Modular F.R.L. Units

Note 2) When the compressor oil mist discharge concentration is 30 mg/m3 (ANR).

ATX-OM-F003E

Ammonium ions (mg/L) 1.0 or less 0.1 or less 1.0 or less Residual chloride (mg/L) 0.3 or less 0.3 or less 0.3 or less Free carbon dioxide (mg/L) 4.0 or less 4.0 or less 4.0 or less Stability index 6.0 to 7.0 or less HAW Series 13 8. Water quality standard of cooling water ATX-OM-F003E Water Cooled Aftercooler 8.

IDX-OM-M051

Acid consumption [pH4.8](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L)

IDX-OM-Z004

/L) 200 50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2

IDX-OM-Y002

Ammonium ion (mg/L) 1.0 or less 0.1 or less 1.0 or less Residual choride (mg/L) 0.3 or less 0.3 or less 0.3 or less Free carbon dioxide (mg/L) 4.0 or less 4.0 or less 4.0 or less Stability index 6.0~7.0 or less The water that passes through the water-cooled condenser is referred to as cooling water.

IDX-OM-P023E

](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L) Shall not be detected.

IDX-OM-P026E

](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L) Shall not be detected.

Made to Order

Width across flats MG MB series MN (mm) Bore size (mm) MG 17 19 24 24 27 32 MH 44 48 53 53 72 75 MI 23 32 38 38 45 55 MK 9 10 13 13 14 17 ML 20 22 24 24 32 35 MN M8 x 1.25 M10 x 1.25 M14 x 1.5 M14 x 1.5 M16 x 1.5 M20 x 1.5 ZZ 175 183 205 205 258 261 32 40 50 63 80 100 MI MK 4 H1 ML + Adjustment Stroke MH + Stroke + Adjustment ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) Width across

Modular F.R.L. Units

/m3 (ANR) ( 0.8 ppm) 2 3 AFD20-A to AFD40-06-A Max. 0.1 mg/m3 (ANR) (Before saturated with oil 0.01 mg/m3 (ANR) or less 0.008 ppm) 2 3 Rated flow [L/min (ANR)] 1 AFM20-A to AFM40-06-A 200 450 1100 AFD20-A to AFD40-06-A 120 240 600 Drain capacity [cm3] 8 25 45 Bowl material Polycarbonate Bowl guard Semi-standard (Steel) Standard (Polycarbonate) Weight [kg] 0.09 0.19 0.38 0.43 1 Conditions

CXT

MXF Calculation of resistance force f MXW San 1 (L/GP)2 (provided that L>GP) MXP Calculation of theoretical output F MG L (mm) W MGP Refer to the table of theoretical output on p.3.8-3.

MGC

MXP MG : Kinetic energy (J) : Weight of load (kg)+Weight of moving section (kg) : Piston speed (m/s) Ek = n2 M 2 EK M n MGP MGQ MGG OUT IN Theoretical Force Unit: N MGC Operating pressure (MPa) Bore size (mm) Piston rod dia.

Process Pump

discharge oil mist concentration is 30 mg/m3 (ANR).

Clean Room Rodless Cylinder Series CYP ø15, ø32

CY MG Bore size 15 32 15 mm 32 mm CX Auto switch Nil Without auto switch DFor the applicable auto switch model, refer to the table below.

Guide Table Series MGF ø40, ø63, ø100 1

MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DMounting height -X Reduction by 15 to 20% (Compared to SMC Series MGQ) 20Data Guide table Series MGF 40, 63, 100 Built-in non-rotating mechanism Internal guide pin prevents rotation.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size 15 32 15 mm 32 mm CX Auto switch Nil Without auto switch DFor the applicable auto switch model, refer to the table below.

MXF

MX MTS MY CY MG Low-profile and compactness have been achieved with the construction of guide and cylinder aligned in parallel.

Valve Mounting: 2 (Quick disconnect Type), Filter: w/o Filter, Flow Rate/Operating Frequency: C (Flow 50 L/min; Power 10W; Max. Op Frequency 550Hz), Lead Wire: G (300 mm)

Valve Mounting: 2 (Quick disconnect Type), Filter: w/o Filter, Flow Rate/Operating Frequency: D (Flow 50 L/min; Power 4W; Max. Op Frequency 350Hz), Lead Wire: H (500 mm)

Valve Mounting: 2 (Quick disconnect Type), Filter: w/o Filter, Flow Rate/Operating Frequency: H (Flow 100 L/min; Power 4W; Max. Op Frequency 200Hz), Lead Wire: G (300 mm)

Valve Mounting: 2 (Quick disconnect Type), Filter: w/o Filter, Flow Rate/Operating Frequency: A (Flow 50 L/min; Power 80W; Max. Op Frequency 1200Hz), Lead Wire: H (500 mm)