Aluminum High Vacuum Angle Valve

D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

4/5 Port Solenoid Valve

) Z: Positive common specifications only.

CJ2

Z + 2 x Stroke Rod End Nut Material: Iron Applicable bore (mm) 10 16 H d C B Part no.

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S

CV/MVGQ

15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q QY Bore size (mm) 20 25 32 40 Symbol S ZZ Z S ZZ Z S ZZ Z S Z ZZ S Z ZZ 20 25 32 40 14 65.3 19.8 217 208 137 192 183 112 167 158 87 14 70.5 22 221 212 137 196 187 112

Compact Cylinder

Symbol Cylinder Tube: With Concave Boss on Head End -X1876 ClQ2 ClQ2K ClQ2lS D(C)(M)(Z) S(M)(Z) T(M)(Z) X1876 Mounting Bore size Stroke With concave boss on head end The specifications are the same as those of the CQ2 series.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

5

RHC With Rod Trunnion With Head Trunnion RZQ Z + Stroke TX CD Z + Stroke TX CD 51 40 3.2 3.2 40 51 6.8 x 3.4 6.8 20.5 7.5 40 57 6.8 20.5 LX LZ LX LZ 7.5 40 57 6.8 x 3.4 (mm) Mounting Part no.

Air Slide Table

) Lr = 70 mm MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C 0.007 0.004 0.120 ST 10 to 30 ST 75 0.006 ST 75 0.100 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 40 0.003 0.005 ST 30 to 50 0.080 0.004 ST 50, 75 0.060 0.002 ST 50 0.003 ST 20 0.040 0.002 ST 40 0.001 ST 10 ST 10 to 30 0.020 0.001 ST 75 ST 10 to 30 0.000 0.000 0.000 0 5 10 15 0

NCQ2/CQ2

Z is not included in the model number.

smcmaintenancepartslist

extension type) 12 MGP12-Z-PS MGP12-Z-XC8-PS 16 MGP16-Z-PS MGP16-Z-XC8-PS 20 MGP20-Z-PS MGP20-Z-PS MGP20-Z-XC8-PS 25 MGP25-Z-PS MGP25-Z-PS MGP25-Z-XC8-PS 32 MGP32-Z-PS MGP32-Z-PS MGP32-Z-XC8-PS 40 MGP40-Z-PS MGP40-Z-PS MGP40-Z-XC8-PS 50 MGP50-Z-XC4-PS MGP50-Z-XC6-PS MGP50-Z-XC8-PS 63 MGP63-Z-XC4-PS MGP63-Z-XC6-PS MGP63-Z-XC8-PS 80 MGP80-Z-XC4-PS MGP80-Z-XC6-PS MGP80-Z-XC8-PS 100 MGP100

Electric Actuator/Slider Type

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Conrm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

MY1

Wall mounting z y P. 26 Wb: MGGLB25-200 (4.35kg) x y x z MY1H40-500 3. Ceiling mounting 4.

Table of Contents

Tact time Moving distance: _mm t = Tact time: _s s = Cycle time: _s Time t s z x Example) Projection distance x: _mm y: _mm z: _mm Work piece moment y Environment General, Clean room, Mist environment, Dusty environment 94 23 Series LTF Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Electric Actuators

Positioning complete signal 19 OZ+ Z Z 10 20 COIN OZ+ 14 GND VDC 12 to 24V 13 4.7k COM Torque monitor: Zout 4.7k 12 + IM VDD 30V max. 15mA max. 11 Speed monitor: Zout 4.7k 4.7k SP + 21 CZ Z (Pin 14 is GND.) 26 FG CN I/F 205 Non-standard Motor Compatible Drivers Mitsubishi Electric Corporation Drivers for LJ1, LG1, LX Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

Air Cylinder

49 4.5 (58.4) 56 30 30 78.7 (mm) Rod Trunnion (mm) Head Trunnion Bore size Z ZZ 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st 20 46 131 156 181 25 51 136 161 186 211 32 51 138 163 188 213 40 62 155 180 205 230 Bore size 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Z ZZ Z ZZ Z ZZ Z ZZ 20 118 139 143 164 168 189 25 123 144 148 169 173 194 198 219 32 126 150 151 175 176 200

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

SY

) With "Z", only positive common specification is available.

Mechanically Jointed Rodless Cylinder Series MY1

m1 x g x X m2 x g x X m4 x g x Z M1 M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.