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Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S 128 [129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 84 72 60 52.5 M8 x

AC Servo Motor Driver (Pulse input type/Positioning type ）

The Z-phase signal was Review the Z-phase unpassed not detected normally. signal and wirings. not detected.

Air Cylinder Series CM2

U L RR Z + Stroke 20 CX CZ ZZ + Stroke N L Stroke Head side trunnion style: -H -R -W -H -R -W N L Stroke Rod side trunnion style: CBM2U Bore size CBM2T Bore size TY TD TT Z + Stroke ZZ + Stroke Z TT TZ TX ZZ + Stroke (mm) Axial foot style Trunnion style Clevis style Flange style Bore size (mm) Stroke range Stroke range Stroke range Stroke range Z Z ZZ FX LD FT LH B LC LS LT LX LZ X Y Z ZZ

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15 9 13 8.5 2-M5 x 0.8 (30) (Z) 6 2-M8 x 1.25 thread depth 12 thread depth 7.5 60 0.2 12 (mm) S SS ZZ Z Part no.

Air Cylinder

ZZ S Z ZZ S Z ZZ S Z ZZ S Z ZZ 20 87 132 141 112 157 166 137 182 191 25 87 136 145 112 161 170 137 186 195 32 89 138 147 114 163 172 139 188 197 164 213 222 40 113 168 179 138 193 204 163 218 229 188 243 254 213 268 279 Symbol Bore size The bracket is shipped together.

Magnetically Coupled Rodless Cylinder

, z + A = 100 y, z + A a 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A =

Aluminum High Vacuum Angle Valve

D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

4/5 Port Solenoid Valve

) Z: Positive common specifications only.

CJ2

Z + 2 x Stroke Rod End Nut Material: Iron Applicable bore (mm) 10 16 H d C B Part no.

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S

CV/MVGQ

15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q QY Bore size (mm) 20 25 32 40 Symbol S ZZ Z S ZZ Z S ZZ Z S Z ZZ S Z ZZ 20 25 32 40 14 65.3 19.8 217 208 137 192 183 112 167 158 87 14 70.5 22 221 212 137 196 187 112

Compact Cylinder

Symbol Cylinder Tube: With Concave Boss on Head End -X1876 ClQ2 ClQ2K ClQ2lS D(C)(M)(Z) S(M)(Z) T(M)(Z) X1876 Mounting Bore size Stroke With concave boss on head end The specifications are the same as those of the CQ2 series.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

5

RHC With Rod Trunnion With Head Trunnion RZQ Z + Stroke TX CD Z + Stroke TX CD 51 40 3.2 3.2 40 51 6.8 x 3.4 6.8 20.5 7.5 40 57 6.8 20.5 LX LZ LX LZ 7.5 40 57 6.8 x 3.4 (mm) Mounting Part no.

Air Slide Table

) Lr = 70 mm MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C 0.007 0.004 0.120 ST 10 to 30 ST 75 0.006 ST 75 0.100 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 40 0.003 0.005 ST 30 to 50 0.080 0.004 ST 50, 75 0.060 0.002 ST 50 0.003 ST 20 0.040 0.002 ST 40 0.001 ST 10 ST 10 to 30 0.020 0.001 ST 75 ST 10 to 30 0.000 0.000 0.000 0 5 10 15 0

NCQ2/CQ2

Z is not included in the model number.

smcmaintenancepartslist

extension type) 12 MGP12-Z-PS MGP12-Z-XC8-PS 16 MGP16-Z-PS MGP16-Z-XC8-PS 20 MGP20-Z-PS MGP20-Z-PS MGP20-Z-XC8-PS 25 MGP25-Z-PS MGP25-Z-PS MGP25-Z-XC8-PS 32 MGP32-Z-PS MGP32-Z-PS MGP32-Z-XC8-PS 40 MGP40-Z-PS MGP40-Z-PS MGP40-Z-XC8-PS 50 MGP50-Z-XC4-PS MGP50-Z-XC6-PS MGP50-Z-XC8-PS 63 MGP63-Z-XC4-PS MGP63-Z-XC6-PS MGP63-Z-XC8-PS 80 MGP80-Z-XC4-PS MGP80-Z-XC6-PS MGP80-Z-XC8-PS 100 MGP100

Electric Actuator/Slider Type

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Conrm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

MY1

Wall mounting z y P. 26 Wb: MGGLB25-200 (4.35kg) x y x z MY1H40-500 3. Ceiling mounting 4.

Table of Contents

Tact time Moving distance: _mm t = Tact time: _s s = Cycle time: _s Time t s z x Example) Projection distance x: _mm y: _mm z: _mm Work piece moment y Environment General, Clean room, Mist environment, Dusty environment 94 23 Series LTF Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.