Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

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AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PL_ _ ]) . 5-46 6.

V

1/4 09 5/16 11 3/8 Tube T01 1/8NPT T02 1/4NPT 06 6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I

AC Servo Motor Driver

ABSOLUTE POSITION DETECTION SYSTEM 14.5 Standard connection diagram Servo amplifier Driver 24VDC CN1 20 46 DOCOM DICOM (Note 2) External torque limit selection Stroke end in reverse rotation Stroke end in forward rotation 43 LSP 44 LSN 18 TL 19 RES 46 DOCOM Reset EMG (Note 1) Emergency stop Servo-on 15 SON 42 EMG Out put Electromagnetic brake output ABS transmission mode RA2 17 ABSM 18 ABSR

AC Servo Motor Driver (Network card type ）

40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7 11.3 10.8 10.4 10.0 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F -8.5 -7.2 -6.0 -5.0 -4.1 -3.3 -2.5 -1.8 -1.2

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 7 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 7 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 7 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

reduces flow setting time

, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Table of Contents

06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

LEC-OM02704CN

22 2.2 24 2.3 25 2.4 25 2.5 26 3 CC-Link 313-61 3.1 32 3.2 33 3.2.1 33 3.2.2 34 3.2.3 37 3.2.4 38 3.2.5 38 3.3 39 3.3.1 39 3.3.2 39 3.4 3-10 3.5 CPU( 3-10 3.5.1 3-10 3.5.2 3-14 3.5.3 3-23 3.5.4 (RWwn2RWwn3) 3-24 3.5.5 (RWrn2) 3-32 3.5.6 CN6 3-33 3.6 3-35 3.6.1 3-35 3.6.2 3-37 3.6.3 3-39 1 - 3.7 3-42 3.7.1 3-42 3.7.2 3-45 3.7.3 3-46

JXCx-OMT0023

PD ) 4 -46 4.4.1 Parameter list 4 -46 4.4.2 List of details 4 47 4.4.3 Using forward/reverse rotation stroke end to change the stopping pattern 4 58 5.

LEC-OM07605CN

PB26](_ _ _ 1) 5 28 5. [] PB45 CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D

Manually Operated Integral Fitting Type/Threaded Type Series LVH

55 3.5 Rc 1/4, NPT 1/4 27 37 20 4 77 75.5 36 30 56 19 15 80 5.5 Rc 3/8, NPT 3/8 37 46 34 7.5 111.5 109.5 47 36 PPS 68 20.5 22 99.5 5.5 Rc 1/2, NPT 1/2 50 57 42 8 142.5 138.5 60 46 44 10 14.5 58.5 3.5 Rc 1/4, NPT 1/4 27 37 20 4 80.5 79 36 30 56 19 19 84 5.5 Rc 3/8, NPT 3/8 37 46 34 7.5 115.5 113.5 47 36 PFA 68 20.5 22 99.5 5.5 Rc 1/2, NPT 1/2 50 57 42 8 142.5 138.5 60 46 484 Series

Vacuum System Peripherals:

Special specifications M 07 07 When creating the special specifications, complete the stations table on the right. Includes number of blanking plate assembly. w Ejector Valve Model Fill in the blanks below with symbols of necessary specifications.