Electric Actuator with Integrated Guide

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

ZP

Form w 1 Material e Vacuum inlet r A Connection thread J 10 13 C B 46 29.9 21 2.5 10 8 M5 x 0.8 16 46.5 30.4 21.5 20 25 57.6 39.8 29 3.5 12 12 M8 x 1.25 32 58.1 40.3 29.5 10 13 Applicable tubing O.D.

MGP

MB (Width across flats) MGPM, MGPL Common dimensions (mm) Bore size (mm) BM (Adjustment bolt) MA MB BM MC MH 12 16 20 25 32 40 50 63 80 100 5 5 6.5 6.5 6.5 9 9 10 15 18 8 10 13 13 19 27 30 36 41 46 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M8 x 1.25 M12 x 1.5 M12 x 1.5 M16 x 1.5 M20 x 1.5 M24 x 1.5 12.5 11.5 16 16 21 30 34 40 46 52 19 19 27 26.5 26.5 33 32.5 37 53.5 57.5 MC MA MH + Adjustment

C85

38 26 4 20 6 4 10 24 20 13.1 1.5 12.5 2.5 64(71) 4.5 8.1 65(72) 13 38 26 4 20 6 4 12 27 25 18.5 2 15 3.2 75(79) 5.5 12.1 76(80) 18 58 38 6 25 8 6 16 27 25 18.5 2 15 3.2 82(82) 5.5 12.1 82(82) 18 58 38 6 25 8 6 20 30 32 24.1 4 20 4 95 6.6 16.1 90 20 66 46 6 32 8 8 25 30 32 24.1 4 20 4 104 6.6 16.1 97 24 66 46 6 32 8 ( ): In the case of air cushion. 6-11-15 15 Series C85 Dimensions [First

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) A B C D EH EV H J K L M O1 R S 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 105 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 105 to 500 178.5 160 63 50 to 200 192.6 155.2 21 40 76 82 M16 x 2 44 36 37.4 60 M8 x 1.25 16 80 205 to 500 227.6 190.2 505 to 800 262.6 225.2 Size Stroke range

Table of Contents

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 46 76 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

HRX-OM-S004

HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC. . 8-18 8.9 Daily Check Sheet . 8-19 Chapter 9 Product Warranty

Air Fittings & Tubing

Weight (g) L A M d 7 34 32 KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 2 6 2 5 M5 X 0.8 29 13 4 2.5 1 8 M5 X 0.8 10 30 14 33 35 37.5 39 41 46 2.5 7 30 31 13 14 6 1 8 10 4.5 1 4 14 14 31.5 33 14.5 14.5 KQ2N06-02S 14 1 4 KQ2N08-02S 17 8 6 3 8 KQ2N08-03S 17 17 7.5 34.5 39.5 16 18.5 30 31 10 3 8 KQ2N10-03S Nipple: KQ2N Part No.

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 1.7 12 12 15 5 6 21 29.9 46 3 ZPR13UT 13 14 ZPR13 1.8 13 1.5 ZPR16UT 16 17 ZPR16 18 16 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

REA/REB

3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 Max.

Battery-less

[mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T T2 U V X2 Y Without lock With lock 16 10 to 100 101 90.5 10 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 90.5 0.5 28 100.5 145.5 22.5 101 to 300 121 110.5 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 7.5 1 42 88.5 129 26.5 101 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25

CL

15 15 8 0 0 0 0 42 50 59 76 92 42 46 48.5 55 56.5 20 21 23 23 25 27 27 34 44 43 70 80 93 116 133 45 50 60 70 80 13 13 16 16 17 3.1-47 Series CLAW Flange/CLAWF (mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 BF AL B B1 BN BQ C FD FT FY GA GB BP D FX FZ GC E GD FV GL GR H1 W/o rod boot to 500 to 600 to 600 to 750 to 750 W/ rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 1/4 1

MY1

Refer to page 46.

ISO Standard Hydraulic Cylinder

29 6.5 161.5 22 52 19 40 22 58 12 19 25 33 8 3/8 58 34 16 47 107 132 50 25 to 800 M8 x 1 9 M20 x 1.5 46.5 28.5 8 176 28 65 25 50 28 58 15 24 31 34 11 3/8 65 42 16 59 108 139 63 25 to 800 M8 x 1 9 M27 x 2 46 33 12 198 36 77 32 58 36 66 19 30 38 31 13 1/2 69 50 18 74 115 153 80 25 to 800 10.5 M33 x 2 57 32 15 223.5 M10 x 1.25 45 96 41 75 45 74 13 41 35 42 17 1/2 77 60 17 80 133 168 100 25

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

CY1

15 16 25 26 L 66 70 80 92 110 122 N 15 15 17 21 25 25 NA 24 30 36 46 55 69 NB 13 13 15 19 23 23 NN M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2.0 F 13 13 16 16 2 2 Model CY1B20 CY1B25 CY1B32 CY1B40 CY1B50 CY1B63 Port size Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)1/4 0.007 0.037 0.007 0.043 Q x R M8 x 1.25 x 16 M10 x 1.5 x 16 TC x R M12 x 1.25 x 7.5 M14 x 1.5 x 11.5 S 106 111

Table of Contents

L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5

CV/MVGQ

RB J Stroke range QY H H1 H2 HX I K MM N NA NN S ZZ F Q Eh8 B1 B2 D AL A Bore size (mm) 20 25 32 40 Up to 300 19.8 14 41 5 8 65.3 28 5 M8 x 1.25 15 24 M20 x 1.5 62 116 13 8 15.5 13 26 18 20 0 0.033 DUp to 300 45 120 13 22 14 6 8 70.5 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 62 19.5 17 32 10 22 26 0 0.033 Up to 300 13 25.8 16 45 6 8 76.5 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 64 122 19.5 17 32 12

CV/MVGQ

RB J Stroke range Q H1 NN F H MM ZZ H2 HX QY I K N NA S AL A B2 D Eh8 B1 Bore size (mm) 20 25 32 40 Up to 300 13 41 116 14 5 62 19.8 5 8 65.3 28 M8 x 1.25 15 24 M20 x 1.5 18 8 15.5 13 26 20 0 0.033 DUp to 300 13 45 120 14 5.5 62 22 6 8 70.5 33.5 M10 x 1.25 15 30 M26 x 1.5 22 10 19.5 17 32 26 0 0.033 Up to 300 13 45 122 16 5.5 64 25.8 6 8 76.5 37.5 M10 x 1.25 15 34.5 M26 x 1.5 22 12 19.5 17

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) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .