AC Servo Motor Driver

10 10 10 Note.

0.4

One-touch fitting C10: 10 One-touch fitting (C12: 12 One-touch fitting) DIN rail clamp screw R R 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 18 1 1 A A A A A A A A 10 13.5 C10 [1(P) SUP port] C10: 10 One-touch fitting C10 [1(P) SUP port] (C12 in case of branch type) C4, C6, C8, [4(A), 2(B) port] P = 16 45 25 C10: 10 One-touch fitting (C12: 12 One-touch fitting) C4: 4 One-touch fitting

0.4

VVQ1000-1AC3 C4 C6 M5 Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 M5 thread VQ7 Note) Purchasing order is available in units of 10 pieces.

45

(One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size A, B port 2 to 10 stations: W = 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations

45

(One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size A, B port 2 to 10 stations: W = 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

holes SY 0.8 4 8.6 SYJ 17 10 24 SMC 2 R2 25.8 Cover diameter 1.6 Cross section 0.34mm2 SX 2-C3, C4, C6, M5 16.6 23.6 60.3 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 VK Manual override C6: One-touch fittings for 6 M5: M5 thread VZ VF 25.5 (M5) 9.5 (C3, C4, C6) VFR (47.5) VP7 VP4 26.5 5.4 18.5 VQ 23.2 Mounting holes 5 2 VQ4 10 25.5 9.5 VQZ (47.5) 9.9 9.9 3-M5 x 0.8 P, R

VZ3000

plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed

Manifold Specifications

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

SZ3000

L 20 46 (7.5) L 14 1 8 55 47.04 (35) (25) 5.5 Approx. 10 25 13 2-M2.6 x 0.45 Socket side Rail mounting hole pitch 12.5 Plug connector HDB-CTF Terminal No.

0.

VQZ100 / How to Order Valve C4 Series VQZ 1 5 1 5 M 1 CE compliant CE marked Nil Q 1 VQZ100 body width 10 mm Note) For CE compliant models, DC type only. Type of actuation 1 N.C.

Fieldbus System

Note 2) Without SI unit, the symbol is nil. i A, B port size (Metric) A, B port size (Inch) Type 10/ Side ported Type 11/ Bottom ported Type 10/ Side ported Type 11/ Bottom ported Symbol Symbol A, B port A, B port SY3000 SY5000 SY5000 SY3000 P SY5000 SY5000 C2 C3 C4 C6 C8 CM N1 N3 N7 N9 CM P 2 One-touch fitting 1/8" One-touch fitting P P P P 3.2 One-touch fitting 5/32" One-touch fitting Straight

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

10 units.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7 VQZ100/200/300 Body Ported Dimensions: VQZ100 Valve single unit C6: One-touch fittings for 6 C4: One-touch fittings for 4 C3: One-touch fittings for 3.2 2-C3, C4, C6, M5 Grommet (G): VQZ115-lGl-C3, C4, C6, M5-PR 10 10 (2) M5: M5 thread 53 13.8 6 A 2

2-Color Display Digital Flow Switch Series PFM

(kPa) Pressure loss (kPa) 0.8 0.25 0.6 0.20 0.15 0.4 0.10 0.2 0.05 1 2 4 6 8 10 0 5 10 15 20 25 0 Flow rate (l/min) Flow rate (l/min) PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 4 14 12 Pressure loss (kPa) Pressure loss (kPa) 3 10 8 2 6 4 1 2 5 10 20 30 40 50 0 10 20 40 60 80 100 0 Flow rate (l/min) Flow rate (l/min) Flow Characteristics PFM710, 510 / For 10 (l/min) PFM725

Vacuum

Suciion SCFi,/ (Namin) 0.18 (5) 0.3s (10) o.78 (22) 1.13 (32) Ak Consumplion SCF[, (N/m n) 0.46 (13) 0.81 (23) 1.63 (46) 2.65 (75) Max. Vacuum Pressure -25 in Hg (-630 mmHg) Exhaust Belease Built-in silencer. Manilold common exhausl .

Vacuum

Suciion SCFi,/ (Namin) 0.18 (5) 0.3s (10) o.78 (22) 1.13 (32) Ak Consumplion SCF[, (N/m n) 0.46 (13) 0.81 (23) 1.63 (46) 2.65 (75) Max. Vacuum Pressure -25 in Hg (-630 mmHg) Exhaust Belease Built-in silencer. Manilold common exhausl .

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

HRX-OM-X084

/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR010-A-10/20. 9-6 9.2.2 HRR010-W-10/20. 9-7 9.3 Flow Chart . 9-8 9.3.1 HRR010-A-10/20. 9-8 9.3.2 HRR010-W-10/20. 9-8 HRR Series HRX-OM-X084 Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-

ZQ-OM01301

valve ZQ1-CV 7 V port fitting VVQ1000-50A-C4 (1) Specifications 50A-M5 Without fitting (M5x0.8) 50A-C3 3.2 (Straight) (1) 50A-C4 4 (Straight) Clip (10 pcs. are included in one set) 50A-C6 6 (Straight) A A F1-LC3 3.2(Elbow) ZK1-CP-A F1-LC4 4 (Elbow) 8 Bracket assembly ZQ1-BK1-A 24 - Doc.