MY1

5.5 16 24.5 54 9.5 M6 x 1 5.6 110 55 42 9 M5 x 0.8 30 20 MY1B25 40.5 2 M5 x 0.8 9 39 53 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 52 12 M6 x 1 37 25 MY1B32 50 2 M5 x 0.8 10 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 64 12 M6 x 1 45 30.5 MY1B40 63 2 M6 x 1 13 61.5 75 (mm) PC PD T VV XX YH YW Z ZZ P PA PB Q PP QW QQ RR SS TT UU WW Model Rc 1/8 60 30 206 12 42 16 16 6 14.5 15 12.5

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Table of Contents

ZR1 W 20 S 1 Ejector exhaust Nozzle diameter 2 Individual exhaust 1 Built-in silencer 10 13 1.0 mm 1.3 mm Port size: RC 1/8 (Nozzle dia. 1.0 to 1.5 mm) RC 1/4 (Nozzle dia. 1.8, 2.0 mm) 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum pressure S L 84 kPa 53 kPa 13-3-9 9 Series ZR Ejector Unit/Standard Type (S): Max.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

125 22H9 38 6.5 140 112 42 34 35.5 35 27 19 16 M14 x 2 27 55 34 M27 x 2 35 32 1/2 77 26 137 80 160 25H9 42 9 174 140 55 43 45 38 36 22 18 M16 x 2 28 65 38 M33 x 2 40 36 3/4 94 30 155 100 (mm) Without rod boot With rod boot Bore size (mm) T l U V W H Z ZZ e f h Z ZZ 40 11 18 7.5 8 66 204 219 55 25 92 230 245 50 11 21 10 9 73 220 238 60 28 99 246 264 1/4 stroke 63 11 23 12 10 80 236 258 65

Free Mount Cylinder

9, @0, @1. Seal kit includes !9, @0, @1.

Compact 5-Port Solenoid Valve

) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) (+) () () () () () () () () (+) (+) (+) (+) (+) (+) (+) (+) () () () () () () () () () () () () () () () () 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 8 7 6 5 4 3 2 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Station 1 Station 1 Station 1 Station 2 Station 2 Station 2 Station 3 Station 3 Station 3 Station 4 Station 4 Station 4 COM. (+) 9

MNB

41 16 114 189 89 30 20 19 37.5 26 116 20 17 177 37 1/4 170 96 26 Bore size (mm) LD T N P S V LH LS LT LX LY LZ K MM Q H VA W X Y ZZ J 32 34 27 1/8 154 6.5 7 30 198 3.2 32 57 50 6 M10 x 1.25 37 47 13 6.5 22 9 232 M6 x 1.0 40 39.5 27 1/4 161 8 9 33 209 3.2 38 64.5 55 6 M14 x 1.5 41.5 51 16.5 9 24 11 247 M6 x 1.0 50 47 31.5 1/4 183 9 9 40 237 3.2 46 77.5 70 7 M18 x 1.5 47.5 58 20 10.5 27 11

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

ZP

H: M8 x 1 Model A B C K L Y D E G D E G H: M5 x 0.8 H: M6 x 1 G I G I ZF ZPT20B 20 25 22 27 ZPT06B 6 8 7 9 3.3 4.7 9.1 10.1 2.5 3 20 7 4 21 8 4 ZPT08B 49.5 50 55 ZPT32B 23.5 24 29 28.5 29 34 54.5 55 60 33.5 34 39 12.4 15.6 25 28 10.5 10.5 14 3 25 8 3.5 15 12 ZPT25B 32 34 18.9 37 ZP ZCU AMJ 10, 13, 16 Size 40, 50 Size Bellows Bellows Misc.

KJ

Body size KK3P-50N KKH3S-50N 5/8 5/8 -60N -60N 6/9 6/9 1/8 1/8 -65N -65N 6.5/10 6.5/10 KK4P-50N KKH4S-50N 5/8 5/8 -60N -60N 6/9 6/9 -65N -65N 6.5/10 6.5/10 1/4 1/4 -80N -80N 8/12 8/12 -85N -85N 8.5/12.5 8.5/12.5 Series KKH are only available as sockets.

MXQ

1 !9 !0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

CM2

Y-020B Y-032B Y-040B size +0.2 +0.1 9 18 Type C 9 for axis 46 9 CDP-1 16 20 25 36 M8 x 1.25 5 14 +0.2 +0.1 25, 32 9 18 Type C 9 for axis 48 9 CDP-1 18 20 25 38 M10 x 1.25 5 14 +0.3 +0.1 40 16 38 68 12 3 x 18l CDP-3 22 24 49.7 55 M14 x 1.5 13 25 Clevis pin and snap ring (cotter pin for 40) are attached.

LJ1H

Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover R Motor cover L Auto switch Magnet Brake Material Note 100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.

MY1

A B MY-S32 45 64 11.7 6 11 6.6 M8 x 1.25 A B MY-S50 55 80 14.8 8.5 14 9 M10 x 1.5 A B MY-S63 70 100 18.3 10.5 17.5 11.5 M12 x 1.75 Side support A MY-S16A SMY1B16, #5 (#1 + #5 + #7) MY-S20A SMY1B20, #7 (#1 + #7 + #9) For 25 to 63 MY-S Bore size A SMY1B Bore size , #8 (#1 + #8 + #10) Side support B MY-S16B SMY1B16, #6 (#1 + #6 + #7) MY-S20B SMY1B20, #8 (#1 + #8 + #9) For 25 to 63 MY-S Bore

AC

gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140

Floating Joint

40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 9 9 13 13 13 15 15 18 24 24 24 42 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3