Compact Manifold Regulator Series ARM5

19 20 6 6 8, 5/16 8, 5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

smcmaintenancepartslist

8 19 Rod seal NBR Component part numbers: !4, !5, !6, !8. Cushion seal Urethane 17 and 19 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.

Modular F.R.L. Units

19 19 19 19 19 19 14 Without a valve function 15 The combination of metal bowl: 2 and 8 is not available. 16 For pipe thread type: NPT.

Mechanically Jointed Rodless Cylinder Series MY1

Seal belt Dust seal band O-ring Side scraper Scraper Piston seal Cushion seal Tube gasket O-ring MY20-16AStroke MY20-16BStroke 5.1 x 3 x 1.05 MY25-16AStroke MY25-16BStroke 5.1 x 3 x 1.05 MY32-16AStroke MY32-16BStroke 7.15 x 3.75 x 1.7 MY40-16AStroke MY40-16BStroke 8.3 x 4.5 x 1.9 MY50-16AStroke MY50-16BStroke C4 MY63-16AStroke MY63-16BStroke C4 16 17 34 44 19 20 21 22 39 1 1 2 2 2 2 2 2 4

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

Manifold Specifications

For details, refer to pages 3-7-19 and 3-7-20.

ZR

With function plate M3 x 0.35 x 75 4 Standard (Without options) M3 x 0.35 x 19 6 AMJ !5 With function plate M3 x 0.35 x 24 6 Components Vacuum switch/Filter unit Misc. 13-3-49

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

3 Port Solenoid Valve

V110-D5CU-C4 3 sets (Double solenoid part no.) V110-D5CZJ-C4 1 set (Double solenoid, with switch part no.) V110-D5MZ-C4 1 set (Double solenoid, individual wiring/ lead wire length 300 mm part no.) 1 2 The asterisk denotes the symbol for assembly. Prefix to the part no. of the solenoid valve, etc. The valve arrangement is numbered as the 1st station from D side.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in

Series VQ Metal Seal/Rubber Seal Body Ported

VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.

VQC

20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Large Size Vacuum Module: Series ZR

Vacuum release ON OFF OFF OFF ON OFF Combination Symbol : C4 Feature: Adsorption of workpieces and release of vacuum are switched by double solenoid valve.

Table of Contents

Never use pressure sensors in the presence of inflammable or explosive gases. 16-3-19 19 Series PSE Specific Product Precautions 2 Be sure to read before handling.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ4 Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) VQ5 Dimensions VQZ Single unit Manifold VQD 2n-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 mounting hole ~ =4.5 ~ =4.5 M2.5 mounting hole Residual pressure release manual override Residual pressure release manual override DIN rail clamp screw

Intrinsically Safe Valve

0.27] 2position 0.75 0.36 0.19 3.8 3.2 0.34 0.82 0.26 0.86 53-SY5 20-C4 C10 10 Onetouch fitting 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 2.8 0.59 0.27 0.21 0.67 2.4 53-SY7 20-C10 3position 4position dual 3 port 2.7 [2.0] 0.38 [0.38] 0.70 [0.56] N.C.

ARM10/11

N3 N7 C6 C8 C10 N7 N9 N11 4 6 5/32 1/4 6 8 10 1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4