LVQ

1/46 1/46 LVD (Max.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VQC 20 16 8 20 20 08 Note) Two manifold stations are required for double solenoid 3 position valves (dual body type).

0.4

SUP/EXH block SSQ1000-PR-3-C8(-S) SUP block plate SSQ1000-B-P Blanking plug KQ2P-23/04/06/08 Dual flow fitting SSQ1000-52AC8 N9 P.44 P.45 P.46 P.42 P R D side U side Silencer (For EXH port) Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R Port plug VVQZ100-CP C6 L6 P.42 P.44 P.45 P.46 P R D side U side Individual EXH spacer SSQ1000-R-3Back pressure check valve (-B) SSQ1000-BP

•

'-02 ~2 06 6 (Application: Refer to ListO) i 08 ~8 U Flat type Material a With buffer 04 4 Pad type.

CV/MVGQ

D-A5/A6/A59W/F5/J5 D-F5W/J59W/F5NTL/F59F D-A3/A44/G39/K39 D-B5/B64/B59W/G5/K59 D-G5W/K59W/G59F/G5NTL CC BT-04 BT-04 BT-06 BT-08 BT-08 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M RB BA-04 BA-05 BA-06 BA-08 BA-10 D-A3C/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 J D-Z7/Z80/Y59/Y69/Y7P D-Y7PV/Y7W/Y7WV BA4-040 BA4-040 BA4-063 BA4-080 BA4-080 DMounting bracket belongs to D-A3C/A44C/G39C

CV/MVGQ

D-A5/A6/A59W/F5/J5 D-F5W/J59W/F5NTL/F59F D-A3/A44/G39/K39 D-B5/B64/B59W/G5/K59 D-G5W/K59W/G59F/G5NTL CC BT-04 BT-04 BT-06 BT-08 BT-08 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M RB BA-04 BA-05 BA-06 BA-08 BA-10 D-A3C/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 J D-Z7/Z80/Y59/Y69/Y7P D-Y7PV/Y7W/Y7WV BA4-040 BA4-040 BA4-063 BA4-080 BA4-080 DMounting bracket belongs to D-A3C/A44C/G39C

KR

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

AC Servo Motor Driver (Pulse input type/Positioning type ）

DOCOM 46 DOCOM 46 OPC 12 20 47 OPC 12 20 47 24 V DC 24 V DC DICOM DICOM DOCOM DOCOM PP 10 PP 10 PP2 37 PP2 37 PG 11 PG 11 NP 35 NP 35 NP2 38 NP2 38 NG 36 NG 36 For sink input interface For source input interface 3. This diagram shows sink I/O interface. For source I/O interface, refer to section 3.9.3. 4. CN2L can not be used. Connect the encoder cable to CN2. 5.

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

BH2-080 BH2-100 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BDS-04M BDS-05M BDS-06M BDS-08M BDS-10M BD1-04M BD1-05M BD1-06M BH1-080 BH1-100 40 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 2) 50 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 2) CH2E

ZP

Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 24 26 27 22 22 24 26 27 22 10 to 16 10

CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore

Compact Cylinder with Lock Series CLQ

CNS YA YB YU Type A mounting bracket YA-03 YA-05 YA-08 YA-10 6 18 56 55 Type B mounting bracket Joint 8 22 67 100 CLS 10 28 83 195 12 36 100 340 CLQ Applicable mounting bracket Bore size (mm) Joint Type A mounting bracket Type B mounting bracket RLQ Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 MLGP 100 YU-10 YA-10 YB-10 RS ML1C Allowable

Compact Cylinder with Lock Series CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

Table of Contents

Max. 8 stations Individual Individual 8 Bottom 08 8 stations Option 3-5-17 18 Series VFR2000 Plug-in Type: With D-sub Connector (For wiring specifications, refer to page 3-5-8.)

High Purity Chemical Valve

30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PFA 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 484

Table of Contents

46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25 40 43 46 46 50 53 73.5 82 87 The figures in parentheses are the normally open type. 24 25 Series VX Safety Instructions The following safety instructions are intended to prevent a hazardous situation and/or equipment damage.

SX

SX5000 SX5000 17 17 08 8 stations This also includes the number of blanking plate assemblies. This also includes the number of blanking plate assemblies.

Series VQ Metal Seal/Rubber Seal Body Ported

(S=10mm2) Cylinder stroke 300mm Series CM2 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-08 (S=10mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-08 (S=10mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 8 14.6 (0.81) VQ2000 (Metal seal) 8 16.2