AC Servo Motor Driver (Pulse input type/Positioning type ）

. 17-46 17.11.1 Alarm list . 17-46 17.11.2 Remedies for alarms . 17-46 17.12 DISPLAY AND OPERATION SECTIONS . 17-48 17.12.1 Point table setting . 17-48 10 - 17.13 1 Single-Step feed . 17-50 17.14 COMMUNICATION FUNCTION(Mitsubishi general-purpose AC servo protocol) . 17-52 17.14.1 Reading command . 17-52 17.14.2 Writing commands. 17-53 17.14.3 Detailed explanations of commands . 17-54 17.14.4

Table of Contents

) 18.5 (17) 20 20 12.5 12.5 22.5 22.5 2026.5 (25) 20.5 (19) 28 22 20.5 14.5 24.5 30.5 34 (32.5) 23 (21.5) 36 24.5 28 17 27 38 Data 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.

Air Slide Table

4 A 6.6 12 11 A GB 7 HB NN x M8 x 1.25 thread depth 12 Cross-sectional view A-A 65 50 26 Bottom view of MXQ25A-75Z Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ25A-10Z 55 18 7 55 80 30 36 131.5 4 2 95 118 MXQ25A-20Z 46 18 7 55 80 30 36 141.5 4 2 95 118 MXQ25A-30Z 55 28 17 55 80 22 54 151.5 4 2 105 128 MXQ25A-40Z 65 28 17 65 90 22 64 161.5 4 2 115 138 MXQ25A-50Z 75 36 20 80 110 43

Smooth Cylinder/Low Speed Cylinder

TY 4 x TT TD TH TF TS 4 x TR TA TL TU TU TY TC (mm) TD-H10 (Hole) Bore size (mm) TA TL TU TC TX TE TO TR TT TS TH TF TY Z Part no. +0.070 0 40 80 60 10 102 85 119 17 9 17 12 45 60 62 93 15 CA2-S04 +0.070 0 50 80 60 10 112 95 129 17 9 17 12 45 60 74 103 15 +0.070 0 CA2-S06 63 100 70 15 130 110 150 20 11 22 14 55 73 90 107 18 +0.084 0 80 120 90 15 166 140 192 26 13.5 24 17 75 100 110 129 25

Table of Contents

. 16.5) 8 (Max. 20) 9 (Max. 25) 3.2 3.5 4.5 4.5 13 13 17 17 45.6 53.5 67 81.5 5.8 6.5 8.5 9.5 43 49 61 76 6 7 9 10 12 15 MY1B25 MY1B32 MY1B40 12 16 16 56 56 46 43 33 43 With high load shock absorber + Adjusting bolt TT h MY1B H Stroke Bore size E F TT EA h EB W FW Stroke adjusting unit FB S (Shock absorber stroke) T FC Shock absorber a 2.8 15.4 Workpiece EC EY FH Since the dimension EY of

ISO Cylinder

6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 74 (80) 10 46 (50) 74 (78) 12 50 (53.5) 88 (91.5) 16 50 (53.5

KQ2

10 4.2 4.2 D2 L2 M5 x 0.8 M6 x 1.0 3.5 3.5 8 8 6 17 1 8 12.8 14 17 19 14 17 19 20.5 Applicable tubing Connection thread 9.0 11.4 1 4 10 20 3 8 1 8 23 26.5 27 16 22 23 L1 1 4 8 18.5 23.5 12 15.2 14.9 21.6 3 8 1 4 28 28.5 32.5 29.5 30 34 14.9 21.6 17 27 D1 3 8 1 2 10 19 21 18.5 17 26.5 35.2 25.0 46 24 17 D2 1 4 L2 29 Applicable tubing 20.9 28.5 12 3 8 1 2 22 17 19 50.2 39.7 48 24

CJ2

H7BAL D-H7NF 6 10 16 6 10 16 10 16 8.5 9 8.5 7.5 8 7.5 9.5 9 17.5 16.5 17 16.5 15.5 16 17 17.5 21.5 28.5 29 20.5 27.5 28 29 29.5 2 2.5 3 1 1.5 2 3 3.5 89 101 47 71 D-H7C D-A7 D-A80 88 100 46 70 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F D-A7/A80 17.5 10 89.5 101.5 47.5 71.5 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL D-F7BAVL 20.5 16 41.5 10 10 17.5 29.5 3.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Bore size (mm) Stroke range (mm) H E F C D N M K J I Q S L P O B A 44 54 53.5 63.5 65 75 B 36 46 43.5 53.5 53 63 A 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 10.5 20 77 15 46 54 9 60 17 7 M10 x 1.5 103 14 depth 10.5 93 15 8 Rc 1/4 80 12.5 98 25 21 53.5 63.5 11 77 22 6 M16 x 2.0 132 17.5 depth 13.5 112.5 16 10 Rc 3/8 100 13 117 30 27 63 75 11

5

Bore size (mm) B TA TL TU TC TX TE TO TR TT TS TH TF Z** TDH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15 130 110 150 20 11 22 14 60 80 129 20+0.084 0 MB-S10 100 114 120

ZP

14 17 8 Buffer assembly part no.

V100

For the DIN rail model number, refer to page 4-14-17.

ZP

14 17 8 Buffer assembly part no.

KJ

13 20 5 6 13 10 4.2 4.2 D2 L2 M5 x 0.8 M6 x 1.0 3.5 3.5 8 8 17 1 8 6 12.8 14 17 19 14 17 19 20.5 Applicable tubing Connection thread 9.0 11.4 1 4 10 20 3 8 1 8 23 26.5 27 16 22 23 L1 1 4 18.5 23.5 12 15.2 14.9 21.6 8 3 8 1 4 28 28.5 32.5 29.5 30 34 14.9 21.6 17 27 D1 3 8 1 2 17 19 21 18.5 10 26.5 35.2 25.0 24 17 46 D2 1 4 L2 29 Applicable tubing 17 20.9 28.5 3 8 1 2 22 19 50.2 39.7

LVQ

1/46 1/46 LVD (Max.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Applicable up to 17 solenoid valves.) ... ... One-touch fitting for 4 One-touch fitting for 4 ... ... 08 SY3000 8 stations SY3000 One-touch fitting for 6 Mixed One-touch fitting for 6 Mixed 17 17 stations M This also includes the number of blanking plate assemblies. Two stations are necessary for the double, 3 position (Dual body type).

Air Cylinder Series MB

Z B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 47 60 60 80 80 100 115 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25

One-touch Fittings

V 3/8 KQ2W10-03P 21 15.9 17 19.3 44.7 45.1 15.6 33.5 23.8 7.5 57.8 V 1/2 KQ2W10-04P 27 15.9 17 19.3 49.5 47.1 15.6 33.5 23.8 7.5 122.8 V H 12 1/4 KQ2W12-02P 17 18.5 17 21.5 51.4 53.1 17 47.7 37.7 9 56 V 3/8 KQ2W12-03P 21 18.5 17 21.5 46 47.7 17 47.7 37.7 9 59.7 V 1/2 KQ2W12-04P 27 18.5 17 21.5 50.8 49.7 17 47.7 37.7 9 124.6 V Connection thread 16 1/4 KQ2W16-02P 17 23.8 17 25.1 54.1 58.4

Table of Contents

02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection

JIS Standard Hydraulic Cylinder

15 40 19 11 43 35 1/2 46 155 13 14 50 8 58 37 35 15 220 225 55 52 15 15 25 to 1400 63 M12 x 1.5 90 98 63 15 42 19 14 43 35 1/2 52 163 15 18 60 10 65 45 42 18 240 247 65 55 15 20 25 to 1500 80 M16 x 1.5 110 118 80 17 40 22 16 44 44 3/4 65 184 18 18 72 12 87 50 50 20 269 284 65 17 20 80 25 to 1800 1/4 stroke 100 M18 x 1.5 135 150 102 19 42 22 18 44 44 3/4 75 192 20 22 85 12 109 55 55 23 287