5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 SQ2000 Applicable tubing O.D. (mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

Table of Contents

For more information, please refer to Auto Shift Function on page 16-2-32.

Modular F.R.L. Units

1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC10-A M5 x 0.8 1/16 87 59.9 25.5 28 35 12.5 25 31 20 27 4.5 6.8 3 24.5 AC20-B 1/8, 1/4 1/8 126.4 87.6 35.9 41.6 60 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 27.5 0 41 57.2 35 7 14 4 41 AC30-B 1/4, 3/8 1

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

ZR

17 Series ZR Vacuum Switch + Suction Filter Unit: ZR1-F Specifications Combination unit of vacuum pressure switch for vacuum pressure detection and suction filter to protect the unit from dust and contamination.

ARM10/11

17 5.

ARM10/11

17 5.

Compact Manifold Regulator

(Full Span) Display accuracy Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard 230 Calibration angle ARM ARM Description None Oil-free Symbol Nil X17 Limit indicator With limit indicator Weight 17 g ARP 17.5 IR-A ARM10 Straight type 6 28 IR X Fitting size 4, 5/32 2 IRV OPEN 6 2 X 1.5 1/4 6 VEX 28 Elbow type X Y Fitting size SRH 4, 5/32 10.5 21.5 R 5.5 E V O C 6 10.5 22 SRP 1/4 10.5 24.5

Proposals for Energy Saving

17 17 22 22 26 26 10 10 12 12 12 14 14 17 17 17 17 17 19 19 19 24 24 27 27 27 27.7 30.1 30.8 31.5 33.8 34.6 35.6 36.3 37.1 29.5 27.7 40.4 41.3 31.2 40.1 38.4 45.6 43.9 15 15 16 16 16 16 16 17 17 17 17 17 17 17 17 17 17 17 17 KN-04-100 KN-04-150 KN-06-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16

Intrinsically Safe Valve

No. 1 (+), No. 2 () 0.75 mm2 5.9 23 Base Mounted Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position double, 4-position dual 3 port L-type plug connector (L) 19 18 9.5 2 A B C 53-SY5 40(R)-L-02 37.2 15.5 15.5 48 4 2 x 4.3 (For mounting) M5 x 0.8 (External pilot port) 4 Insulator: Black () B A 17.5 17.5 B A PE Insulator: Red (+) X Manual override P EB EA 35 17 17 56 62.5 65.4 M5 x

4 Port Solenoid Valve Series VQD1000

16 17 9 Approx. 4 10 P=11 10 4 36.5 L2 L1 41.5 45 M plug connector (M) D side Stations U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 20 237 229 19 226 218 17 204 196 15 182 174 13 160 152 11 138 130 9 116 108 7 94 86 6 83

Table of Contents

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

CRB2/CRBU2/CRB1

Refer to pages 31 and 32 for detailed description of Made to Order.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2.8 depth 6.2 PF2M711/721L-N2(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F2(-L) 88 17 21 2.8 depth 6.2 20 PF2M7(-L) Series Dimensions 76 A PF2M7mS-C4/C6/C8/N7(-L) 76 A 68 68 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 DC(+) 10.2 DC() 1.4 DC(+) 10.2 DC() 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2

5 Port Solenoid Valve SY Series

O.D.: 4, 5/32" : 6, 1/4" (27) (35) (For mounting) 23.2 N7:37.4 C6:33.6 (3.2) (Light/surge voltage suppressor) 13.1 (35.5) (32) + 25 16.9 28.5 [35.5] 0.8 2 P EA (15) 10 For manifold gasket positioning 21.5 die-cast hole 19 (P, EA, EB port) M5 x 0.8 L plug connector (L): SY3 20-L(-F2) 3 4 5 M plug connector (M): SY3220-M(-F2) C4, N3 C6, N7 C4, N3 C6, N7 M8 connector (W0): SY3 20-W0(-F2) C4

Digital Flow Switch (Integrated display type)

11 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-N1(-L) 84.4 12 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-F1(-L) 84.4 13 14 2.8 depth 8.4 PF2M711/721L-01(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N1(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F1(-L) 88 17 21 2.8 depth 6.2 -102No.PF-OMW0007-E PF2M7#S-C4/C6/C8/N7(-L) (mm) Model A P Q PF2M705/710S-C4(-L) 87.1 2.8 depth 8.4 2.5 depth 6 PF2M705

Compact manifold regulator ARM5 Series

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism (stop diode) Note) A-side energized: Light (orange) ON B-side energized: Light (green) ON With surge absorbing mechanism