Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Vacuum Pad: Ball Joint Type

width across flats 14 Hexagon width across flats 19 3 3 I 5 5 D C J H I Hexagon width across flats 8 M5 x 0.8 J H F Hexagon width across flats 10 Hexagon width across flats 2 Hexagon width across flats 12 F M8 x 1.25 Y D C Hexagon width across flats 12 Hexagon width across flats 3 2 A B 3 2 A B Dimensions: 10 mm Stroke (mm) B Stroke: 10 mm A C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5

C85

Electroless nickle plating 1 1 1 1 1 1 1 1 1 2 1 1 2 2 1 1 1 2 2 1 1 2 2 q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (7.5) DIN rail clamp screw 18 0.5 U side n 5 Manual override Manual override SY A SMC SMC SMC SMC 4 (L4) (L3) L1 SYJ 2 L2 A 3 2 A VK 2 P=16 2 A 1 VZ 2 19 Stations VT 5.5 D side 0.7 17 70 3 300 VT 43.5 10 (C4, C6) (M5) (Lead wire) VP Cover diameter 1.6 Cross section 0.34mm2 VG VP 48.5 (11) 7.5 R 3 1 P (18) 2-Rc

1

or more, X: 20 mm or less H: M5 or less For 12 For 12 J: 3 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less H: M6 or more, X: 22.5 mm or less H: M6 or less 16 16 J :4 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less XA2 XA17 H: M8 or more, X: 26.5 mm or less H: M8 or less 20 20 J: 5 mm or more, I :11 mm or less J: 5 mm or more, I: 11 mm or less H : M10 or more, X:

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: J, K, T Q1 = M L2 + (3 x P) L2 + (3 x P) L2 = L1 + (3 x P) L1 = Q2 = M Q2 = M L2 = [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Symbol: A35 Symbol: A36 Symbol: A37

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

) 258-9200-www.stevenengineering.com F S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

2, !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

2, !

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

2) 22.5 (Extension end adjuster) Bottom view of MXQ8L-30 13224 6.5 8 6.5 I J 5.5 8 3.5 Vacuum suction port M5 x 0.8 Max. 11 (Retraction end adjuster) 27 23 6 2 7 2 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 3H9 ( ) depth 3 +0.025 0 HA GA NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 3 +0.025 0 A B 1 14 7 7 3.2 3.2 6.5 A B H (NN 1) x H G 12.5 12.5 5.7 5.7 A-A B-B (mm) Model F 25

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88

smcmaintenancepartslist

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J Drain AD27-C Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C2SF-CJ C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 OUT IN C2SF-6C AD27-6 AD37-6 AD38-6 Nylon AD27-6C C2SF-6J C3SF-6J w C3SF-6W C2SF-6CJ r C2SF-2 C3SF-2 AD27-2 AD37-2 e Metal AD38-2 t C3SF-2J C2SF-2J C3LF-

Proposals for Energy Saving

ON H OFF Blue 50msec PFA7H-(-M) 28 29 Sensors Measuring Instruments B C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mA DC 5 20 Analog output

CL

port Unlocked when pressurized Lock nut 6 71 46 M5 x 0.8 Rod side cylinder port 31 20 14 M14 x 1.0 M6 x 1.0 M5 x 0.8 Head side cylinder port 5 48.5 6.5 34 5 6 50.5 18 Width across flats 10 20 32 18 2.3 2-5.5 Mounting hole 6 9 9.5 11.5 111 + Stroke 150 + Stroke 65 18 32 39 9-2-14 13 Series CLJ2 Fine Lock Cylinder Double Acting, Single Rod Rod Side Flange Style (F) E D P CLJ2F1619 16 2 8 Silencer

Table of Contents

Exploded view: VQ1000-Plug-in Unit (F, P, J, L, Skit) . Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

CY1

B Counter bore depth C CB HA 2-P (piping port) 4-J x E (depth) HT 2 x 4-MM thread depth M T T Y HP L TC F X WP GW QW PW GP D 4-LD W K WS With switch rail Plug HS G Q + Stroke CR HR Z + Stroke (Area E) for CY1RG25, 32, 40, 50, 63 2-P (piping port) 22 8 14 12.5 19.5 13 30 Plug 2-P (piping port) 12.5 CY1RG10 CY1RG15 (mm) CB CR B C D G GP GW H HA HB HC HP HR HS HT J x E K F Model CY1RG10 2 0.5

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44