Proposals for Energy Saving

Box Type (with Built-in Silencer) B S 07 ZH 06 06 Body Ported Type (without Silencer) D S 07 ZH 01 01 01 EXH port size Note) Nozzle diameter Symbol Size Type One-touch One-touch One-touch One-touch One-touch Threaded Threaded Threaded Threaded 05 07 0.5mm 0.7mm 6 8 10 12 16 06 08 10 12 16 01 02 03 04 10 1.0mm 13 1.3mm 15 1.5mm 18 1.8mm Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 20 2.0mm Maximum

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

V100

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Size (Nominal x Length) Quantity Metric size Inch size TMH-23J TMH-01J M3 x 15 TMH-04J TMH-03J TMH-06J TMH-07J M3 x 20 TMH-06 TMH-07 M4 x 25 TMH-08 TMH-09 TMH-10 M4 x 35 TMH-12 TMH-13 1 Series Select the applicable holder/TMH for each speed controller from the table below.

ZX

(VJA314) ZX1-VJ114K1, J1 q Misc. 1 2 M3 M5 M3 x 0.5 Pilot port/ External release port M5 x 0.8 ZX1-VJ3 4w K3, J2 1 2 e ZX1-VJA3 4 K8 Table (4) How to Order Ejector Assembly Air operated N.C. (ZX1A) ZX1AK6 r 05 ZX1 1 D W Table (2) How to Order Solenoid Valves Assembly no.

F

18.1 18.5 15.2 25.3 5/16 32.4 NAS221F-U02-09 19 17 8.9 23.3 14.5 1/4 5/32 18.5 17.2 32.5 NAS221F-U02-03 31.1 32 26.6 39.4 34.4 11.4 24.9 16.5 3/16 34.2 NAS221F-U02-05 32.4 17 13.2 25.2 1/4 34.5 NAS221F-U02-07 32.9 15.2 27.2 18.5 5/16 36.4 NAS221F-U02-09 33.6 19 17.9 33.9 21 3/8 3/8 23 19 43.2 NAS321F-U02-11 35.3 13.2 27.8 17 1/4 19.4 39.3 NAS321F-U03-07 53.9 37.6 32.6 45 40 15.2 29.5 18.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.

Table of Contents

saturated with hydraulic fluid: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm ) 180 Polycarbonate F.R.L.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Speed Controller with

Size (Nominal x Length) Quantity Metric size Inch size TMH-23J TMH-01J M3 x 15 TMH-04J TMH-03J TMH-06J TMH-07J M3 x 20 TMH-06 TMH-07 M4 x 25 TMH-08 TMH-09 TMH-10 M4 x 35 TMH-12 TMH-13 1 Series Holder mounting Select the applicable holder/TMH for each speed controller from the table below.

IZx-OMV0005

Dimensions 06 07 Energy saving nozzleIZN10E-01 06 07 High flow rate nozzleIZN10E-02 Note M3 x 0.5 depth 4 Ground terminal 2 x M3 x 0.5 depth 10 Note Note) Dimensions of the area ( shaded) on page 5 Mounting 3).

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

ZP

01 ZPB-T1J75-01 18 28 With three M3 bolts Applicable pad part no.

ZP

01 ZPB-T1J75-01 18 28 With three M3 bolts Applicable pad part no.

ZP

01 ZPB-T1J75-01 18 28 With three M3 bolts Applicable pad part no.

Vacuum Pad

01 ZPB-T1J75-01 18 28 With three M3 bolts Applicable pad part no.

Vacuum Pad

01 ZPB-T1J75-01 18 28 With three M3 bolts Applicable pad part no.

Vacuum Pad

01 ZPB-T1J75-01 18 28 With three M3 bolts Applicable pad part no.

Vacuum Pad

01 ZPB-T1J75-01 18 28 With three M3 bolts Applicable pad part no.