42

VQ 5 0 1 0 5 1 SV Series CE-compliant SYJ VV5Q51-0603SUQ(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

0.4

VQ1000/2000 Series VQ1000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P

Air Fittings & Tubing

<M5> (1) (2) Tube O.D.

MY1

5.6 110 55 42 9 M5 x 0.8 30 20 MY1B25 40.5 2 M5 x 0.8 9 39 53 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 52 12 M6 x 1 37 25 MY1B32 50 2 M5 x 0.8 10 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 64 12 M6 x 1 45 30.5 MY1B40 63 2 M6 x 1 13 61.5 75 (mm) PC PD T VV XX YH YW Z ZZ P PA PB Q PP QW QQ RR SS TT UU WW Model Rc 1/8 60 30 206 12 42 16 16 6 14.5 15 12.5 MY1B25 55 6 10 16 28 38.5

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

Stability of suction position,

1 !1 !2 !2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.

REA/REB

REBR15 12 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 33.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 39 MVGQ J x E K L LD M MM N P PW QW T TC W WP Q Model CC REBR15 M5 x 0.8 x 7 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 32 18 21 17 25 84 REBR25 M6 x 1 x 8 15 70 5.6 6 M5 x 0.8 6.5 Rc 1/8 43 20 25.5 22.5

REA/REB

REBR15 12 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 33.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 39 MVGQ J x E K L LD M MM N P PW QW T TC W WP Q Model CC REBR15 M5 x 0.8 x 7 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 32 18 21 17 25 84 REBR25 M6 x 1 x 8 15 70 5.6 6 M5 x 0.8 6.5 Rc 1/8 43 20 25.5 22.5

High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Vacuum System Peripherals:

x 0.8 , ZY 1 8 1 4 SYJ300/500/700 Vol. 4 0.41 to 2.8 ZQ 3 port solenoid valve Series VZ Compact size: 15 mm (VZ100/200/300) 18 mm (VZ400/500) VZ100 ZF M5 x 0.8 Vol. 4 0.11 to 3.0 VZ300/500 ZP M5 x 0.8 , VQZ200/300 Vol. 4 1.7 to 4.5 ZCU 1 8 1 4 3 port solenoid valve Series VX31/32/33 (2) (1) (2) (1) AMJ to 1 8 3 8 0.29 to 1.6 Vol. 17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol

Table of Contents

8, M5 x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

Hydraulic

Q: Required fluid volume for extension (l/min) Q: Required fluid volume for retraction (l/min) D: Bore size (cm) d: Piston rod diameter (cm) : Piston speed (mm/s) Q = D __ 4 6 _ 1000 Formula (1) Q = (D d) __ 4 6 _ 1000 ..

KJ

Body size Port size M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK2P-M5M -01MS KK3P-01MS -02MS -03MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK2S-M5M -01MS KK3S-01MS -02MS -03MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type

smcmaintenancepartslist

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Valve stations 01 Solenoid on same side of A and B port 1 station Nil P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Thread type R port: Rc 1/8 20 Solenoid on same side of A and B port 20 stations Type S41 Nil F N T Rc S Type VK334 Type VK3140 Port size G M5 M5 x 0.8 C4 4 cassette NPT P port: Rc 1/8 NPTF R port: Rc 1/8 B port: M5 x 0.8 A port: M5 x 0.8 Type 42: Base mounted (A, B port

Modular F.R.L. Unit

M5 x 0.8, 1/8, 1/4, 3/8, 1/2 Using a T-interface facilitates the redirection of air flow.

Proposals for Energy Saving

8, M5 x 0.8, NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Port size R 1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 Enclosure IP40 Note 1) For vacuum operation, a momentary pressure of 0.5MPa will not be a problem.

V

www.stevenengineering.com I 2.32 SOLENOID VALVES SERIES VQ1000 H O W T O O R D E R V A L V E 5 VQ1 0 Y C6 1 4 L C Y L I N D E R P O R T S 1 VQ1000 S E R I E S C3 One Touch Fittings for 3.2 C4 One Touch Fittings for 4 C6 One Touch Fittings for 6 M5 M5 (10-32Nom) N1 One Touch Fittings 1/8 N3 One Touch Fittings 5/32 N7 One Touch Fittings 1/4 C O N F I G U R AT I O N 1 2 M A N U A L O V E R R

1

Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x 0.8 M12 x 1.5 3.5 M5 x 0.8 Standard stroke (mm) HA Slide FA B C DA FB G GA GB H J K L MM ML OA GC JA JB MC NN MA A RB1007 M5 x 0.8 M14 x 1.5 3 12 72 44 3 17 3.5 4.5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 28 Ball bushing M6 x 1.0 26 78 37 RB1007 M14 x 1.5 64 91 4 12 82 50 3 17 38 34 32 40 50 63 M8 x 1.25 M20 x 1.5