CNA

8 1/8 44 16 32 10 9 12 60 80 42 100 85 15 52 16 12 12 10 8 Up to 500 35 32 70 27 81 108 1/4 1/8 52 20 40 10 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30

MXS Series Air Slide Table

+0.030 0 N 4-M4 X 0.7 thread 6 deep 16 -1 x F 2 2-M5 X 0.8 thread 8 deep 4H9 3.5 deep +0.030 0 8 M 0.5 28.5 32 Z ZZ (NN-1) x H G H 18.5 8.5 8.5 18.5 A B 4.2 8.5 9 9 20 1 5 4H9 3.5 deep +0.030 0 NN-M5 X 0.8 thread 10 deep 4H9 3.5 deep +0.030 0 A B HA GA Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 GA 15 15 15 42 51 61 111 KA NA 2 2 2 2 2 4 4 Z 70 70 70 82 102 148 202

Table of Contents

VS4040-S-03 VS4040-S-04 DXT131-15P-06 DXT131-15P-10 DXT132-15-2P-12 DXT132-15-2P-14 XT021-9 DXT132-16 M6 x 25 with washer M8 x 35 3 8 1 2 3 4 VP450 Aluminum alloy Sub-plate !0 1 1 VP470 1 1 4 1 2 VP450 VP470 VP450 VP470 in part numbers are the same symbol for the thread type in How to Order. Gasket !1 Hexagon socket head screw VT3112-00G !2 Thread for mounting valve.

KJ

26 Applicable tubing 15 20.5 24.5 14.5 15 20.5 24.5 26.5 4 10.4 16 3.4 3.4 17 1 8 1 4 32 34 10 14 10 18 18.5 M5 x 0.8 M6 x 1.0 3.4 3.4 8 27.5 8 Connection thread 6 17 1 8 12.8 33 35 36.5 10 14 17 12 14 17 8.7 6.9 1 4 10 18 3 8 1 8 22 26 28 37 39 41 1 4 20.5 18.5 8 15.2 12 19.7 19.7 3 8 Applicable tubing 1 8 24 27 29 33 27.5 29.5 33.5 32 35 42 43.5 45 47.5 45.5 47.5 49.5 55 56.5 1

MXS

4.2 CY1 A B 18.5 8.5 8.5 18.5 H MY1 (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 M 71 71 71 83 103 149 203 GA 15 15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA

Free Mount Cylinder

(mm) 15 10 5 15 10 5 15 10 5 15 10 5 6 67 62 52 67 62 52 57 52 47 57 52 47 42 42 9 8 10 80 65 55 80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same

Compact 5-Port Solenoid Valve

(Station n1) (Station 1) (Station n2) 1 1 37.4 PV PV 10.9 E 3/5 E 3/5 79 PD PD D D 66 62 S 2 B 2 B 2 B 2 B 2 B 53 45.9 P 1 P 1 38.1 38 8.4 26.4 23.9 17.1 V V V V 4 A 4 A 4 A 4 A 4 A One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 (SMC) 15.8 17.3 3.5 (11.8) (For DIN rail mounting) (7.5) P = 15 18 15 15 (Pitch) P = 11.5 One-touch fitting [4(A), 2(B) port] One-touch fitting

MY1

5.6 110 55 42 9 M5 x 0.8 30 20 MY1B25 40.5 2 M5 x 0.8 9 39 53 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 52 12 M6 x 1 37 25 MY1B32 50 2 M5 x 0.8 10 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 64 12 M6 x 1 45 30.5 MY1B40 63 2 M6 x 1 13 61.5 75 (mm) PC PD T VV XX YH YW Z ZZ P PA PB Q PP QW QQ RR SS TT UU WW Model Rc 1/8 60 30 206 12 42 16 16 6 14.5 15 12.5 MY1B25 55 6 10 16 28 38.5

2/3 Port Valve

55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

CHKD/CHKG

8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

20 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, 20+55 n=2, 4, 6, 8, 90+55 (n4) 2 n=4, 8, 12, 16, (n2) 2 D-A59W n (Same side) 1.16 (1.21) 1.79 (1.84) 2.79 (2.83) 4.88 (5.03) 7.17 (7.38) Double clevis 90 100 110 120 15 1 2 (Dif. / same side(s)), 1 D-F5W, J59W D-F5BAL

CL

CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

CLS

15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80 D-Y59/Y7P D-Y7W 115 115 110 105 15 RLQ 1, 2 MLU D-Y69/Y7PV D-Y7WV 100 100 95 90 10 ML1C D-Y7BAL 125 125

CM2

20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23 24 14 54 4 30 55 88 21 22 41 8 10 46.5 7 7 134

Brake mechanism added

90 (n = 2, 4, 6, 8 ) Note 1) 90 + 55 (n = 4, 8, 12, 16 ) Note 2) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 20 + 55 (n 2) 2 (n 4) 2 D-A59W n (Same surface) 1 100 110 120 15 90 2 (Different surfaces, Same surface) 1 120 130 140 25 110 D-F5NT (n = 2, 4, 6, 8 ) Note 1) 110 + 55 (n = 4, 8, 12, 16

2–4

5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

MNB

(different sides or same side) Reed switch Solid state switch D-A5, D-A6 15 20 1 pc. 2 pcs. (different sides or same side) 20 D-A59W 25 15 1 pc. 2 pcs. (different sides or same side) 15 25 D-F5, J5 10 1 pc. 2 pcs. (different sides or same side) 15 25 D-F5NTL 10 1 pc. D-F5W D-J59W D-F5BAL D-F5F D-F5LF 2 pcs.

MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.