VVQ1000-50A-C4 (1) Specifications 50A-M5 Without fitting (M5x0.8) 50A-C3 3.2 (Straight) (1) 50A-C4 4 (Straight) Clip (10 pcs. are included in one set) 50A-C6 6 (Straight) A A F1-LC3 3.2(Elbow) ZK1-CP-A F1-LC4 4 (Elbow) 8 Bracket assembly ZQ1-BK1-A 24 - Doc.

Precision Regulator

(Option) 30 2 ARJ 2.3 48 Pressure gauge (Option) AR425 to 935 Pressure gauge (Option) ARX 5.5 9.5 M5 depth 7 AMR 9 M5 depth 7 2 x Rc 1/8 15.5 IN 119 Pressure gauge port 83 75 Bleed Bleed IN ARM Exhaust IN OUT(2) Bleed Bleed SUP(1) IN G 2 OUT 144 43 G ARP 76 22 2 x Rc 1/8 Pressure gauge port 50 50 (17.7) 2 x Rc 1/4 Port size IR-A EXH(3) OUT 2 OUT(2) SUP(1) 60 Rc 1/2 Exhaust port 66 2 x Rc

IR1000/2000/3000

Precautions. 60 50 50 Rc 1/8 2-Rc 1/4 Pressure gauge port Port size M6 x P0.5 15.5 82 60 IR3120-0 9 Mounting hole 48 2.3 Bracket (Option) 76 148 Bleed 43 Pressure gauge (Option) EXH(3) OUT(2) SUP(1) 22 15.5 M5 depth 7 Rc 1/2 Exhaust port 66 9 68 66 IN Bleed 2-Rc 1/8 Pressure gauge port 2-Rc 1/4 to 1/2 Port size 22 76 144 43 EXH(3) SUP(1) OUT(2) Rc 1/2 Exhaust port 68 66 66 2-Rc 1/4 to 1/

CG1-OM0227

) JIS B 8433-1: --1 *2) 1. 2. 3. 1. 2. 3. 4

Air cylinder

PTFE Grease Specification Standard models -X446 Grease pack part number: GR-F-005(5g) 22 - Lubrication Caution 1) Lubrication for products using special grease Lubrication to this cylinder leads to operation failure. Otherwise, it may cause the operating failure. 2) Do not wipe off the grease on the sliding surface of the air cylinder.

Air cylinder

PTFE Grease Specification Standard models -X446 Grease pack part number: GR-F-005(5g) 21 - Lubrication Caution 1) Lubrication for products using special grease Lubrication to this cylinder leads to operation failure. Otherwise, it may cause the operating failure. 2) Do not wipe off the grease on the sliding surface of the air cylinder.

CM2x-OM0230Q

CM2-*Z 3-1. a) b GR-S-010(10g )GR-S-020(20g ) P18, 4. (XC85,X446)P19 c) 4. 17 - 3-2. 3-2-1. 1 2 3 3-2-2. 1 2 3 4 5 6 7) 8 1) 2) 33. 331. 4. 20 25 32 40 CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS 1 3-3-2. 1 2 3 4 18 - 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> <> 4-2. PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Integrated clevis type Note 1) Single clevis type Note 1) Bore size (mm) Seal kit no. Kit components Double clevis type Note 3) Note 1) Front trunnion type (1 pc.) Note 2) 20 25 CM2X20-PS Rear trunnion type (1 pc.) Note 2) Rod seal: 1 pc. CM2X25-PS 32 40 Boss-cut basic type (1 pc.) CM2X32-PS Grease pack (10g): 1 pc. Boss-cut flange type (1 pc.)

Precision Regulator Series IR1000/2000/3000

2.3 Bracket (Option) 76 148 Bleed 43 Pressure gauge (Option) EXH(3) OUT(2) SUP(1) 22 15.5 M5 depth 7 Rc 1/2 Exhaust port 66 9 68 66 IN 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port Bleed 22 76 144 43 EXH(3) OUT(2) SUP(1) 68 66 Rc 1/2 Exhaust port 66 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port 556 Precision Regulator Series IR1000/2000/3000 Series IR1000 Flow Characteristics

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Manifold Specifications

Applicable solenoid valve Type 20 How to Order G L M D Option VV4Z1 05 20 1 4(A), 2(B) port VZ1120-M5 Applicable blanking plate assembly DXT170-25-1A Individual EXH spacer assembly DXT170-48-1A Individual SUP spacer assembly DXT170-44-1A Stations P, R port thread type 02 2 stations F: With foot bracket 20 20 stations Nil Rc G NPT 1(P) port 00F 00N 3(R) port NPTF 00T Bracket is not mounted

100

0 Unit o Output N NPN open collector 1 output P PNP open collector 1 output A NPN open collector 2 outputs B PNP open collector 2 outputs C NPN open collector 1 output + Analog voltage output D NPN open collector 1 output + Analog current output E PNP open collector 1 output + Analog voltage output F PNP open collector 1 output + Analog current output Nil With unit switching function M SI

IR1000/2000/3000

depth 7 75 83 Approx. 119 18 1 1 SMC IN Bleed Pressure gauge (optional) Exhaust SUP(1) OUT(2) OUT 43 Approx. 60 50 50 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port M6 x P0.5 15.5 9 82 60 IR3120-0 Mounting hole 48 2.3 76 Approx. 148 22 Bracket (optional) Bleed 43 Pressure gauge (optional) EXH(3) OUT SUP(1) OUT(2) Rc(PT) 1/2 Exhaust port 15.5 M5 depth 7 Approx. 68 66 9 66 22 76 Approx

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Digital Pressure Switch Series ZSE10(F)/ISE10 How to Order Rated pressure range ISE10 0.100 to 1.000 MPa ISE10 For positive pressure M5 A M For vacuum/ compound pressure ZSE10 M5 B M Option 3 Rated pressure range Symbol Calibration certificate Nil K p ZSE10 ZSE10F 0.0 to 101.0 kPa 100.0 to 100 kPa Piping specifications Option 2 M5 female thread/Side ported Piping port None Nil M5 Panel mount

Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch

Manifold Specifications

Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: J (Stainless Steel Body, EPDM Seal, Class B Coil), Option: F (Foot Bracket)