Please contact us for the latest version.sales@ocaire.com, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AK, SS5YJ3 BODY PORT M5, 0.53534 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BODY PT, CLEAN ROOM, VALVE, SS5YJ3 MFLD SYJ3000, AJ, SS5YJ3 BODY PORT M5, .48501 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AJ, SS5YJ3 BODY PORT M5, .48501 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AJ, SS5YJ3 BODY PORT M5, .43176 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BODY PT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, AK, SS5YJ3 BODY PORT M5, .77161 lb

Please contact us for the latest version.sales@ocaire.com SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .30800 lb. AJ.

Please contact us for the latest version.sales@ocaire.com SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .43176 lb. AJ.

Please contact us for the latest version.sales@ocaire.com SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .00000 lb. AK.

Please contact us for the latest version.sales@ocaire.com SS5YJ3 MFLD SYJ3000. MFLD, BODY PT, SYJ3000 SERIES. VALVE. SS5YJ3 BODY PORT M5. .17253 lb. AJ.

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

KJ

18 41 59 30 96 113 (96) 16 25 32 KQ2E16-03 14 40 127 29 M28 x 1.5 KQ2E16-04 18 44 132 Note) ( ): Values for soft nylon. 15-2-28 20 One-touch Fittings Series KQ2 Adaptor: KQ2N H (width across flats) Applicable fitting size d Connection thread R M d Weight (g) L A Model Applicable fitting size KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 7 34 32 M5 x 0.8 2 6 2 5 13 29 4 2.5 1 8 14 30 M5 x 0.8

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Dimensions Applicable fitting size d 4 Model A L D 10-KQP-04 16 32 6 6 10-KQP-06 18 35 8 8 10-KQP-08 20.5 39 10 10 10-KQP-10 22 43 12 Blanking plate assembly : Thread type Nil Rc G F 1 8" 10-KQP-01 16 31.5 5 N NPT 5 32" 10-KQP-03 16 32 6 NPTF T 1 4" 10-KQP-07 18 35 8.5 5 16" 10-KQP-09 20.5 39 10 Caution Mounting screw tightening torque Series Assembly part no.

Table of Contents

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

Air Fittings & Tubing

M D1 D2 L1 Urethane KQ2LF04-M5 KQ2LF04-M6 KQ2LF04-01 KQ2LF04-02 KQ2LF06-M5 KQ2LF06-M6 KQ2LF06-01 KQ2LF06-02 KQ2LF06-03 KQ2LF08-01 KQ2LF08-02 KQ2LF08-03 KQ2LF10-02 KQ2LF10-03 KQ2LF10-04 KQ2LF12-02 KQ2LF12-03 KQ2LF12-04 M5 X 0.8 M6 X 1.0 14.5 8 8 5 3.5 3.5 15.5 21 24.5 15 16 22 25.5 26 4 10.4 16 18.5 1 8 1 4 14 17 13 20 5 6 13 10 4.2 4.2 M5 X 0.8 M6 X 1.0 3.5 3.5 8 8 6 17 1 8 12.8

Table of Contents

-06 (6) 02 03 04 E300E100-M5 E20002 03 04 E30001 02 03 E60006 10 E60006 10 E60006 10 Piping adapter 02 03 04 06 IS1000E-40 (6) Pressure switch with piping adapter IS1000E-20 02 03 04 IS1000E-30 01 02 03 02 03 04 IS1000E-30 (6) Y14-M5 Y2401 02 Y3401 02 Y3402 03 Y4403 04 Y5401 02 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

Table of Contents

NBR (50), Conductive silicon rubber (50) Durometer Weight/Male Thread (Female thread) (g) Pad form Flat Flat with ribs Deep Bellows Connection M5 M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27

ZP

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions

CG5-S

(mm) Connection threads Model Connection threads Model M5 x 0.8 KGH04-M5 -01 -02 KGH06-M5 -01 -02 -03 KGH08-01 -02 -03 KGH10-01 -02 -03 -04 KGH12-02 -03 -04 KGH16-03 -04 M5 x 0.8 KGL04-M5 -01 -02 KGL06-M5 -01 -02 -03 KGL08-01 -02 -03 KGL10-01 -02 -03 -04 KGL12-02 -03 -04 KGL16-03 -04 4 4 R 1/8 R 1/4 R 1/8 R 1/4 M5 x 0.8 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2

1

Port size 01 Port size M5 One-touch fitting (Replaceable) 32 32 32 ( ) C6: 12.8 N7: 16.6 (Pitch) P = 10.5 (Pitch) P = 10.5 (Pitch) P = 12.5 46.4 46.4 46.4 21.1 14 20.1 17 20.1 17 29.8 29.8 29.8 3EB 2B 3EB 2B 3EB 2B 1P 1P 1P 5EA 4A 5EA 4A 5EA 4A One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" 1/8 [4(A), 2(B) port] M5 x 0.8 [4(A), 2(B) port] Port

Proposals for Energy Saving

(Example) 2NR M5 x 0.8 M5 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Note 1) Only the adjusting spring will be different from the standard.