2/3 Port Valve

55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

Proposals for Energy Saving

1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Fluoropolymer Piping Equipment

3/8" 3/4" 1/2" 20 29 24 17 26 21 44 54 49 23 39 28 5.8 LQ1T5A-R32 1/4" 3/4" 1/4" 39.5 20 36 17 46.5 55 46.5 49 23 3.6 LQ1T6A-R2 1" 1/2" 1" 8 39.5 24 20 20 29 14 28 TD TID 7 TH TIH 9 LQ1T6A-R3 1" 3/8" 1" 5.8 LQ1T6A-R4 1" 1/4" 1" 20 17 55 47.5 55 23 3.6 LQ1T6A-R5 3/4" 1" 1" 8 39.5 18 36 36 69.5 69.5 69.5 49 15 LQ1T6A-R6 1/2" 1" 1" 24 21 54.5 28 9 LQ1T6A-R7 3/4" 3/4" 1" 39.5 36 69.5

Model: 1000 (SV1000), Valve Manifold Stations: 9

Model: SV1000, Valve Manifold Stations: 19

Model: SV1000, Valve Manifold Stations: 2

Model: SV1000, Valve Manifold Stations: 9

Model: SV1000, Valve Manifold Stations: 15

Model: SV1000, Valve Manifold Stations: 7

Model: SV1000, Valve Manifold Stations: 8

Model: SV1000, Valve Manifold Stations: 16

Model: SV1000, Valve Manifold Stations: 10

Model: SV1000, Valve Manifold Stations: 6

Model: SV1000, Valve Manifold Stations: 12

Model: SV1000, Valve Manifold Stations: 4

Model: SV1000, Valve Manifold Stations: 17

Model: SV1000, Valve Manifold Stations: 3

Model: SV1000, Valve Manifold Stations: 18

Model: SV1000, Valve Manifold Stations: 5