VZ3000

plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed

0.

DIN terminal (Y): VQZ2l2l-lYll1-C4, C6 L-type plug connector (L): VQZ2l2l-lLl1-C4, C6 (Lead wire length) Approx. 300 79 [81.2] 28.8 [35.8] 85.4 Max. 10 45.5 Pg7 Applicable cable O.D. 3.5 to 7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ2l2l-lMl1-C4, C6 (Lead wire length) 61.4 53.9 42.6 40.1 [47.1] Approx. 300 27.9 69.2 [71.4] 64.2

Manifold Specifications

(Manifold base) VZ3123-5MOZ-C4. 3 pcs. (Valve) VZ3223-5MOZ-C4. 3 pcs. (Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Fieldbus System

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [X: External pilot port] Applicable tube O.D. C4: 4 (SMC) N3: 5/32" (SMC) (9.5) (43.9) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.

Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

Secondary Batteries

Electric Actuators/Cylinders 6 Electric Actuator Series LJ1/LG1 Electric Actuator with Integrated Guide Series LTF Series LJ1 Short Stroke Electric Actuator Series LX Electric Cylinder Series LZB/LDZB/LZC/LDZC Electric Gripper Series LEHZ/LEHF Series LX Electric Slide Table Series LES e-Rodless Actuator Series E-MY2 Series LEHZ Series E-MY2 Front matter 17 a C O N T E N T S Product

2-Color Display Digital Flow Switch Series PFM

17 17 15 17 43 G 1/4 G 1/4 21 21 941 Series PFM7/PFM5 Made to Order 3 Please contact SMC for detailed specifications, lead times and prices.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

For the DIN rail model number, refer to page 4-14-17.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Refer to p.2.10-17 for DIN rail part number.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

holes SY 0.8 4 8.6 SYJ 17 10 24 SMC 2 R2 25.8 Cover diameter 1.6 Cross section 0.34mm2 SX 2-C3, C4, C6, M5 16.6 23.6 60.3 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 VK Manual override C6: One-touch fittings for 6 M5: M5 thread VZ VF 25.5 (M5) 9.5 (C3, C4, C6) VFR (47.5) VP7 VP4 26.5 5.4 18.5 VQ 23.2 Mounting holes 5 2 VQ4 10 25.5 9.5 VQZ (47.5) 9.9 9.9 3-M5 x 0.8 P, R

HRX-OM-X084

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMElectric conductivity control function

Vacuum

E55: 3 wire (note 3) E16/17, E18/19:4 wire Types E16/17 3% F.S. or less (fixed). Lighting under ON condition (outpui 1: rd, output 2: green). Type E16/17 only. E14, E15, E55 types with plug connector do not utilize while wire.

Vacuum

E55: 3 wire (note 3) E16/17, E18/19:4 wire Types E16/17 3% F.S. or less (fixed). Lighting under ON condition (outpui 1: rd, output 2: green). Type E16/17 only. E14, E15, E55 types with plug connector do not utilize while wire.

Electric Actuator

LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) Note 4) CN1 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 Zero speed detection CLEARCOM 14 DOCOM 46 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 17 PULSE R+ PULSE R S/S NG 36 4

LEC-OM02904

C4 TM MR Configurator2 2. 7.7 5 19 5 5.3 (No.PC) * * ** 5.3.1 No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C8 C4 C6 C8 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 148 198 248 135.5 125 105 15 160.5 150 137 185.5 175 153 16 210.5 200 185 235.5 225 201 17 260.5 250 233 137.5 121 187.5 169 237.5 217 13.5 11.5 14.5 12.5 15.5 13.5 Stations SS5Y5-45GUBC4 C6 C8 Stations L1 L2 L3 L4 2 148 3 4 5 6 7 8 9 10 173 198 248 185.5 175 155 15 210.5 200 187 235.5 225 203 16 260.5 250 235 285.5 275 251 17 137.5

ZQ-OM01301

Refer to the Operation Manual of the V100 Series for details. 17 - Doc. No. ZQ-OM01301-A .

Compact Manifold Regulator

AP100 17 735 ARM11A/B Series Pressure Switch Block 56 ARM11AW Z A 0.4 0.2 0.6 0.5 20 MPa 24 q w 0.3 0.1 1. Accessory 2.

Rotary Actuator/Vane Type

Single shaft/Port location: Side ported 31 2 x 3.5 through 2 x M3 x 0.5 through 25 Chamfer (Rotation range is stated on page 70.) 25 31 41 A port B port 17 9h9 0 0.036 4g70.004 0.016 Double shaft/Port location: Side ported 0.5 2 x 3.5 through 9 31 14 1 3 Body (B) 10.6 7 16.5 46 9.5 21 53 Body (A) 2 x M3 x 0.5 5 8 1 B port A port 0.5 9h9 0 0.036 4g70.004 0.016 29 Size: 10