45

2 to 20 stations 2 to 8 stations 2 to 16 stations 2 to 17 stations 2 to 16 stations Location Direction Base Side C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C4 (One-touch fitting for 4)/C6 (One-touch fitting for 6) C4 (One-touch fitting for 4)/C6 (One-touch fitting for 6)/C8 (One-touch fitting for 8) D-sub connector A, B porting specifications SX3000 SX5000 SX3000 SX5000

Valve Single Unit

Series SX3000/5000/7000 Base Mounted Valve Single Unit How to Order 5 L N SX 5 2 40 Series Thread type 3 SX3000 5 SX5000 Nil Rc 7 SX7000 G F N NPT Type of actuation NPTF T 2 position single Port size 1 Manual override Applicable series Symbol Nil Port size Without sub-plate Nil: Non-locking push type 1 8 SX3000 01 With sub-plate 2 position double 1 4 SX5000 SX7000 02 2 With sub-plate 3 8

Vacuum System Peripherals:

SX3000-51-4A SUP/EXH block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

-52-1A SX5000-52-1A For D side End block assembly L SX3000-53-1A SX5000-53-1A For U side 5 Connector box VZ3000-106-1A For 24VDC only 6 Rail stopper TXE1-SMC Maybe by Kasuga Electric Works SY3000-43-1ASY000-43-2AType D, 2 to 8 stations Type u, 9 to 16 stations SY3000-43-2ASY3000-43-3AType D, 9 to 16 stations Type u, 2 to 8 stations 7 Connector assembly SY3000-43-1NASY3000-43-2NAType D, 2

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

operating pressure range MPa 2 position single 2 position double 3 position 2 to 16 stations Location Direction Base Side C8 (8 One-touch fitting) C10 (10 One-touch fitting) C4 (4 One-touch fitting)/C6 (6 One-touch fitting) A, B port piping specifications Operating pressure range External pilot operating pressure range MPa SX3000 SX5000 SX3000 2 position single Pilot pressure range 2 position

Serial Network

Over-current protection of input blocks (mechanical fuse) 2.

Ejector Valve Unit Series ZYY/ZYX 1

Silencer (AN203-KM81 pc) 51 26 16 2.

Ejector Valve Unit Series ZYY/ZYX

Note 2) V, S and R specifications are 45T, 45T1.

Made to Order

D-M9BW: 2 pcs.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

0 #4 #3 $7 #7 @4 q i @8 $6 @7 $2 @0 $8 #8 $5 $0 #0 #1 @6 @2 $4 #9 @9 $6 @1 $2 @5 !3 $3 !9 $1 #5 #2 !2 #6 A @3 A Section A-A !7 !8 t !7 Enlarged drawing of shim part !6 y !

SZ3000

Clip SX3000-115-2 1-3-16 17 Cassette Type Manifold Plug-in Type Series SZ3000 JIS Symbol SZ3A60 [N.C. valve x 2 pcs.] 4 position dual 3 port valve r t !0 !

SZ3000

0 (A) 4 (B) 2 (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i JIS Symbol 2 position double with back pressure check valve 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 e w t y q o r u !

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) 7.6 Connector case attachment lever (both sides) (3.2) 101.2

Table of Contents

mounting screw 2 2 2 2 2 Block mounting screw Chrome steel/Nickel plated 2 2 2 2 Chrome steel/Nickel plated Screw for mounting rail 2 2 2 2 2 Chrome steel/Nickel plated Switch mounting screw 2 2 2 2 2 Carbon steel/Nickel plated Hexagon nut 2 2 2 Hexagon socket head plug Chrome steel/Nickel plated Note 1) mark indicates strokes.

REC

2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

REC

20 8 21 215 M26 X 1.5 25 150 to 700 146 20 8 25 219 M26 X 1.5 32 150 to 1000 159 20 8 25 232 M32 X 2 40 200 to 1000 181 23 10 27 264 4.9-10 Sine Cylinder Series REC REC F/Front flange H2 2-Rc(PT)P Width across flatsB2 2-NN G G I H1 Width across flatsB1 Relieving port M5 X 0.8 Standard port Relieving port MK/MK2 2-Eh8 FY D B RSQ/RSG MM AL 4-7 lNA FT RSH K A FX FZ Mounting hole F N N Z CE1

Ejector Valve Unit, Series ZYY/ZYX

Part No. of solenoid for SY3000/SX3000 2.