ZP

H: M8 x 1 Model A B C K L Y D E G D E G H: M5 x 0.8 H: M6 x 1 G I G I ZF ZPT20B 20 25 22 27 ZPT06B 6 8 7 9 3.3 4.7 9.1 10.1 2.5 3 20 7 4 21 8 4 ZPT08B 49.5 50 55 ZPT32B 23.5 24 29 28.5 29 34 54.5 55 60 33.5 34 39 12.4 15.6 25 28 10.5 10.5 14 3 25 8 3.5 15 12 ZPT25B 32 34 18.9 37 ZP ZCU AMJ 10, 13, 16 Size 40, 50 Size Bellows Bellows Misc.

KJ

Body size KK3P-50N KKH3S-50N 5/8 5/8 -60N -60N 6/9 6/9 1/8 1/8 -65N -65N 6.5/10 6.5/10 KK4P-50N KKH4S-50N 5/8 5/8 -60N -60N 6/9 6/9 -65N -65N 6.5/10 6.5/10 1/4 1/4 -80N -80N 8/12 8/12 -85N -85N 8.5/12.5 8.5/12.5 Series KKH are only available as sockets.

Air Cylinder

1 !5 u !9 t !4 w !7 @0 e r y @1 q i !6 !3 !0 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Note Bore size (mm) Kit no.

Basic type / Direct mount type Series CY3B/CY3R

9 #8!0!2!6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

MXQ

1 !9 !0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

KQ2

13.5 10.5 13.5 11 17.5 14.5 11.5 7 1 8 15.5 2.5 1 4 1 8 10 6 5 32 16 3 1 4 10 Applicable tubing 1 8 1 4 7 3 16 16 3.5 9 1 8 14.29 12.7 9 1 4 3 8 1 4 17 4.6 11 17.46 16 1 8 15.5 20.5 12 14.29 1 4 3 8 5 16 18.5 6 9 13.5 17.46 16 Connection thread 1 4 19 17.46 22 28 3 8 1 2 3 8 21 7 16 14 22 22.23 30 22.5 24 28.5 30 1 4 33 9 3 8 1 2 22.23 22 9.6 30 1 2 17 25 28 Reference dimensions after Uni

CNA

1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL MLGC CNA CB #1 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !9 @2 @6 $2 @3 !4 %0 !3 #9 CV/MVG A section (Release piston bushing) B section (Piston guide bushing) CXW 100 80 63 50 40 50, 63, 80, 100 CXS @9 CXT !2 !2 MX Description Material Note Component Parts Description Material Note Component Parts MXU No. No.

Cylinder with Lock

1 !5 !6 @5 @8 @9 #6 r #3 #4 o q$6y#9 #1 $4 #0 B A w !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 @7 #5 @2 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

axis number selection Control setting switch rotary axis No. setting switch rotary axis No. switch switch 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 4 10 4.

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

CM2

Y-020B Y-032B Y-040B size +0.2 +0.1 9 18 Type C 9 for axis 46 9 CDP-1 16 20 25 36 M8 x 1.25 5 14 +0.2 +0.1 25, 32 9 18 Type C 9 for axis 48 9 CDP-1 18 20 25 38 M10 x 1.25 5 14 +0.3 +0.1 40 16 38 68 12 3 x 18l CDP-3 22 24 49.7 55 M14 x 1.5 13 25 Clevis pin and snap ring (cotter pin for 40) are attached.

4/5 Port Solenoid Valve

0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct by

Air Slide Table Series MXQ

Graph (2) Allowable Moment Coefficient: $/0 1 $/0 2 $/0&* $/0&1 $/0*' $/0*. 1 + &'(. &) &1(. &,(. &1 &-(. *)(. ,' ,+ &,(. &1 &-(. *)(. ,' ,+ 1 + &'(. &) &1(. &(' 9 '(+ '(. ; # 3 * ) . 1 ( Table (4) Maximum Allowable Moment: Mmax (Nm) '() 8!

LJ1H

Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover R Motor cover L Auto switch Magnet Brake Material Note 100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.

MY1

A B MY-S32 45 64 11.7 6 11 6.6 M8 x 1.25 A B MY-S50 55 80 14.8 8.5 14 9 M10 x 1.5 A B MY-S63 70 100 18.3 10.5 17.5 11.5 M12 x 1.75 Side support A MY-S16A SMY1B16, #5 (#1 + #5 + #7) MY-S20A SMY1B20, #7 (#1 + #7 + #9) For 25 to 63 MY-S Bore size A SMY1B Bore size , #8 (#1 + #8 + #10) Side support B MY-S16B SMY1B16, #6 (#1 + #6 + #7) MY-S20B SMY1B20, #8 (#1 + #8 + #9) For 25 to 63 MY-S Bore

AC

gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140

Air cylinder

Description Qty 1 Rod cover 1 14 Wear ring 1 2 Head cover 1 15 Rod seal 1 3 Cylinder tube 1 16 Piston seal 1 4 Piston rod 1 17 Cushion seal A 1(2) 5 Piston 1 18 Cushion seal B 1(0) 6 Cushion ring A 1(2) 19 Cushion valve seal 2 7 Cushion ring B 1(0) 20 Cylinder tube gasket 2 8 Bushing 1 21 Bumper A 1(2) 9 Cushion valve 2 22 Bumper B 1(0) 10 Tie rod 4 23 Rod end nut 1 11 Tie rod nut 4 24 Magnet

Floating Joint

40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 9 9 13 13 13 15 15 18 24 24 24 42 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3

C95

Ball retainer Brake shoe Brake spring Brake shoe holder Taper ring Air pressure Exhaust Air pressure supply Lock switch lever Brake piston Locked condition Unlocked condition 1.11-24 Series C95N Construction #3 $9 !3!4 @3 #5 t @7 $5 !5 @4!8@0!7!9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!