Hydraulic

(mm) With rod boot Stroke range (mm) Bore size (mm) l e CD J B BB C F GA GB M NA NB P R S LH LT LW LX X Y Z SS f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 14 13 88 29 14 98 57 21.5 15 52 25 to 1400 40 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 12 15 52 52 25 to 1400 1/3.5 stroke 50 M10 x 1.25 76 145 52 10 27

MGP

Hexagon socket head cap screw (M3 x 0.5 x 16l ) 2 pcs.

Air Slide Table Series MXS

15.5 40.8 5 12 M8 x 1 M3 x 16 16.6 7 15.5 14.6 M3 x 16 1.4 MXS-BS12 (L) 9.5 31 14.5 16 40.8 6 12 M8 x 1 M4 x 15 20.5 10 15 18.5 M4 x 15 1.4 MXP MXS-BS16 (L) 11 37 17.5 19 46.7 7 14 M10 x 1 M5 x 18 23 12 18.5 21 M5 x 18 1.4 MXS-BS20 (L) 13 47 23.5 26 67.3 11 19 M14 x 1.5 M6 x 25 27 13 25.5 25 M6 x 25 12 MXY MXS-BS25 (L) 16 53.5 23.5 26.5 67.3 12 19 M14 x 1.5 M8 x 25 33 17 25.5 31 M8 x 25

7ND9071en

40mm 3.5 5 40mm 9 11 140mm 17 16 50mm 4 6 50mm 10 12 VC_60 120mm ND9206 18 16 60mm 5 6.5 60mm 11 13 140mm 21 19 70mm 6 7.5 70mm 12 14 180mm 25 21 20mm 3 4 20mm ND9203 ND9206 VD_48 NDX VD_48 20mm 9 11 VC_70 140mm ND9206 20 19 40mm 4 7 40mm 12 15 180mm 24 22 50mm 5 8 50mm 14 17 240mm 28 27 60mm 6 9 60mm 16 19 VC_80 180mm ND9206 31 30 70mm 7 10 70mm 18 21 240mm 35 31 80mm 8 11 80mm 20 23 280mm

Rotary Actuator

-=S CDRB2BW20-=D CDRB2BW30-=S CDRB2BW30-=D CDRB2BW40-=S CDRB2BW40-=D 0.004 0.016 0 34 20 29 18 4 10 0.5 14 10 29 M3 x 0.5 depth 5 M3 7.6 21 18.5 5 12 0.043 0.004 0.016 0 42 29 30 20 4.5 10 0.5 20 13 36 M4 x 0.7 depth 7 M5 10.5 22 25 6 14 0.043 0.005 0.020 0 50 40 31 22 5 12 1.0 26 14 43 M5 x 0.8 depth 10 M5 14 24 25 8 16 0.043 0.005 0.020 0 63 45 31 30 6.5 20 1.5 31 20 56 M5 x 0.8 depth 10

Electric Slide Tables

Use bolts that are between the maximum and minimum screw-in depths in length. 44 Series LESH Dimensions: In-line Motor Type/D Type LESH8D depth 3 +0.03 +0.01 3 Manual override screw Note 4) 2 x M4 x 0.7 x 8 depth 3 3 +0.03 +0.01 6 x M3 x 0.5 x 5 Note 5) 12.5 14.5 4 24 32 32.3 16 14 B B 31 0.3 16 330.3 For servo motor and dustproof specification Table operating range Note 1) [1] 1 8 Motor

MXS Series Air Slide Table

FLATS E H Q I J Dimensions of Retraction End Shock Absorber Unit (mm) Shock Shock Applicable Absorber Absorber Body Mounted Table Mounted Model Unit Part No. only A B C D E F P H I J Q MXS8 MXS-BT8 RB0805 38 23 8 45.8 12 -M3 X 12 16.6 7 15.5 M3 X 16 MXS12 MXS-BT12 RB0806 45 31 8 46.8 12 -M4 X 8 20.5 10 15 M4 X 15 MXS16 MXS-BT16 RB1007 55 37 10 53.7 14 -M5 X 10 23 12 18.5 M5 X 18 MXS20 MXS-BT20

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Gasket Round head combination screw 7 8 Rc (PT) SY5000-11-14 SY7000-11-13 SY3000-11-25 SY9000-11-2 SY9000-18-2 (M3 x 42) NBR For mounting valves (Flat nickel plated) G (PF) NPTF N NPT M3 x 26 M4 x 31 SY3000-23-4 (M2 x 21) T F 1.2-31 Base Mounted Type How to Order Pilot Valve Assemblies How to Order Connector Assemblies Q 5 G SY114 30 4A SY100 DC: 30 A SY100 Without lead wire: Indicator light

Vacuum Unit

lever 10 pcs. per set 18 Lock nut 10 pcs. per set 31 Vacuum Unit ZK2mA Series Replacement Parts for Single Unit / How to Order Valve assembly Filter case*1 Construction t p. 31 Construction !

CV/MVGQ

14 8 11 11 13 16 14 18 18 22 26 19.4 16.4 18.4 21.4 21.4 27 30 31 37 40 147 157 173 189 203 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 MK(2) RS Q G The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

ZZ Z U S RR QY Q NN Bore size (mm) 20 25 32 40 142 133 14 62 9 14 19.8 M20 x 1.5 146 137 14 62 9 14 22 M26 x 1.5 148 139 14 64 9 16 25.8 M26 x 1.5 188 177 18 88 11 16 29.8 M32 x 2 Rod Side Trunnion Style (U) Bore size Stroke CVM5U Manual override Width across flats B2 Width across flats NA Width across flats B1 S + Stroke ZZ + Stroke Eh8 H1 NN H MM B1 F K AL I Q A B2 D HX Bore size (mm) 20

smcmaintenancepartslist

MXF12 0.47 M2.5 x 8 MXF16 0.88 M3 x 10 MXF20 M4 x 14 2.06 Loctite No. 242 of Henkel Japan Ltd. or its equivalent is applied. 1-7.

Compressed Air Cleaning Filter Series

113 76 20 76 10 190 66 24 8 6 6 12 6 10 40 66 80 28 5 2 27 37 36 41 1/4, 3/8 172 18 145 90 20 90 10 222 80 28 8 7 7 14 7 12 50 80 95 34 5 2.3 32 37 42 41 3/8, 1/2 204 20 166 106 20 106 10 246 90 31 10 9 9 18 9 15 55 88 111 50 9 3.2 37 37 43 41 1/2, 3/4 225 24 200 122 20 122 15 278 100 33 10 9 9 18 9 15 65 102 126 60 10 3.2 39 37 51 41 3/4, 1 259 31 Micro Mist Separator Series AMD Dimensions

Table of Contents

No designated speed 31 No speed designation with MOVA or MOVI, and no prior speed designation found. No jump destination 32 No label found at the program designated jump destination. Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

thread depth 3.5 3.8 7 Bottom view of MXQ8-30 132214.6 K 3.8 7 27 23 6 4 23 Z ZZ G (NN 1) x H H 12.5 12.5 5.7 5.7 A B 3.2 3.2 6.5 7 7 14 1 3H9 ( ) depth 3 +0.025 0 A B 4 3H9 ( ) depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 HA GA A-A B-B (mm) Model F 25 25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly 13 14 15 NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 1233.

CXS

x 0.5 with depth 3.5 10 9 + ST 2.7 8 6.7 2-M3 x 0.5 with depth 3 (Piping port) 20 20.5 5.5 42 + ST ST 5.5 4.5 32 + ST 13.4 5 + ST 2.75 11 12 1.2 M3 x 0.5 x 3 (Hexagon socket head set screw) M8 x 1.25 x 7.5 (Bolt holder) 3.8 3.8 0.5 45 45 3 3 25 0.2 25 0.2 5.3 5.3 32 31 16 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 3 3 45 45 5.5 2-M3 x 0.5 through M2.5

SY

SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) M4 x 31 (Flat nickel plated) SY3000-11-24 SY5000 SY5000-11-10 SY7000 SY7000-11-9 Note 2) For SY9000, the SUP port is only available on the end plate side. SY9000-18-2 (M3 x 42) SY9000 SY9000-11-1 Plug (white) Insert into unused cylinder ports and SUP/EXH ports. The minimum order quantity is 10 pieces. Order in multiples of 10.

Modular Design with Uniform Body Style

( 0.8 ppm) [AFD] Max. 0.1 mg/m3 (Before saturated with oil 0.01 mg/m3 or less 0.008 ppm) Compressed air purity class*5 [AFM] ISO 8573-1:2010 [ 3 : 7 : 3 ]*6 [AFD] ISO 8573-1:2010 [ 1 : 7 : 2 ]*7 Drain capacity 8 cm3 25 cm3 45 cm3 Bowl material Polycarbonate Bowl guard Semi-standard (Steel) Standard (Polycarbonate) Weight 0.10 kg 0.18 kg 0.37 kg 0.40 kg *1 Inlet pressure: 0.7 MPa.