High Purity Chemical Valve

30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PFA 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 484

7.5

Caution Single solenoid SJ3000-46-SC-l Double solenoid, 3 position type, 4 position type SJ3000-46-DC-l Connector Assembly Part No.

Proposals for Energy Saving

M5 x 0.8 through hole 0.5MPa 0.35MPa (except 05) 0.45MPa (13,15 only) H M S 112 85.4 74 70 62 10 P ZM1 K5LZ-E15L-X235 26 30 Body type Conforms to the standard product.

2/3 Port Valve

1 05 Note 1) The output and input voltages are the same.

Prevents Micro-Bubbles

60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8

SY

Dimension L 44 45 46 47 48 49 50 51 52 53 54 No. 648 660.5 673 685.5 698 710.5 723 735.5 748 760.5 773 Connector manufacturer examples Hirose Electric Company Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd.

MB

There is no mounting interchangeability with serise CA2. 6-6-46

CG1

Refer to p.0-44 to 0-46 for Safety Instructions and common precautions.

SYJ300/500/700

Base mounted (with sub-plate) 65 (51) 1/8 61 (47) 60 (46) 82 (68) V100 Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate.

SMC

V (mm/s) = Auto switch operation range (mm) Load operating time (ms) x 1000 In cases of high piston speed, the use of an auto switch (D-F5NT, F7NT, G5NT and M5T) with a built-in OFF delay timer (approx. 200ms) makes it possible to extend the load operating time. 4. Wiring should be kept as short as possible.

JIS Standard Hydraulic Cylinder

19 20 135 102 150 (mm) Rod series B-series rod Bore size (mm) C-series rod MM A MA D E MM K G H ZZ A MA D E K G H ZZ 32 34 M16 x 1.5 25 22 18 7 14 66 268 0.025 0.064 40 40 36 M20 x 1.5 30 27 22.4 9 19 71 278 M16 x 1.5 25 22 18 7 14 66 268 0.025 0.064 50 46 40 M24 x 1.5 35 32 28 11 24 78 306 M20 x 1.5 30 27 22.4 9 19 73 296 63 55 46 M30 x 1.5 45 42 35.5 13 30 95 346 M24 x 1.5 35

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

30 36 46 28 28 28 30 36 46 Head side trunnion style: CG1TQ Bracket mounting range 2-TD8 (Pin O.D.)

SX

O-ring 1-6-111 112 Series SX3000/5000 Base Mounted Manifold Stacking Type DIN Rail Mounted Serial Transmission Type (Integrated) 45S Type How to Order Manifold How to Order Valve Manifold Assembly Ordering example U 3 A 45S SS5X 05 05 Single solenoid (24 VDC) Double solenoid (24 VDC) SX3140-5LOZ Series SX3240-5LOZ 3 SX3000 5 SX5000 U side SI unit Symbol Specifications O Without SI unit A

F

Applicable Model D L A Fitting Size d Inch 3.2(1/8) KQP-01 5 31.5 16 Applicable Model D L A Fitting Size d mm 3.2 KQP-23 3.2 31.5 16 4(5/32) KQP-03 6 32 16 4 KQP-04 6 32 16 4.8(3/16) KQP-05 6.8 34 17.5 6 KQP-06 8 35 18 6.3(1/4) KQP-07 8.5 35 18 8 KQP-08 10 39 20.5 8(5/16) KQP-09 10 39 20.5 10 KQP-10 12 43 22 9.5(3/8) KQP-11 11.5 43 22 12 KQP-12 14 46 24 12.7(1/2) KQP-13 15 46 24 16 KQP-14

CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore

Compact Cylinder with Lock Series CLQ

CNS YA YB YU Type A mounting bracket YA-03 YA-05 YA-08 YA-10 6 18 56 55 Type B mounting bracket Joint 8 22 67 100 CLS 10 28 83 195 12 36 100 340 CLQ Applicable mounting bracket Bore size (mm) Joint Type A mounting bracket Type B mounting bracket RLQ Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 MLGP 100 YU-10 YA-10 YB-10 RS ML1C Allowable

Compact Cylinder with Lock Series CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

ZP

Pad diameter For use where there is no space for the buffer (spring type) How to Order Pad unit ZP2 02 ZJ N Work pieces with inclined adsorption surface Pad material Pad diameter Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Symbol Pad diameter 2 4 5 6 40 46 N S U F GN GS 02 04 05 06 40 46 Pad type Type Bellows Symbol ZJ Dimensions: Pad

Air Cylinder Series MB

CM2 CG1 Auto switch model Bore size (mm) 32 40 50 63 80 100 125 MB D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 BA7-080 MB1 D-A3/A44 D-G39/K39 CA2 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BMB2-032 BS1-125 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F D-F5BAL D-F5NTL CS1 CS2 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 The figure shows the mounting