Compatible Fluid: Air, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Multi-Port, Connection Type: Others, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Response Time: 1 msec. or Less, Acquired Standards: CE, Pipe opening type (details): Quick mount (ø6.9), Voltage

Compatible Fluid: Air, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Multi-Port, Connection Type: Others, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Response Time: 1 msec. or Less, Acquired Standards: CE, Pipe opening type (details): Quick mount (ø6.9), Voltage

Compatible Fluid: Air, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Multi-Port, Connection Type: Others, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Response Time: 1 msec. or Less, Acquired Standards: CE, Pipe opening type (details): Quick mount (ø6.9), Voltage

Compatible Fluid: Air, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Multi-Port, Connection Type: Others, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Response Time: 1 msec. or Less, Acquired Standards: CE, Pipe opening type (details): Quick mount (ø6.9), Voltage

Compatible Fluid: Air, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Multi-Port, Connection Type: Others, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Response Time: 1 msec. or Less, Acquired Standards: CE, Pipe opening type (details): Quick mount (ø6.9), Voltage

Compatible Fluid: Air, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Multi-Port, Connection Type: Others, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Response Time: 1 msec. or Less, Acquired Standards: CE, Pipe opening type (details): Quick mount (ø6.9), Voltage

Compatible Fluid: Air, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Multi-Port, Connection Type: Others, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Response Time: 1 msec. or Less, Acquired Standards: CE, Pipe opening type (details): Quick mount (ø6.9), Voltage

Compatible Fluid: Air, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Multi-Port, Connection Type: Others, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Response Time: 1 msec. or Less, Acquired Standards: CE, Pipe opening type (details): Quick mount (ø6.9), Voltage

Compatible Fluid: Air, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Multi-Port, Connection Type: Others, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Response Time: 1 msec. or Less, Acquired Standards: CE, Pipe opening type (details): Quick mount (ø6.9), Voltage

CG5-S

R V Integral clevis type (E)/CG5ENS ZZ + Stroke CD hole H10 Shaft d9 L M GA GB RR U CX LL 2-Rc P H1 Width across flats B1 LY CI D I MM AL A K LH LE KA 4-J LT C 0.1 NA LF LP LG S + Stroke Z + Stroke LZ + Stroke LV LX H 4-LD (mm) Stroke range A Bore size (mm) AL B1 C CD (hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U +0.058 0 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.3 0 0.3 20 8 16 to

21

NT-02 NT-03 NT-04 Applicable bore size 20 25, 32 40 13 15.0 12.5 M8 x 1.25 5 LF LE LY LG 17 19.6 16.5 M10 x 1.25 6 LD 22 25.4 21.0 M14 x 1.5 8 Applicable bore size LH LR LC LD LE LF LG Part no. L Mounting Nut (mm) CM-E020B CM-E032B 20, 25 32, 40 30 10 8 6.8 22 15 30 24.5 Material: Iron 40 13 10 9 25 15 40 34 d Applicable bore size Part no. Included pin part no.

Compact Cylinder with Air Cushion Series RQ

to 100 LX LZ 4 x LD Y X Y X LS + Stroke A + Stroke LG LT Foot bracket material: Carbon steel Surface treatment: Nickel plated Bore size (mm) LY LX LZ X Y 63 95 91.5 113 16.2 9 Rod end male thread 80 118 114 140 19.5 11 100 137 136 162 23 12.5 Rod end nut L1 Rod Side Flange Style mm Rod side flange style: RQF/RDQF Stroke range (mm) Bore size (mm) FD FT FV FX FZ L L1 M A B 63 9 9 80 92 108

CG5-S

R V Integral clevis type (E)/CG5ENS ZZ + Stroke CD hole H10 Shaft d9 L M GA GB RR U CX LL 2P H1 Width across flats B1 LY CI D I MM AL A K LH LE KA 4-J LT C 0.1 NA LF LP LG S + Stroke Z + Stroke LZ + Stroke LV LX H 4-LD (mm) Stroke range A Bore size (mm) AL B1 C CD (hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U +0.058 0 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.3 0 0.3 20 8 16 to 200

AC Servo Motor Driver (SSCNET /H Type)

(Note 14) RLS DI2 12 RA3 DOG DI3 19 5 DICOM Encoder A-phase pulse (differential line driver) 6 LA (Note 10) 24 V DC 16 LAR 10 DICOM 7 LB Encoder B-phase pulse (differential line driver) Personal computer Setup software (MR Configurator2TM) USB cable (Note 5) MR Configurator2 17 LBR MR-J3USBCBL3M LEC-MR-J3USB 8 LZ Encoder Z-phase pulse (differential line driver) (option) 18 LZR CN5 + 11 LG

Electric Actuator/Slider Type

Analog monitor 1 4 MO1 10 VDC 1 LG Servo system controller Analog monitor 2 14 MO2 10 VDC SSCNET III optical cable Note 5) (Option) CN1A Plate SD 2 m or less SW1 CN1B SW2 Note 7) 3 1 2 4 Note 1) PE LECSS2-T Note 6) (Axis 2) CN1A SW1 Note 1) For preventing electric shock, be sure to connect the driver,s protective earth (PE) terminal (marked ) to the control panel,s protective earth (PE).

CG5-S

B1 20 14 12.7 11.0 25.4 4.0 1/4-28 122.4 131.4 143.4 LY 25 14 12.7 12.6 28.4 4.8 5/16-24 125.4 134.4 146.4 32 21 19 17.3 41.4 6.4 7/16-20 142.4 153.4 171.4 CI D I 40 19 16.6 17.3 41.4 6.4 7/16-20 150.4 161.4 179.4 MM AL A K LH LE 50 22.4 19.8 18.8 52.6 7.9 1/2-20 183.6 198.6 218.6 KA 4-J LT C0.1 63 22.4 19.8 18.8 52.6 7.9 1/2-20 183.6 198.6 218.6 NA S + Stroke Z + Stroke LZ + Stroke LP LG

CJ5-S

RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LF LP LG LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2

Compact Cylinder with Air Cushion

Add the stroke to calculate the length of intermediate strokes. 7 Compact Cylinder with Air Cushion Series RQ Mounting Bracket Dimensions Foot type Foot type/RQL, RDQL mm B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 20 to 100 32 37 6.6 61.2 21 17 38.5 20 to 100 40 44 6.6 68.2 28 17 38.5 Special cap bolt LH LY 30 to 100 50 49.5 9 75.7 26.5 18 43.5 mm LX X X LG Y Y Bore size

CJ5-S

RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LP LG LF LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2

RQ

Add the stroke to calculate the length of intermediate strokes. 7-7-12 12 Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod Mounting Bracket Dimensions Foot Style Foot style: RQL/RDQL B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD LG LH LT 63 81.2 55 29 18 43.5 11 5 46 3.2 30 to 100 Special cap bolt LH LY 80 95 63.5 33.5 20 53.5 13 7 59 4.5 40 to 100 100