Secondary Batteries

Refer to page 66 for details. 33 Heavy Duty Stopper Cylinder 20, 32 50, 63 90-RSH/RS1H Series How to Order Piping direction Positional relationship of lever and port Port 90-RSH20 Flange side Direction of transfer Nil Nil Direction of transfer 90-RSH32 Port Cylinder stroke 15 20 Bore size 20 32 15 mm (90-RSH20) 20 mm (90-RSH32) 20 mm 32 mm Heavy Duty Stopper Cylinder 20, 32 M9BWL 32 20 D

Modular F.R.L. Units

13 13 13 13 13 1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Proposals for Energy Saving

, 40 32, 40, 50, 63 40, 50, 63, 80, 100 125, 140, 160, 180, 200, 250, 300 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 32, 40, 50, 63, 80, 100 32, 40, 50 Wiper ring SCB scraper CVM5: Rubber bumper CV3, CVS1: Air cushion None Rubber bumper Rubber bumper (base cylinder unit) Air cushion (base cylinder unit) Rubber bumper Air cushion Rubber

Table of Contents

0.017 15 0 0.043 0 0.052 75 14.9 28 27 25 30 30 20 M8 x 1.25 depth 12 1/4 R8 95 90 3 13 16 5 70 48 94 63 7.5 9 110 23.5 53.5 19 15 0 0.043 0 0.052 88 0.006 0.017 17 16.9 30 29 30 32 35.5 24 M10 x 1.5 depth 13 0.007 0.020 25 1/4 R11 0 0.052 0 0.062 125 103 4 19 22 5 80 60 120 78 7.5 11 140 30 65 28 11.5 108 24.9 45 38 38 For single vane: Above illustrations show actuators for 180 when

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3, are required. 11-2-13 13 Series CRB2 Dimensions: 10, 15, 20, 30 Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

CRB2/CRBU2/CRB1

Refer to pages 31 and 32 for detailed description of Made to Order.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3, are required. 11-2-13 13 Series CRB2 Dimensions: 10, 15, 20, 30 Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

14 2.8 depth 8.4 PF2M711/721L-02(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N2(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F2(-L) 88 17 21 2.8 depth 6.2 20 PF2M7(-L) Series Dimensions 76 A PF2M7mS-C4/C6/C8/N7(-L) 76 A 68 68 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 DC(+) 10.2 DC() 1.4 DC(+) 10.2 DC() 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x 3.4 2 x One-touch fitting

Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) LM Ports 2, 4 size (inch) Nil PNP (+) or without SI unit/input block (SD0) Ports 2, 4 Symbol N3 N7 N9 NM Ports 1, 3, 5 NPN () N 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Mixed Top ported elbow 5/32" One-touch fitting Top ported elbow 1/4" One-touch fitting Top ported elbow 5/16" One-touch fitting Bottom ported elbow 5/32" One-touch

4 Port Solenoid Valve Series VQD1000

U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n x C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 P = 11 12.5 (46) L plug connector (L) n: Stations Dimensions n L 11 138 130 10 127 119 L1 L2 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism (stop diode) Note) A-side energized: Light (orange) ON B-side energized: Light (green) ON With surge absorbing mechanism

EtherNet/IP TM Compatible Fieldbus System

SI unit which is not 32 output is connected to the port specified by diagnostic setting < 32 point switch diagnostic > 0x8-0xF Reserve 24 No.EX-OMS0014-A Diagnostic setting Output data Offset Meaning MSB LSB MSB LSB (INT) 15 8 7 0 Slave 8 #D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1 connection diagnostic 32 point 9 COM_D COM_C COM_B COM_A switch diagnostic -: Unused < Slave

Compact Vacuum Unit

ZB1 PS 1 A o V-port assembly Pressure sensor specifications ZB1 VPN3 A C2 0 to 14.6 psi (0 to 101 kPa), output: 1 to 5 V, accuracy: 2% F.S. or less 1 3 14.5 to 14.5 psi (100 to 100 kPa), output: 1 to 5 V, accuracy: 2% F.S. or less One-touch fitting C2 C4 N1 N3 L2 L4 LN1 LN3 Straight 2 mm one-touch fitting Straight 4 mm one-touch fitting Straight 1/8" one-touch fitting Straight 5/32" one-touch

Plug-in Unit

Port size VQC1000/2000 VQC4000 --C8 Port size VQC2000 VQC1000 Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B C0 VVQC 1 000-2A-1 For 3.2 One-touch fitting For 4 One-touch fitting For 6 For 8 For 10 For 12 For 1/8" For 5/32" For 1/4" For 5/16" For 3/8" For M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported Without One-touch fitting Option Series Nil R Centralized exhaust External pilot

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

Large Size Vacuum Module: Series ZR

ZR1-SR2-82-A(a set of four threads) For nozzle size 18, 20 ZR1-SR2-86-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For

VZ3000

(M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed Center/Exhaust

Intrinsically Safe Valve

0.27] 2position 0.75 0.36 0.19 3.8 3.2 0.34 0.82 0.26 0.86 53-SY5 20-C4 C10 10 Onetouch fitting 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 2.8 0.59 0.27 0.21 0.67 2.4 53-SY7 20-C10 3position 4position dual 3 port 2.7 [2.0] 0.38 [0.38] 0.70 [0.56] N.C.

Compact manifold regulator ARM5 Series

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5