SZ3000

L 20 46 (7.5) L 14 1 8 55 47.04 (35) (25) 5.5 Approx. 10 25 13 2-M2.6 x 0.45 Socket side Rail mounting hole pitch 12.5 Plug connector HDB-CTF Terminal No.

Manifold Specifications

(Manifold base) VZ3123-5MOZ-C4. 3 pcs. (Valve) VZ3223-5MOZ-C4. 3 pcs. (Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Fieldbus System

14 15 16 17 12 13 9 Plug-in Connector Connecting Base Series SY3000/5000 Dimensions: Type 10/For EX260/Series SY5000 (mm) SS5Y5-10SllStations (S, R) U D B C4, N3 C6, N7 C8, N9(D) D side U side Manual override ( ) Push-turn locking slotted type: Press, then rotate it.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, M5 60.3 C3: One-touch fittings for 3.2 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (C3,C4,C6) 47.5 9.5 (M5) 26.5 25.5 5.4 18.5 5 23.2 Mounting holes 10 (47.5) 3-M5 X 0.8 P, R port 9.9 9.9 5 1 3 2-PE port 22.2 Die cast hole For manifold gasket positioning L plug connector (L): VQZ122 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ122 wMwC3, C4

0.

port) Silencer is installed in the manifold EXH port. 63 38 22 Dimensions 13 Silencer part no.

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

Vacuum

Suciion SCFi,/ (Namin) 0.18 (5) 0.3s (10) o.78 (22) 1.13 (32) Ak Consumplion SCF[, (N/m n) 0.46 (13) 0.81 (23) 1.63 (46) 2.65 (75) Max. Vacuum Pressure -25 in Hg (-630 mmHg) Exhaust Belease Built-in silencer. Manilold common exhausl .

Vacuum

Suciion SCFi,/ (Namin) 0.18 (5) 0.3s (10) o.78 (22) 1.13 (32) Ak Consumplion SCF[, (N/m n) 0.46 (13) 0.81 (23) 1.63 (46) 2.65 (75) Max. Vacuum Pressure -25 in Hg (-630 mmHg) Exhaust Belease Built-in silencer. Manilold common exhausl .

5 Port Solenoid Valve SY Series

One-touch fitting for 4 C4 SY3000 2 position double One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 One-touch fitting for 6 C6 For DC SY5000 One-touch fitting for 8 C8 5 24 VDC 6 12 VDC SY9000 has no bracket.

HRX-OM-X084

8.4.1 Replacing Particle Filters .8-13 8.4.2 Replacing the DI filter (Option DM) .8-13 8.5 Electrical schematic diagram . 8-16 8.5.1 HRR010-A/W-10.8-16 8.5.2 HRR010-A/W-20.8-18 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR010-A-10/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

Electric Actuator

Crack on the back of the belt 13.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

C6: One-touch fitting for 6 VVQZ200-10A-2 VV3QZ22-05C 2.10-13 VQZ100/200/300 Body Ported Dimensions: VQZ100 VV3QZ12C Station (5.5) (35) Grommet (G) (11) 27 2-4.5 Mounting holes n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

LEC-OM02904

13.3 . 5 13.4 . 5 13.5 . 6 13 1 13. 13 13.1 13.11

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

123 162.5 139 17 187.5 171 237.5 219 12.5 13.5 11.5 14.5 12.5 Stations L1 L2 L3 L4 13 14 15 16 11 298 12 323 348 373 310.5 300 283 360.5 350 331 287.5 267 312.5 299 12 337.5 315 362.5 347 13 15.5 13.5 16.5 14.5 49 5 Port Solenoid Valve Series SY3000/5000 Stations SS5Y5-45GDUC4 C6 C8 C4 C6 C8 C4 C6 C8 Note) L1 to L4 dimensions of SS5Y5-45GDStations Dare the same as SS5Y5-45GDStations U.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

ZQ-OM01301

81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 12.

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Filter element (11) ZB1-FE3-A Filtration rating: 30m, 10 elements in one set [For suction filter] (12) Silencer [For silencer] ZB1-SE1-A 10 silencers in one set Pressure sensor (13) ZB1-PS-A assembly Pressure switch (14) ZB1-ZS-A assembly for vacuum Manifold base (15) ZZBFor changing the number of stations assembly 32 - Doc. no.