Free Mount Cylinder

9, @0, @1. Seal kit includes !9, @0, @1.

Compact 5-Port Solenoid Valve

) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) () () () () () () () () (+) (+) (+) (+) (+) (+) (+) (+) () () () () () () () () () () () () () () () () 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 8 7 6 5 4 3 2 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Station 1 Station 1 Station 1 Station 2 Station 2 Station 2 Station 3 Station 3 Station 3 Station 4 Station 4 Station 4 COM. (+) 9

MNB

41 16 114 189 89 30 20 19 37.5 26 116 20 17 177 37 1/4 170 96 26 Bore size (mm) LD T N P S V LH LS LT LX LY LZ K MM Q H VA W X Y ZZ J 32 34 27 1/8 154 6.5 7 30 198 3.2 32 57 50 6 M10 x 1.25 37 47 13 6.5 22 9 232 M6 x 1.0 40 39.5 27 1/4 161 8 9 33 209 3.2 38 64.5 55 6 M14 x 1.5 41.5 51 16.5 9 24 11 247 M6 x 1.0 50 47 31.5 1/4 183 9 9 40 237 3.2 46 77.5 70 7 M18 x 1.5 47.5 58 20 10.5 27 11

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

CG1

2 2 2 2 3 3 24 29 35.5 44 55 69 80 100 12 14 18 25 30 32 40 50 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 77 77 79 87 102 102 122 122 15.5 19.5 19.5 27 32 32 37 37 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 18 22 22 30 35 35 40 40 5 5.5 5.5 6 7 7 10 10 20

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

ZP

H: M8 x 1 Model A B C K L Y D E G D E G H: M5 x 0.8 H: M6 x 1 G I G I ZF ZPT20B 20 25 22 27 ZPT06B 6 8 7 9 3.3 4.7 9.1 10.1 2.5 3 20 7 4 21 8 4 ZPT08B 49.5 50 55 ZPT32B 23.5 24 29 28.5 29 34 54.5 55 60 33.5 34 39 12.4 15.6 25 28 10.5 10.5 14 3 25 8 3.5 15 12 ZPT25B 32 34 18.9 37 ZP ZCU AMJ 10, 13, 16 Size 40, 50 Size Bellows Bellows Misc.

KJ

Body size KK3P-50N KKH3S-50N 5/8 5/8 -60N -60N 6/9 6/9 1/8 1/8 -65N -65N 6.5/10 6.5/10 KK4P-50N KKH4S-50N 5/8 5/8 -60N -60N 6/9 6/9 -65N -65N 6.5/10 6.5/10 1/4 1/4 -80N -80N 8/12 8/12 -85N -85N 8.5/12.5 8.5/12.5 Series KKH are only available as sockets.

Air Cylinder

1 !5 u !9 t !4 w !7 @0 e r y @1 q i !6 !3 !0 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Note Bore size (mm) Kit no.

Basic type / Direct mount type Series CY3B/CY3R

9 #8!0!2!6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

MXQ

1 !9 !0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

KQ2

13.5 10.5 13.5 11 17.5 14.5 11.5 7 1 8 15.5 2.5 1 4 1 8 10 6 5 32 16 3 1 4 10 Applicable tubing 1 8 1 4 7 3 16 16 3.5 9 1 8 14.29 12.7 9 1 4 3 8 1 4 17 4.6 11 17.46 16 1 8 15.5 20.5 12 14.29 1 4 3 8 5 16 18.5 6 9 13.5 17.46 16 Connection thread 1 4 19 17.46 22 28 3 8 1 2 3 8 21 7 16 14 22 22.23 30 22.5 24 28.5 30 1 4 33 9 3 8 1 2 22.23 22 9.6 30 1 2 17 25 28 Reference dimensions after Uni

CNA

1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL MLGC CNA CB #1 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !9 @2 @6 $2 @3 !4 %0 !3 #9 CV/MVG A section (Release piston bushing) B section (Piston guide bushing) CXW 100 80 63 50 40 50, 63, 80, 100 CXS @9 CXT !2 !2 MX Description Material Note Component Parts Description Material Note Component Parts MXU No. No.

Cylinder with Lock

1 !5 !6 @5 @8 @9 #6 r #3 #4 o q$6y#9 #1 $4 #0 B A w !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 @7 #5 @2 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

axis number selection Control setting switch rotary axis No. setting switch rotary axis No. switch switch 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 4 10 4.

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

CM2

Y-020B Y-032B Y-040B size +0.2 +0.1 9 18 Type C 9 for axis 46 9 CDP-1 16 20 25 36 M8 x 1.25 5 14 +0.2 +0.1 25, 32 9 18 Type C 9 for axis 48 9 CDP-1 18 20 25 38 M10 x 1.25 5 14 +0.3 +0.1 40 16 38 68 12 3 x 18l CDP-3 22 24 49.7 55 M14 x 1.5 13 25 Clevis pin and snap ring (cotter pin for 40) are attached.

4/5 Port Solenoid Valve

0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct by