CLQ

Bore size (mm) T1 M F E D B T2 Part no. 42 50 62 76 6 8 10 12 16 20 25 30 6.8 9 11 14 18 20 26 31 6.5 6.5 8.5 10.5 10 12 16 18 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 YA 03 Applicable cylinder bore size 32, 40 50, 63 80 100 03 05 08 10 Mounting bracket Bore size (mm) W V U Weight (g) Part no.

Compact Cylinder with Lock Series CLQ

Bore size (mm) T1 M F E D B T2 Part no. 42 50 62 76 6 8 10 12 16 20 25 30 6.8 9 11 14 18 20 26 31 6.5 6.5 8.5 10.5 10 12 16 18 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 YA 03 Applicable cylinder bore size 32, 40 50, 63 80 100 03 05 08 10 Mounting bracket Bore size (mm) W V U Weight (g) Part no.

CLQ

MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YA 03 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 42 50 62 76 6 8 10 12 16 20 25 30 6.5 6.5 8.5 10.5 6.8 9 11 14 18 20 26 31 10 12 16 18 CNA Applicable air cylinder bore CNS 03 05 08 10 32, 40 50, 63 80 100 Mounting

0.4

How to Order Manifold VV5Q 1 1 08 C6 FU1 CE-compliant Series Nil CE-compliant VQ1000 1 Q Note) For CE-compliant models, DC-type only.

AC Servo Motor Driver (Network card type ）

When the movement is returned at the stroke end 18 81 18EtherCAT COMMUNICATION (i) Method -10 and -42 (dog type front end reference home position return) The following figure shows the operation of Homing method -10. The operation direction of Homing method -42 is opposite to that of Homing method -10.

VQZ1000/2000/3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil insulation type Equivalent to class B VQZ 24 VDC 1 W DC (42 mA), 0.5 W DC (21 mA) 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Power consumption (Current) VQD 100 VAC Inrush 0.5 VA (5 mA), Holding 0.5 VA (5 mA) 110 VAC Inrush 0.55 VA (5 mA), Holding 0.55

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

. 168 156 0.5 PE 3-M5 screw Screw size: M4 Tightening torque: 1.2 [N m] 42 0.3 Approx. 12 Approx. 6 Mounting hole process drawing 9 4 9.

Table of Contents

60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size H Stroke L Note) Type L is not available for 10.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 10-SS5Y3-41(-Q) 10-SS5Y3-42(-Q) 10-SS5Y5-41(-Q) 10-SS5Y5-42(-Q) 10-SS5Y7-42(-Q) 10-SY340 10-SY540 10-SY740 Single base/B mount Common SUP, Common EXH 2 to 20 stations Note 1) Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations A, B port Location Direction Base Side Porting specifications 1 4 1 4 M5 x 0.8, 1 8 P, EA, EB port

NCG/CG1

42 D-H7NF D-H7C Bore size (mm) Hs 24.5 27 30.5 35 40.5 47.5 A 27.5 27.5 28.5 33 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 27.5 27.5 28.5 31.5 39.5 39.5 B 26 26 27 30 38 38 A 29 29 30 34.5 42 42 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 Operating Range Bore size (mm) Auto switch model 20 D-C7/C80/C73C/C80C D-B5/B64 50 63 25 32 40 9 10 10 11 8 10 D-B59W

Compact Cylinder with Air Cushion

Applicable air cylinder bore size 18 6.8 16 6 42 6.5 10 YA-03 32, 40 20 9 20 8 50 6.5 12 YA-05 50, 63 26 11 25 10 62 8.5 16 YA-08 80 32, 40 50, 63 80 100 03 05 08 10 Mounting bracket 31 14 30 12 76 10.5 18 YA-10 100 A type mounting bracket YA YB YU Bore size (mm) B type mounting bracket Joint Weight (g) W V U Part no. 56 55 18 6 32, 40 YA-03 67 100 22 8 50, 63 YA-05 83 195 28 10 Allowable

RQ

RQ Applicable air cylinder bore YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 YA-08 80 62 10 25 11 26 8.5 16 03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket DYA-10 100 76 12 30 14 31 10.5 18 Type A mounting bracket YA YB YU Bore size (mm) Type B mounting bracket Joint W V U Weight (g) Part no.

13

-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU ZL 15.8 12 31.5 32.8 12 27 35 12 ZY 15.8 12

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Compact Cylinder with Air Cushion Series RQ

YA-03 32, 40 Applicable air cylinder bore 18 6.8 16 6 42 6.5 10 YA-05 50, 63 20 9 20 8 50 6.5 12 YA-08 80 26 11 25 10 62 8.5 16 03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket YA-10 100 31 14 30 12 76 10.5 18 Type A mounting bracket YA YB YU Bore size (mm) Type B mounting bracket Joint W V U Mass (g) Part no. 32, 40 YA-03 56 55 18 6 50, 63 YA-05 67 100 22 8 CUJ 80 YA-08 83 195

LEC-OM07605CN

PE_ _ ]). 5-42 5.2.6 3([Pr. PF_ _ ]). 5-43 5.2.7 4([Pr.

Tie-rod Type Hydraulic Cylinder

B5/B64/B59W Note 1) BD1-10M CHS BA-08 BA-10 BA-05 BA-04 CH2 Note 1) The auto switches listed below cannot be mounted on 63.