Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

ZP3

M5 x 0.8 Model 17.5 Vacuum inlet direction q Pad dia.

SQ1000/2000

2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ2230D Double (double solenoid): SQ2231D e e q w y e e q w y SQ2231D SQ2230D (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1)(P)(R2) (R1) (P)(R2) u u 3 position: SQ2 30 3 4 5 3 position: SQ2 31 3 4 5 SQ2330 SQ2331 (A)(B) (A)(B) 4 2 4 2 y e e q w y e e q w 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ2430 SQ2431 (A)(B) (A)(B) 4 2 4 2

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

5 Port Solenoid Valve

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

Air Slide Table

M5 x 0.8 4.4 4 9 MXQ12B M6 x 1 7.4 7 12 MXQ16B M6 x 1 7.4 10 15 MXQ20B M8 x 1.25 18 14 20 MXQ8C M4 x 0.7 2.1 6 9 MXQ12C M5 x 0.8 4.4 8 12 3.

Rotary Actuator/Vane Type

6 q w !4 !2 w !4 o !0 !7 !1 q !5 !1 Double shaft type Single shaft type Single shaft type Component Parts Double shaft type DNo. Description Material Note No.

0.4

w e q w VQ1100 VQ1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A)

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(5/32) N7T (1/4) M5 (M5 thread) 2 stations: 68 Addition per 1 station: 20 1/8 NPTF Top VQZ2 2 VQZ200 2 to 20 stations VV3QZ22N7T (1/4) N9T 5/16) N11T (3/8) 1/4 NPTF 2 stations: 114 Addtion per 1 station: 37 1/4 NPTF Top VQZ3 2 VQZ300 2 to 20 stations VV3QZ32How to Order / Manifold Assembly (Example) D side U side 1 3 4 5 Stations 2 VQZ212-5M-N7T 4 pcs.

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 Series Assembly part no.

0.4

: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

fittings Rod end male thread With rubber bumper Through-hole (Standard) Mounting Both ends tapped style Built-in magnet JIS Symbol Double acting, double rod (1) M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 Piping Screw-in type Rod end male thread Note 1) In the case of without auto switch, M5 x 0.8 is used for 5 stroke only.

Made to Order

x 1 21 7.5 4.5 62.5 22 76 34 17 M5 6.5 41 9.5 10 50 3 M6 x 1 25.5 7.5 7.5 74.5 28 90 39 19.5 M5 6.5 45 9.5 10 60 3 M8 x 1.25 35.5 7.5 9 92.5 38 110 39 19.5 M6 10 60 11 15 78 3 M8 x 1.25 34.5 7.5 10 39 118 49 24.5 M6 10 70 18 15 90 3 104.5 Note 1) With dimension FE, FF , and HB, the amount of clearance between the body and the floating joint is 1 mm.

Compact Hydraulic Cylinder

8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 q w !2 !1 !

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

Table of Contents

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300